• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1207-1210
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• 2003

This paper deals with experiments for dynamic characteristics and performance evaluation of the 3-axis fine positioning stage developed in [1]. The features of the developed fine positioning stage are the long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design. The dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the actuator and the stage design. Performance evaluation is also made for the PZT actuators as well as the stage positioning accuracy. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.742-745
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• 2003

Piezoelectric elements driven ultra-precision stages have been used for high accuracy, fast response and high load rapacity. which are allowable to apply the stages to AFMs. Most of the piezoelectric driven stages are guided by flexure hinges for force transmission and mechanical amplification. However the flexure hinge mechanisms cause lack of position accuracy due to coupled and parasitic motions. Hence it is important that the mechanism design of the stage is focused on the stiffness of the flexure hinges to accomplish fast response and hish accuracy without the coupled and parasitic motions. In this study, some constraints for optimal design of a piezoelectric elements driven stage and a design method are proposed. Next, an optimal design is carried out using mathematical calculation. Finally the designed results are verified by FEM.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.3
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• pp.111-119
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• 2006

The ultra-precision stage is demanded for some industrial fields such as semiconductor lithography, ultra-precision machining, and fabrication of nano structure. A new stage was developed for those applications in order to obtain nano meter resolution. This stage consists of symmetric double parallelogram mechanism using flexure hinges. The mechanical properties such as strength of the flexures and deformations along the applied force were analyzed using FEM. The stage is actuated by a piezoelectric actuator and its movement was measured by a ultra-precision linear encoder. In order to improve positioning performance, a PID controller was designed based on the identified second order transfer function. Experimental results showed that this stage could be positioned within below 5 nm resolution irrespective of hysteresis and creep by the controller.

• Proceedings of the KIEE Conference
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• 1998.07g
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• pp.2458-2460
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• 1998

To drive motor or heating machine, it needs the electric power system like the apparatus of inverter. This electric power system obviously comprises power switching devices and drivers to run them. And this system has the topology comprised one/many arm(s), - each arm has high side switching device and low side switching device. Transformer, photocoupler, and HVIC having functions of isolation and level shift which are important thing to drive high side switching device are used as component of drivers in conventional apparatus. Piezoelectric transformers are proposed in this paper, and applied to drive high side swiching device. Through experiments, the possiblities of driving high side switching device are presented and the problems are mooted concurrently. But, we also consider a counterplan for solving the mooted trouble issues.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.105-108
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• 2003

본 논문은 파이렉스 #7740 유리박막을 이용한 MEMS용 MLCA와 Si기판의 양극접합 특성에 관한 것이다. 최적의 RF 마그네트론 스퍼터링 조건(Ar 100 %, input power $1W/\textrm{cm}^2$)하에서 MLCA 기판위에 파이렉스 #7740 유리의 특성을 갖는 박막을 증착한 후 600 V, $400^{\circ}C$에서 1시간동안 양극접합했다. 그 다음에 Si 다이어프램을 제조한 후, MLCA/Si 접합계면과 MLCA 구동을 통한 Si 다이어프램 변위특성을 분석 및 평가하였다. 다이어프램 형상에 따라 정밀한 변위 제어가 가능했으며 0.05-0.08 %FS의 우수한 선형성을 나타내었다. 또한, 측정동안 접합계면 균열이나 계면분리가 일어나지 않았다. 따라서, MLCA/Si기판 양극접합기술은 고성능 압전 MEMS 소자 제작공정에 유용하게 사용가능할 것이다.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.9
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• pp.881-886
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• 2009

This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.9 s.252
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• pp.1094-1101
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• 2006

Recently, a ultra-precision stage is widely used in the fields of the nano-technology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator and ultra-precision linear encoder, is designed and developed. The system transfer function of the ultra-precision stage system was derived from the step responses of the system using system identification tool. A $H_{\infty}$ controller was designed using loop shaping method to have robustness for the system uncertainty and external disturbances. For the designed controller, simulations were performed and it was applied to the ultra-precision stage system. From the experimental results it was found that this stage could be controlled with less than 5nm resolution irrespective of hysteresis and creep.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.282-283
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• 2007

압전소자의 초음파 진동을 구동원으로 하는 초음파 모터의 토오크 특성을 개선하기 위하여 양면 Teeth 구조를 가지는 진행파 여진용 고정자를 설계하고, 이를 유한요소해석 프로그램 ATILA-GID를 이용하여 변위분포를 해석하였다. 한 면에만 Teeth 구조를 가지는 기존의 고정자를 이용한 초음파 모터가 소형화, 제한된 토오크 응용분야에 있어서 Direct drive actuation을 위한 발판을 마련해 주었다면, 본 연구에서 제안하는 양면 Teeth 구조의 고정자는 토오크와 효율, 출력특성의 개선과 함께 구조적인 특성에서 기인하는 온도 안정성에 의하여 그 응용분야의 확대를 기대할 수 있다.

• Proceedings of the KIEE Conference
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• 1993.07b
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• pp.1054-1056
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• 1993

The displacement amplifying units(DAUs) of the flexure hinge mechanism are used to amplify the displacements from the Piezo actuators using the principle of a lever. We fabricate for two step DAUs with the SUS304(stainless steel) and experiment them. The fabricated four DAUs have all the hinges aligned to a straight line, and differ in the first step ideal gain($4{\times}10,\;6{\times}10,\;8{\times}10,\;10{\times}10$). We measure the input and the output displacements to get the real amplifying gain. The resonant frequencies of these DAUs are also measured. The experimental results are compared with those of the theoretical formula and with those of the numerical analyses.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.3
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• pp.155-162
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• 2004

This paper presents the fabrication procedure and the experiments for the 3-axis fine positioning stage proposed in［1］. First, the dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the stage design specifications. Secondly, the performance of the stage is also evaluated on the accuracy associated with linear positioning, angular error, and straightness error. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning. Through the analysis and experiment, the developed fine positioning stage are found to have a long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design.