• Title/Summary/Keyword: 압전 구동 소자

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Ultra Precision Positining System for Servo Motor-piezo Actuator Using the Dual Servo Loop and Digital Filter Implementation (이중서보제어루프와 디지털 필터를 통한 서보모터-업전구동기의 초정밀위치결정 시스템 개발)

  • Lee, Dong-Sung;Park, Jong-Ho;Park, Heui-Jae
    • Journal of the Korean Society for Precision Engineering
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    • v.16 no.3 s.96
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    • pp.154-163
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    • 1999
  • In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

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Development of 3-axis Fine Positioning Stage: Part 1. Analysis and Design (초정밀 3축 이송 스테이지의 개발: 1. 해석 및 설계)

  • 강중옥;서문훈;한창수;홍성욱
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.3
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    • pp.147-154
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    • 2004
  • This paper presents a procedure for analysis and design of a fine positioning stage, which has many applications in industries for machine tools, semiconductor, LCD and so forth. The stage considered here is based on a single module with 3 axes which is composed of flexures hinges, piezoelectric actuators and their peripherals. Through a series of analysis, the structural analysis model is simplified as a rigid body(the moving part) and springs(the flexures hinges). An experimental design procedure is applied to determine the dimension of flexures hinges. A sensitivity analysis on the notch positions is also performed to obtain a guideline of fabrication accuracy for the stage. An actual fine stage is made and verified through an experiment on the dynamic characteristics.

Development of the Protocol of the High-Visibility Smart Safety Vest Applying Optical Fiber and Energy Harvesting (광섬유와 압전 에너지 하베스팅을 적용한 고시인성 스마트 안전조끼의 개발)

  • Park, Soon-Ja;Jung, Jun-Young;Moon, Min-Jung
    • Science of Emotion and Sensibility
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    • v.24 no.2
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    • pp.25-38
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    • 2021
  • The aim of this study is to protect workers and pedestrians from accidents at night or bad weather by attaching optical fiber to existing safety clothing that is made only with fluorescent fabrics and retroreflective materials. A safety vest was designed and manufactured by applying optical fiber, and energy-harvesting technology was developed. The safety vest was designed to emit light using the automatic flashing of optical fibers attached to the film, and an energy harvester was manufactured and attached to drive the light emission of the optical fiber more continuously. As a result, first, the vest wearer' body was recognized from a distance through the optical fiber and retroreflection, which helped prevent accidents. Thus, this concept helps in saving lives by preventing accidents during night-time work on the roadside or activities of rescue crew and sports activities, or by quickly finding the point of an accident with a signal that changes the optical fiber light emission. Second, to use the wasted energy, a piezoelectric-element power generation system was developed and the piezoelectric-harvesting device was mounted. Potentially, energy was efficiently produced by activating the effective charging amount of the battery part and charging it auxiliary. In the existing safety vest, detecting the person wearing the vest is almost impossible in the absence of ambient light. However, in this study, the wearer could be found within 100 m by the light emission from the safety vest even with no ambient light. Therefore, in this study, we will help in preventing and reducing accidents by developing smart safety clothing using optical fiber and energy harvester attached to save lives.

Validation of Piezoelectric Sensor Diagnostics Algorithm Using Instantaneous Baseline Data (Admittance를 기반으로 한 센서 자가 진단 알고리즘의 실험적 검증 - 상호비교를 통한 센서 결함 탐지)

  • Jo, HyeJin;Jung, Hwee Kwon;Park, Tong il;Park, Gyuhae
    • Composites Research
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    • v.28 no.4
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    • pp.148-154
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    • 2015
  • In order to detect damage in early stages and properly maintaining structures, the structural health monitoring technology is employed. In most cases, active-sensing SHM needs many piezoelectric (PZT) sensors and actuators. Thus, if there is a defect on PZT used for active-sensing SHM, the structural status could be misclassified. This study, for reliable SHM performance, investigated to detect defects of sensors by using the admittance-based sensor diagnostics. This study also introduced an algorithm that can diagnose sensor defects based only on data measured from the sensors in case that information about the changes in adhesive and environmental investigation, this study confirms that the proposed algorithm could be efficiently applied to real-world structures in which a significant temperature variation could take place.

Development of a High speed Actuator for electric performance testing System of ceramic chips (세라믹칩 전기적 성능검사 시스템을 위한 고속구동 액튜에이터 개발)

  • Bae, Jin-Ho;Kim, Sung-Gaun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.12 no.4
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    • pp.1509-1514
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    • 2011
  • The core of IT products, electronic components, especially the MLCC, chip inductors, chip Varistors and so on. In order to test the electrical characteristics of the chip using the Reno-pin contact test method has been used. In current chips, mass production of semiconductor manufacturing processes, high-speed production test for the chip speed up, precision is required. But Vibration displacement is a very short, so in order to overcome these shortcomings, the displacement amplification to design the structure has been actively studied. In this paper, a building structure with a flexible hinge was designed amplification instrument, semiconductor chip industry in the performance test and inspection equipment to measure the electrical characteristics of high speed linear actuators Reno-Pin using system was developed.

Design of Ultrasonic Vibration Device using PZT Actuator for Precision Laser Machining (압전구동기를 이용한 정밀 가공용 초음파 진동장치 설계)

  • Kim, W.J.;Fei, L.;Cho, S.H.;Park, J.K.;Lee, M.G.
    • Laser Solutions
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    • v.14 no.2
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    • pp.8-12
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    • 2011
  • As the aged population grows around the world, many medical instruments and devices have been developed recently. Among the devices, a drug delivery stent is a medical device which requires precision machining. Conventional drug delivery stent has problems of residual polymer and decoating because the drug is coated on the surface of stent with the polymer. If the drug is impregnated in micro hole array on the surface of the stent, the problem can be solved. Micro sized holes are generally fabricated by laser machining; however, the fabricated holes do not have an enough aspect ratio to contain the drug or a good surface finish to deliver it to blood vessel tissue. To overcome these problems, we propose a vibration-assisted machining mechanism with PZT (Piezoelectric Transducers) for the fabrication of micro sized holes. If the mechanism vibrates the eyepiece of the laser machining head, the laser spot on the workpiece will vibrate vertically because objective lens in the eyepiece shakes by the mechanism's vibration. According to the former researches, the vibrating frequency over 20kHz and amplitude over 500nm are preferable. The vibration mechanism has cylindrical guide, hollowed PZT and supports. In the cylinder, the eyepiece is mounted. The cylindrical guide has upper and low plates and side wall. The shape of plates and side wall are designed to have high resonating frequency and large amplitude of motion. The PZT also is selected to have high actuating force and high speed of motion. The support has symmetrical and rigid characteristics.

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A Performance Improvement of Ultrasonic Diagnosis Transducer by Transient Acoustic Field Analysis (과도음장 해석을 통한 초음파 진단 탐촉자의 성능 개선)

  • 박은주;송행용;김무준;김동현;이수성;하강열
    • The Journal of the Acoustical Society of Korea
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    • v.21 no.8
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    • pp.744-756
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    • 2002
  • The transient acoustic fields formed by a 3.5 ㎒ curved linear array transducer which is commonly used in ultrasonic medical imaging system for diagnosis of abdomen are systematically analyzed to obtain new design parameters for the better acoustic image. In the analysis with an assumption of radiating waveform, element size, radius of curvature, amplitude apodization are considered as parameters giving constitutive relations with the fields. As simulation results, appropriate new parameters with the reduced curvature and elevation aperture and the apodization of Hamming window, which make an improved acoustic beam with lower side lobe levels than a conventional typical transducer, are obtained.

A Study on the Motion Mechanism of Multi-Axis Ultra Precision Stage for Optical Element Alignment (광소자 정렬용 극초정밀 다축 스테이지의 구동 메커니즘에 관한 연구)

  • Jeong Sang-hwa;Kim Gwang-ho;Cha Kyoung-rae;Lee Kyoung-hyoung;Song Suk
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.15 no.1
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    • pp.8-16
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    • 2006
  • The communication through optical fiber is taking an important role of the expansion of communication network with excellent transmitting rate and quality. As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement of the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

Modeling and Analysis of a Friction Drive Type Precise Actuator (마찰구동형 액추에이터의 동특성 모델 및 거동 해석)

  • Kim, Sang-Chae;Kim, Soo-Hyeon;Park, Kyi-Hwan;Kwak, Yun-Keun
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.20 no.5
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    • pp.1419-1425
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    • 1996
  • In this work, a precies actuator which is capable of high positioning accuracy is developed. For estimation the dynamic behavior of the actuator, system modeling is performed by employing a stick-slip frection law. Dynamic characteristics over various types of driving input signals and vibraiton loci of the driving tip are examined by experiments. Phase differences between the input signals are applied, and the dynamic behavior of slider is investigated. From the simulation and experimental results, it is observed that the dynamic behaviors from the simulation results agree fairly well to those of the experimental results. Thisindicates that the model developed in this work is applicable to other precision mechanisms in which a friction farce is as improtant factor for actuation.

A Study on the Ultra Precision Rotational Device using Smooth Impact Drive Mechanism (SIDM(Smooth Impact Drive Mechanism)을 이용한 초정밀 회전기구에 대한 연구)

  • Lee S.;Jeon J.U.;Park K.Y.;Boo K.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.485-486
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    • 2006
  • This paper represents a ultra precision rotational device where the smooth impact drive mechanism(SIDM) is utilized as a driving mechanism. Linear motions of piezoelectric elements are converted to the rotational motion of disk by frictional forces generated between the rotational disk and the friction bars which are attached to the piezoelectric elements. This device was designed to drive a rotational disk using slip-slip motion mechanism based on stick-slip motion mechanism. Experimental results show that the angular velocity was increased in proportion to the magnitude of supplied voltage to piezoelectric element. In our device, the smooth rotational motion was obtained when the driving frequency has been reached to 500Hz under the driving voltage of 100V. The amount of step movement has been revealed to be $3.44{\times}10^{-4}$ radian.

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