• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.390-391
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• 2006

This paper describes the design, fabrication and characteristics of a micromachined piezoelectric valve utilizing a multilayer ceramic actuator (MCA). The micromachined MCA valve, which uses a buckling effect, consists of three separate structures: the MCA, the valve actuator die and the seat die. The valve seat die with 6 trenches was made, and the actuator die, which is driven by the MCA under optimized conditions, was also fabricated. After Si wafer direct bonding between the seat die and the actuator die, the MCA was also anodically bonded to the seat/actuator die structure. A polydimethylsiloxane (PDMS) sealing pad was fabricated to minimize the leak rate. Finally, the PDMS sealing pad was also bonded to the seat die and the stainless steel package. The MCA valve shows a flow rate of 9.13 sccm at an applied DC voltage of 100 V with a 50% duty cycle and a maximum non-linearity of 2.24% FS. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, as a medical bio-system and in the automobile industry.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.36 no.4
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• pp.341-350
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• 2023

The templated grain growth (TGG) method has gained significant attention for its ability to produce highly textured piezoelectric ceramics with significantly enhanced performance, making it a promising method for transducer and actuator applications. However, the texturing process using the TGG method requires the optimization of multiple steps, which can be challenging for beginners in this field. Therefore, in this tutorial, we provide an overview of the TGG method mainly based on our previous published works, including its various processing steps such as synthesizing anisotropic-shaped templates with size and size distribution control using the molten salt synthesis technique, tape casting, and identifying key factors for proper alignment of the templates in the target matrix system. Our goal is to provide a resource that can serve as a basic reference for researchers and engineers looking to improve their understanding and utilization of the TGG method for producing textured piezoelectric ceramics.