• Journal of the Korean Society for Precision Engineering
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• v.13 no.10
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• pp.88-93
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• 1996

The study was carried out development a pricision positioning apparatus, consisting of DG servo motor and piezoelectric actuatior. This system is composed of fine and coarse apparatus, measurement system and control system. Peezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is droved by DC servo motor. Control system output a signal from laser interfermeter and capacitive sensor to amplifer of DC servo motor and piezoelectric actuator after digital signal processing (DSP). Resolution of this apparatus measure with laser interferometer and microsense

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1993.05a
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• pp.15-18
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• 1993

Piezoelectric Actuator and electrostrictive Actuator samples were fabricated using PMN-PT-PZ system ceramics with Barium substitution, and the strain properties of them investigated. The largest Piezoelectric coefficient and electromechanical coupling coefficient were observed at sintering temperature $1250^{\circ}C$, Barium 0.05 mol %. The strain of poled samples is observed twice highly then unpoled ones, and the former showed larger hysteresis in strain then the latter, too. Poled multilayered actuator samples showed considerable strain.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.18 no.2
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• pp.137-143
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• 2009

This paper presents the fabrication of inchworm motor for high precision actuator system of large displacement and high force. The inchworm motor consists of a extend actuator that provides displacement of tool guide and two clamping actuators which provide the holding force. In order to avoid the PZT fracture, design of pre-load housing was conducted by flexure hinge structure, because PZT actuator has low tensile and shear. To design the pre-load housing and optimize the clamping mechanism, the static and dynamic analysis were conducted by finite element method. From these results, a prototype of the inchworm motor was fabricated and dynamic characteristic with respect to the various frequency was tested. The maximum velocity of the inchworm motor was $41.1{\mu}m/s$ at 16Hz.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.130-130
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• 2004

본 논문에서는 RF 스위치의 엑추에이터로 사용하기 위한 수평구동형 박막형 PZT 엑추에이터의 설계, 제작 및 시험에 관한 것이다 기존의 RF 스위치들은 대부분 수직 방향의 접촉 방식을 채택하고 있고, 대부분 구조체가 두껍지 않은 막으로 이루어져 있어서, 엑추에이터로부터 힘을 충분히 전달받지 못한다. 이로 인해, 접촉력이 상대적으로 작게 되어, 접촉저항을 줄이기 위한 접촉압력을 내기 위해 접촉 면적을 줄일 수밖에 없게 된다. 따라서, 본 연구에서는 효과적인 힘의 전달이 가능한 수평방향의 접촉 방식과 상대적으로 큰 힘을 낼 수 있는 PZT 엑추에이터를 사용하고자 한다.(중략)

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1999.05a
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• pp.56-62
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• 1999

We make a study of pricisioning apparatus that is used in the various industrial machine. The study was carried out to develope a pricision positioning apparatus, consisting of servo motor and piezoelectric actuator. This system is composed of fine and coarse apparatus, measurement system and control system. Piezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is drived by servo motor. Control system output a signal from laser interferometer and microsense to amplifier of servo motor and piezoelectric actuator after digital signal processing(DSP). Resolution of this apparatus measure with laser interferometor and microsense so, we can controlled positioning of one output by the coarse positioning in the system. Also we obtain the positioning resolution of 9nm in the system.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.285-285
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• 2007

Friction material in a piezoelectric system is a important part to affect to moving performance. In this paper, alumina ceramics $(AlO_2)$, silicon carbide (SiC), high speed steel and super-hard alloy (WC, Tungsten Carbide) having a hardness knoop of 1000 to 2000 $kg/mm^2$ were tested as a friction material of AF module. Even though $AlO_2$, SiC and high speed steel were a high-hardness material, $AlO_2$ and SiC were worn by a rough surface, and SiC is rusted in humidity condition. AF module using super-hard alloy has showed a stable moving performance in life time test.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.756-759
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• 2004

We present a piezoelectric actuator using stiffness control and stroke amplification mechanism in order to make large lateral displacement. In this work, we suggest stiffness control approach that generates lateral displacement by increasing the vertical stiffness and reducing the lateral stiffness using additional structure. In addition, an additional structure of a serpentine spring amplifies the lateral displacement like leverage structure. The suggested lateral PZT actuator (bellows actuator) consists of serpentine spring and PZT/electrode layer which is located at the edge of the serpentine spring. The edge of the serpentine spring prevents the vertical motion of PZT layer, while the other edge of the serpentine spring makes stroke amplification like leverage structure. We have determined dimensions of the bellows actuator using ANSYS simulation. Length, width and thickness of PZT layer are 135$\mu$m, 20$\mu$m and 0.4$\mu$m, respectively. Dimensions of the silicon serpentine spring are thickness of 25$\mu$m, length of 300$\mu$m, and width of 5$\mu$m. The bellows actuator has been fabricated by SOI wafer with 25$\mu$m-top silicon and 1$\mu$m-buried oxide layer. The bellows actuator shows the maximum 3.93$\pm$0.2$\mu$m lateral displacement at 16V with 1Hz sinusoidal voltage input. In the frequency response test, the fabricated bellows actuator showed consistent displacement from 1Hz to 1kHz at 10V. From experimental study, we found the bellows actuator using thin film PZT and silicon serpentine spring generated mainly laterally displacement not vertical displacement at 16V, and serpentine spring played role of stroke amplification.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.757-760
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• 2004

Shaking beam을 이용한 초음파 선형모터는 모터 구동부에서 발생하는 타원궤적이 선형 slider 와 마찰이 되어 선형운동을 발생시킨다. 이러한 초음파 선형모터에서 설계변수는 모터의 효율과 추력(thrust force) 등 동특성을 결정한다. 특히 초음파 모터 동작부의 tip 과 선형 slider 의 contact point와 압착은 모터의 속도, 추력 동작 주파수, 효율에 직접적인 영향을 주는 중요한 parameter 로 작용된다. 본 연구에서는 모터와 선형 slider 의 압착과 contact point둥의 설계변수가 초음파 선형 모터의 성능에 주는 영향을 고찰하였다. 모터으구동부와 선형 slider 사이의 압착력 ($10N{\sim}50N$)과 4가지 곡률을 갖는 tip을 설계변수로 취하였다. Tip 의 형태에 따른 곡률과 모터 구동부와 선형 slider 사이의 압착력 변화에 따른 모터의 동작특성이 변화되는 것을 확인할 수 있었다.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1326-1331
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• 2003

Thick PZT films are required for the cases of micro actuators and sensors with high driving force, high breakdown voltage and high sensitivity, and so on. In this work, thick PZT films were fabricated by Sol-Gel multi-coating method. Total 8 types of samples using thick PZT films with thicknesses, about $1{\mu}m$ and $2{\mu}m$, and Pt top electrodes shapes for measuring transverse piezoelectric coefficient ($e_{31,f}$) were fabricated using MEMS processes. They were characterized by fabricated e31,f measurement system before and after poling. $e_{31,f}$ values of samples after poling were higher than before poling. Those of $2{\mu}m$ thick PZT films were also higher than $1{\mu}m$ thick PZT films. And those with long electrodes as top electrodes were also higher than shorter.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11a
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• pp.46-51
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• 2001

To reach high areal density, less track pitch is expected and more servo bandwidth is required. One approach to overcoming the problem is by using dual stage servo system. In this system, a voice coil motor (VCM) is used as the primary stage while a milliactuator is used as the secondary stage. We have suggested new milliactuator based on the shear mode of piezoelectric elements to drive the head suspension assembly. In this paper, we introduce controller design method, PQ method. PQ method reduces the controller design problem for DISO(dual-input/single-output) systems to two standard controller design problems for SISO(single-input/single-output) problems. The first part of PQ method directly address the issue of actuator output contribution, and the second part allows the use of traditional loop shaping to achieve the overall system performance. This paper shows how to employ the PQ method to meet aggressive close-loop performance specifications for a disk drive system with a VCM and piezoelectric milliactuator.