• The Journal of the Acoustical Society of Korea
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• v.39 no.2
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• pp.87-97
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• 2020

In this paper, the design of piezoelectric Micro-machined Ultrasonic Transducer (pMUT) for wideband ultrasonic radiation in air was investigated. One of the methods to achieve wide frequency bandwidth in single device is modeling the transducer to multi-resonance system. The new pMUT was designed as a multi-resonance system with the addition of a suitable acoustic structure to the front and back of a thin film structure. A new pMUT consisting of thin film parts, radiation parts, and packaging parts is designed with a Lumped Parameter Model (L.P.M). Finally, it was validated as a Finite Element Method (FEM) simulation. The final designed pMUT achieved a frequency band of 102 kHz ~ 132 kHz (-3 dB).

• Journal of Sensor Science and Technology
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• v.29 no.1
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• pp.33-39
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• 2020

Typically, photoacoustic images are obtained in water or gelatin because the impedance of these mediums is similar to that of the human body. However, these acoustic mediums can have an additional mass effect that changes the resonance frequency of the transducer. The acoustic radiation impedance in air is negligible because it is very small compared to that of the transducer. However, the high acoustic impedance of mediums such as the human body and water is quite large compared to that of air, making it difficult to ignore. Specifically, in a case where the equivalent mass is very small, such as with a micro-machined ultrasound transducer, the additional mass effects of the acoustic medium should be considered for an accurate resonance frequency design. In this study, a piezoelectric micro-machined ultrasonic transducer (pMUT) was designed to have a resonance frequency of 10 MHz in the acoustic medium of water, which has similar impedance as the human body. At that time, the resonance frequency of the pMUT in air was calculated at 15.2 MHz. When measuring the center displacement of the manufactured pMUT using a laser vibrometer, the resonance frequencies were measured as 14.3-15.1 MHz, which is consistent with the finite element method (FEM) simulation results. Finally, photoacoustic images of human hair samples were successfully obtained using the fabricated pMUT.