• Title/Summary/Keyword: 압입 실험

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Phase Transformation of Silicon by Indentation (압입법에 의한 실리콘의 상전이)

  • Kim, Sung-Soon;Lee, Hong-Lim
    • Journal of the Korean Ceramic Society
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    • v.39 no.12
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    • pp.1149-1152
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    • 2002
  • Indentation was used to analyze high pressure phases of silicon. Phase transformations on both loading time and loading rate were studied. Micro-raman spectroscopy was used to observe the indentation-induced transformations. As the loading time increased, Si-III and Si-XII disappeared and only a-Si was observed in (111) samples. As the loading time increased, the residual stress was removed by creation of cracks or dislocations. At 0.1 mm/min loading rate, pop-in . At 5 mm/min loading rate pop-in was observed in force/displacement curve of (111) sample, but pop-in was not observed in force/displacement curve of (100) sample. This result indicates that the loading rate affects the volume of phase transformation in silicon.

Investigation on the Penetration Resistance of Suction Bucket Foundation in Sand using Model Test (모형실험을 통한 모래지반에서 석션버켓기초의 관입저항력 평가)

  • Kim, Keunsoo;Kwon, Osoon;Oh, Myounghak;Jang, Insung
    • Journal of the Korean GEO-environmental Society
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    • v.15 no.6
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    • pp.75-83
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    • 2014
  • Suction bucket foundation is installed with the differential pressure created by pumping water out of bucket. Bucket foundation has usually been utilized in mooring anchor for offshore platform or floating oil and gas production facilities in the open sea. After suction bucket foundation successfully was applied as the foundation for offshore wind turbines in Europe, it recently attracts much attention in Korea, too. To estimate the penetration resistance of the suction bucket foundation is one of the important matters that should be considered during its installation. This study carried out a series of model tests to investigate the penetration resistance of suction bucket foundation. And the mobilized soil strength factor was reviewed through comparing the experimental results by two installation ways (e.g., push-in-load and suction) and the results calculated by the conventional equation.

박막 표면의 플라즈마 damage에 대한 식각 물성 연구

  • Lee, Jae-Hun;Kim, Su-In;Kim, Hong-Gi;Lee, Chang-U
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.303.2-303.2
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    • 2016
  • 현재 플라즈마를 이용한 기술은 반도체, 태양광 발전, 디스플레이 등 산업의 전반적인 분야에서 특히 반도체 공정을 이용한 산업에서는 핵심적인 기술이다. 반도체 공정 중에서 박막 증착과 식각 분야에서 플라즈마를 사용한 기술은 매우 높은 가치를 지니고 있다. 중요한 플라즈마 연구로는 이론적 접근을 통한 플라즈마 소스 개발과, 기 개발된 플라즈마 소스를 적용하여 반도체 공정에 적용함으로써 최적의 조건을 찾아내며, 그에 대한 메커니즘을 연구하는 분야로 크게 분리할 수 있다. 따라서 이러한 플라즈마 기술이 발달함에 따라 nano-scale의 연구 또한 상당히 중요한 부분으로 자리 잡고 있다. 본 실험에서는 RF magnetron sputter를 사용하고 질소 유량을 0.5 sccm으로 고정하여 AlN 박막을 증착하였다. 이후 상압 플라즈마를 이용하여 식각을 진행하였다. AlN 박막 전체 표면에 대하여 3초 및 6초간 식각을 진행하였다. 이후 Nano-Indenter를 사용하여 $100{\sim}7000{\mu}N$까지 힘을 증가시키며 측정하였다. 3초간 식각을 진행한 시료의 경우 압입 깊이 대비 Hardness 그래프에서 약 40 ~ 100 nm 까지 약 2.5 GPa 정도의 차이가 발생하였고 6초간 식각을 진행한 시료의 경우 압입 깊이 대비 Hardness의 그래프에서 약 40 ~ 130 nm 까지 약 1 GPa 정도의 차이가 발생함을 확인하였다. 이후 WET-SPM 장비를 사용하여 AFM 모드를 이용하여 박막 표면이 거칠기를 확인하였다. 플라즈마 식각공정을 거치지 않은 시료의 경우 박막의 거칠기는 7.77 nm로 측정되었고 3초간 플라즈마 식각공정을 거친 시료의 경우 6.53 nm, 6초간 플라즈마 식각공정을 거친 시료의 경우 8.45 nm로 나타남을 확인할 수 있었다. 이와 같은 결과들로부터 플라즈마 식각공정은 박막의 표면에도 영향을 미치지만 박막 내부 일정 부분까지 영향을 받는 것을 확인하였다.

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Experimental Study on Fatigue Crack Initiation and Propagation due to Fretting Damage in Press-fitted Shaft (압입축에 발생하는 프레팅 피로균열 발생 및 진전 특성 실험)

  • Lee, Dong-Hyong;Kwon, Seok-Jin;Choi, Jae-Boong;Kim, Young-Jin
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.31 no.6 s.261
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    • pp.701-709
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    • 2007
  • To clarify the characteristics of surface damage due to fretting in press-fitted shaft, experimental methods were applied to small scale specimen with different bending load condition. Fatigue tests and interrupted fatigue tests of press-fitted specimen were carried out by rotate bending fatigue test. Macroscopic and microscopic characteristics were examined using scanning electron microscope (SEM), optical microscope or profilometer. It is found that small fatigue cracks are nucleated early in life regardless of bending stress, and thus the most portion of fatigue life on press fits can be considered to be crack propagation process. Most of surface cracks are initiated near the contact edge, and multiple cracks are nucleated and interconnected. Furthermore, the fretting wear rates at the contact edge are increased rapidly at the initial stage of total fatigue life. It is thus suggested that the fatigue crack nucleation and propagation process is strongly related to the evolution of surface profile by fretting wear in press fits.

A study on Creep of Plate PMMA in Thermal-Nanoindentation Process for Hyperfine pit structure Fabrication (극미세 점 구조체 제작을 위한 열간나노압입 공정에서의 평판형 PMMA의 크립현상에 관한 연구)

  • Lee, E.K.;Jung, Y.N.;Kang, C.G.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2008.05a
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    • pp.273-276
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    • 2008
  • Thermoplastic resin takes place stress relaxation and creep according to temperature and time. In room temperature, time dependent deformation (TDD) of polymer was carried out at previous study. In this study, it evaluates time dependent deformation to relate temperature. Nanoscale indents can be used as cells for molecular electronics and drug delivery, slots for integration into nanodevices, and defects for tailoring the structure and properties. Therefore, it is important to control pattern depth for change of indent depth by creep when using Nanoindenter. For evaluating TDD at high temperature, it is occurred thermal-nanoindentation test by changing hold time at maximum load. Temperature is putted at $90^{\circ}C$, hold time at maximum loads are putted at 1, 10, 50, 100, 200, 300 and 500s.

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연속압입 분석을 이용한 W-C-N 확산방지막 물성 연구

  • Lee, Gyu-Yeong;Kim, Su-In;Park, Sang-Jae;Lee, Dong-Gwan;Jeong, Yong-Rok;Jeong, Jun;Lee, Jong-Rim;Lee, Chang-U
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.181-181
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    • 2010
  • 현대 반도체 금속배선 연구에서는 기존에 쓰이던 Al (Aluminium) 금속배선 대신에 Cu (Copper) 금속배선 연구가 진행되고 있다. Cu는 Al 보다 비저항이 낮고, 녹는점도 Al보다 높다는 장점이 있지만 저온에서 기판인 Si (Silicon) 과 반응하고 접착력이 우수하지 못 하다는 단점이 있다. 이런 문제를 해결하기 위하여 확산방지막을 기판과 금속배선 사이에 삽입하는 방법이 제시 되었다. 확산방지막으로는 기존에 쓰이던 Ti (Titanium) 계열의 확산방지막과 W (Tungsten) 계열의 확산방지막이 있다. 이번 연구에서는 W 계열의 확산방지막에 불순물 C (Carbon) 과 N (Nitrogen) 을 첨가한 W-C-N 확산방지막 시편을 제조하였고, N2의 비율을 변화시키며 $600^{\circ}C$, $800^{\circ}C$열처리를 하였다. 본 실험의 결과로, 확산방지막의 $N_2$ 농도가 0, 0.5, 2 sccm으로 증가할수록 고온에서도 Elastic modulus 와 Hardness 값이 시편의 여러 영역에서 비교적 안정적으로 유지된다는 결과를 얻었다. 이 결과로부터 W-C-N 박막의 질소 농도에 따라 고온에서도 비교적 안정적으로 유지된다는 결과를 얻었다. 본 연구에서 시편은 RF magnetron sputtering 방법으로 제작하였고 Elastic modulus와 Hardness의 측정은 Hysitron사의 Triboindenter를 이용하였다. Indenting에 사용된 압입팁은 Berkovich tip을 사용하였다.

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Design Method to Reduce the Press-Fitted Assembly Dama (압입축의 파손 저감을 위한 설계 방법에 대한 연구)

  • Byon, Sung-Kwang;Choi, Ha-Young;Lee, Dong-Hyung
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.20 no.5
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    • pp.128-134
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    • 2021
  • A press-fitted shaft is an essential part used in industrial machines, and it is generally used to transmit large quantities of power. Very high contact pressure occurs at the end parts of the contact between the shaft and boss, which are press-fitted shaft components. Such contact pressure not only damages the contact surface of a press-fitted shaft but also reduces its fatigue strength. To improve a press-fitted shaft's fatigue strength, the contact pressure on the contact surface, which directly affects the fatigue strength, should be minimized. Thus, in this study, the design configuration optimization of the end part of the boss was based on the approximate optimization method and was aimed at minimizing the contact pressure at the end of a press-fitted shaft. Comparison of the contact pressure and the contact stress of a conventional press-fitted shaft with those of the optimized press-fitted shaft showed that the boss design of the optimized press-fitted shaft effectively improved the fatigue life.

Impact Damage Energy of Laminated Beams Subjected to Transverse Impact (횡방향 충격을 받는 적층복합보의 손상에너지에 관한 연구)

  • 박근철;김남식;김문생
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.15 no.3
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    • pp.723-734
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    • 1991
  • 본 연구에서는 투사체의 충격으로 인해 복합재에 발생하는 손상을 해석하기 위해 우선 이와 관련이 있는 손상에너지를 구할 수 있도록 동적 유한요소 프로그램을 개발하는데 있으며, 이렇게 구한 결과들을 Husman의 실험결과와 비교함으로써 본 논문 의 유한요소 프로그램이 적층복합보에 충격으로 인하여 전달되는 총에너지와 손상에너 지를 구하는데 타당한 것인가를 검토하고 이 프로그램을 이용하여 다음과 같은 것들을 해석하였다.

Nano-Mechanical Studies of HfOx Thin Film for Oxygen Outgasing Effect during the Annealing Process (고온 열처리 과정에서 산소 Outgasing 효과에 의한 HfOx 박막의 Nanomechanics 특성 연구)

  • Park, Myung Joon;Kim, Sung Joon;Lee, Si Hong;Kim, Soo In;Lee, Chang Woo
    • Journal of the Korean Vacuum Society
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    • v.22 no.5
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    • pp.245-249
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    • 2013
  • The $HfO_X$ thin film was deposited what it has been paid attention to the next generation oxide thin layer of MOSFET (metal-Oxide semiconductor field-effect-transistor) by rf magnetron sputter on Si (100) substrate. The $HfO_X$ thin film was deposited using a various oxygen gas flows (5, 10, 15 sccm). After deposition, $HfO_X$ thin films were annealed from 400 to $800^{\circ}C$ for 20 min in nitrogen ambient. The electrical characteristics of the $HfO_X$ thin film was improved by leakage current properties, depending on the increase of oxygen gas flow and annealing temperature. In particular, the properties of nano-mechanics of $HfO_X$ thin films were measured by AFM and Nano-indenter. From the results, the maximum indentation depth at the basis of maximum indentation force was increased from 24.9 to 38.8 nm according to increase the annealing temperature. Especially, the indentation depth was increased rapidly at $800^{\circ}C$. The rapid increasement of indentation depth was expected to be due to the change of residual stress in the $HfO_X$ thin film, and this result was caused by relative flux of oxygen outgasing during the annealing process.

Effect of open proximal contact on adjacent tooth and implant (개방된 인접면 접촉이 인접자연치와 임플란트에 미치는 영향)

  • Moon, Sohyun;Kim, Gwangyun;Cho, Seonghun;Song, Joohun;Kim, Hee-Jung
    • Journal of Dental Rehabilitation and Applied Science
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    • v.38 no.1
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    • pp.9-17
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    • 2022
  • Purpose: The purpose of this study is to investigate how open contacts impact the natural teeth and dental implant prostheses. Materials and Methods: Following criteria were used to select 20 implant crowns with open proximal contacts as the experimental group (Group A): the restorations were delivered in Chosun University Dental Hospital between 2008 and 2018, the restorations are in the posterior region, opposing teeth are fixed dental prostheses, neighboring teeth are sound natural teeth, the patient had been on the maintenance program for at least 3 years. Another 20 implant crowns with closed proximal contacts were selected as the control group (Group B) using the same criteria. Between the two groups, dental caries and food impaction of the neighboring natural teeth and marginal bone-loss of the implants were compared and evaluated. Results: There was no statistically significant difference between Group A and Group B in the occurrence rates of dental caries, food impaction, and marginal bone-loss. The amount of marginal bone-loss, however, revealed statistically significant differences between the two groups, with Group A showing 0.80 ± 0.39 mm loss and Group B showing 1.1 ± 0.43 mm loss. Conclusion: Implant prostheses with open contacts could be clinically considered in select cases as such restorations revealed no harmful effects on neighboring teeth and implant restorations within the perimeters of this study.