• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.165-165
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• 2012

비정질의 Tantalum-indium-zinc oxide (TIZO) 박막 트랜지스터는 RF-sputtering 방법으로 증착되었으며 소결된 단일 타겟을 사용하였다. 증착당시 반응 가스는 알곤과 산소를 95 : 5로 섞어 반응성 스퍼터링을 진행하였으며, 1 mtorr에서 5 mtorr까지 다양한 공정압력에서 증착한 이 후 Furnace system을 통하여 $350^{\circ}C$의 온도로 1시간 동안 후열처리 공정을 진행하였다. 비정질 TIZO 박막을 활성 층으로 사용하여 제작한 박막 트랜지스터는 공정압력이 낮아짐에 따라 높은 이동도와 낮은 subthrehsold gate swing 보였다. 이러한 현상의 원인을 규명하고자 물리적, 전기적, 광학적 분석을 통하여 공정압력의 변화가 박막 트랜지스터 구동에 미치는 영향을 해석하였다. 우선 공정압력에 따른 TIZO 박막의 Ta, In, Zn, O 각각의 조성을 분석하기 위하여 Rutherford back scattering (RBS) 분석을 실시하였다. 또한 X-선 회절(X-ray diffraction)분석을 통해 열처리된 TIZO 박막은 공정압력에 따라 물리적 구조의 변화를 일으키지 않으며 모든 박막은 비정질상을 보이는 것을 확인하였다. 3.3eV의 광학적 밴드 갭은 기존에 보고되었던 비정질 산화물 반도체(InGaZnO, HfInZnO 등)와도 유사한 밴드갭을 가지고 있음을 확인하였다. 또한, spectroscopic ellipsometry (SE)분석을 통하여 전도대 이하 밴드 갭 내에 존재하는 결함상태 및 전도대에서 결함상태까지의 에너지 준위 그리고 공정압력에 따라 결함의 양과 발생되는 에너지 준위가 변화하는 현상을 관측하였다. 박막을 제조 할 때의 공정압력은 박막 내의 결함의 양 및 발생되는 에너지 준위의 변화를 야기하고 변화된 결함의 양과 발생된 에너지 준위에 따라 박막트랜지스터의 전기적 특성을 변화시킨다는 결과를 도출하였다.

• Clean Technology
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• v.19 no.2
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• pp.165-172
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• 2013

In this study, the hydrogen chloride removal using K-based dry sorbents ($K_2CO_3/Al_2O_3$, KEPRI, Korea) was studied with varying the pressure in a fixed bed reactor (15 cm tall bed with 0.5 cm I.d.). Working temperature was $400^{\circ}C$ and feed gas concentration was 750 ppm (HCl vol%, $N_2$ balance). The chloride sorption capacity of sorbent increases with increasing pressure (1, 5, 10, 15 and 20 bar). Also, after forming KCl crystal by reaction with $K_2CO_3$ and HCl, owing to the strong bonding energy, sorbent regeneration was practically impossible. Its optical, physical and chemical characterizations were evaluated by SEM, EDAX, BET, TGA and XRD. At $400^{\circ}C$ and 20 bar condition, working condition for the dehalogenation process after gasification, K-based dry sorbent showed high HCl sorption capacity and HCl/$N_2$ separation performances comparing with Ca-based and Mg-based dry sorbents.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.41 no.6
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• pp.381-387
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• 2017

Dehydrogenation from the hydrolysis of a sodium borohydride ($NaBH_4$) solution has been of interest owing to its high theoretical hydrogen storage capacity (10.8 wt.％) and potentially safe operation. An experimental study has been performed on the catalytic reaction rate and pressure drop of a $NaBH_4$ solution over both a single microchannel with a hydraulic diameter of $300{\mu}m$ and a staggered array of micro pin fins in the microchannel with hydraulic diameter of $50{\mu}m$. The catalytic reaction rates and pressure drops were obtained under Reynolds numbers from 1 to 60 and solution concentrations from 5 to 20 wt.％. Moreover, reacting flows were visualized using a high-speed camera with a macro zoom lens. As a result, both the amount of hydrogenation and pressure drop are 2.45 times and 1.5 times larger in a pin fin microchannel array than in a single microchannel, respectively.

• Journal of Energy Engineering
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• v.14 no.1
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• pp.1-10
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• 2005

The combustion reactivity of char depending on the pyrolysis pressure was investigated with Pressurized Thermogravimetric Analyser. The amounts of volatiles released at pyrolysis pressure of 1, 8 and 15 atm were, first, measured with Alaska, Adaro and Denisovsky coals. Reactivities of chars produced at var-ious pyrolysis pressure were evaluated at atmospheric pressure and 500℃, and analysed in terms of char crystal structure, surface area, pore characteristics and chemical composition of char. Finally, the combustion reactivities of three chars were examined at pressure of 1 atm, 8 atm and 15 atm. From this study, it was recognized that the amount of volatiles released decreases with increase in pyrolysis pressure, and reaction rate of char produced at higher pyrolysis pressure was lower than that at lower pyrolysis pressure. It might be resulted from the difference in char surface area and pore characteristics rather than char crystal structure and chemical characteristics. At 15 atm, kinetic parameters of Alaska char were obtained with the grain model, and these were 56.8 KJ/mole for activation energy and 222.34 (1/min) for frequency factor.

• Korean Journal of Materials Research
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• v.6 no.1
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• pp.106-115
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• 1996

본 연구에서는 PET(PentaEthoxy Tanatalum:Ta(OC2H5)5) 유기금속 화합물 전구체를 사용하여 차세대 초고집적회로 제조시 고유전체 물질로 유망한 Ta2O5 박막을 열화학증착 방법에 의하여 증착하였다. 본 증착실험을 통하여 여러 가지 운속기체, 기판온도, 반응압력 등의 공정변수가 층덮힘에 미치는 영향을 고찰하였으며 Monte Carlo 전산모사 결과와 기판온도 변화에 따른 층덮힘 패턴의 변화에 대한 실험결과를 비교하여 부착계수를 산출하였다. 운송기체로는 N2, Ar, He을 바꿔가며 실험하였으며 He>N2>Artns으로 층덮힘이 양호한 것으로 나타났다. 이는 운송기체의 종류에 따라 운동량 확산도, 열 확산도, 물질 확산도 등의 이동현상 특성값들이 다르기 때문이라 생각된다. 기판온도의 증가는 운송기체의 종류에 관계없이 층덮힘을 악화시켰으며 도랑내부에서의 Knudsen 확산과 표면반응물의 탈착에 비해 표면반응이 보다 지배적인 역할을 담당함을 알 수 있었다. 또한 질소를 운송기체로 사용한 경우에 부착계수의 겉보기 활성화 에너지는 15.9Kcal/mol로 나타났다. 그리고 3Torr 이하에서 반응압력이 증가하는 반응압력이 증가하는 경우에는 물질 확산도의 감소 효과 때문에 층덮힘이 악화되었다. 본 연구결과 3Torr, 35$0^{\circ}C$에서 He 운송기체를 이용한 경우가 가장 우수한 층덮힘을 얻을 수 있는 최적 공정 조건임을 알 수 있었다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.30 no.2
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• pp.91-97
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• 2002

Dynamic extinction of solid propellants subjected to rapid pressure drop was studied with the aid of energy equation of condensed phase and flame model in gas phase. It is found that the total residence time($\tau_\gamma$) which measures the residing time of fuel in the reaction zone may play a crucial role in determining the dynamic response of the combustuion to extinction. Residence time was modeled by various combinations of diffusion and chemocal kinetic time scale. Effect of pressure history coupled with chamber volume on the extinction response was also performed and was found that dynamic extinction is more susceptible in a confined chamber than in open geometry. And, dynamic extinction was revealed to be affected profoundly by diffysion time scale rather than chemical kinetic time scale.

• Journal of the Korean Chemical Society
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• v.32 no.1
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• pp.48-52
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• 1988

Kinetics of the reaction of 2-phenethyl p-bromobenzenesulfonate with substituted pyridines in acetonitrile were investigated by an electric conductivity method at 1-2000 bars and $45{\sim}55{\circ}C$. The rates of these reactions were increased with raising temperatures, pressures and by changing electron-donating substitutents in pyridine. When raising pressure the Hammett reaction parameter $I{\rho}I$ and Bronsted ${\beta}$ values were increased, and isokinetic temperature observed from isokinetic relations hip between ${\Delta}H^{\neq}$ and TEX>${\Delta}S^{\neq}$ was decreased. These results indicate that the $S_N2$ characters were increased with raising pressure.

• Journal of the Korean Chemical Society
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• v.30 no.3
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• pp.301-306
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• 1986

The rate constants for the solvolysis reactions of p-methoxybenzylchloride in ethanol-water mixtures were determined at 2$^{\circ}$ and 10$^{\circ}C$ up to 1600bar. Rates of reaction were increased with increasing temperature and pressure, and decreased with increasing solvent composition of ethanol mole fraction. From the rate constants, the values of the activation parameters (${{\Delta}V_o}^{\neq},\;{\Delta}{\beta}^{\neq},\;{\Delta}H^{\neq},\;and\;{\Delta}S^{\neq}$) were evaluated. The values of ${{\Delta}V_o}^{\neq}$ and ${\Delta}{\beta}^{\neq}$ exhibit the extremum behavior at about 0.30 mole fraction of ethanol. This behavior is discussed in terms of solvent structure variation. From these results, it could be postulated that the reaction proceeds through $S_N1$ mechanism.

• Journal of the Korean Chemical Society
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• v.31 no.5
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• pp.400-405
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• 1987

The two dissociation constants of three amino acid, glycine, alanine, and tryptophan were measured by the conductometric method in the temperature from 15 to 35$^{\circ}$C and pressure up to 2,500bar in aqueous solution. The both dissociation constants were increased as the temperature increased but the pressure effect were not same as the temperature effect. The first constants were increased as the pressure increased but second constants were decreased except tryptophan. The characteristic properties of these amino acids were discussed from the thermodynamic properties of the dissociation reaction. The substituted effects of the reaction were deduced from Hammett reaction and substituted constants which were calculated from the dissociation constants.

• Journal of the Korean Chemical Society
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• v.33 no.4
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• pp.343-349
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• 1989

The dissociation constants of ${\beta}$-alanine and ${\gamma}$-aminobutyric acid were measured in the temperature range from 20 to $40^{\circ}C$ and pressure up to 2,500 bar by conductometric method. The both dissociation constants of respective amino acid increase with temperature increase but pressure effect is not same as the temperature. The $K_1$ increases as pressure increases but $K_2$ decreases. The properties of these amino acids were discussed in terms of the thermodynamic properties of the dissociation reaction. A relationship between the dissociation constants and the distance between substituted groups of amino acid was discussed. The substituted effects of the reaction were deduced from Hammett reaction and substituted constants which were calculated from the measured dissociation constants.