• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.166-166
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• 1998

반도체 공정에서 기존보다 큰 30cm 웨이퍼훌 이용하기 위해서 기존의 ECR, Helicon, ICP, 등 공정용 고 밀도 플라즈마 원들의 대면적화에 대한 연구가 세계적으로 진행되고 있다 현 상황에서는 평판형 안테 나룰 이용한 TCP가 대면적용 폴라즈마 원의 가장 유력한 후보로 여겨지고 있다 TCP롤 대면적화 하는 데 있어서 중요한 문제점으로는 대면적에서의 큰 안테나 인되턴스로 인한 임피던스 정합과 대면적에서 의 유전울질의 기계적 강도이다. 앓은 유전물질올 사용힐 수 있도록 대면적 TCP 플라즈마 원올 실계 저l작하였고 이차원 가열이론올 이용한 TCPRP code 률 이용하여 안테나의 반경옳 결정하였디 안테나의 인덕턴스 값올 줄이기 위해서는 주m수는 13.56MHz 보다 낮은 4-5MHz 부근에서 작동하는 RF 파워룰 선택하였다 이 파워 서플라이는 보통 사용되는 50n 흩력 입묘$\mid$던스훌 갖는 형태가 Of니라 LC 공진현상 올 이용하여 부하에 파워률 전달하는 형태이다 .. TCP 장치에 사용할 수 있도록 파워 서플라이 흩력 단에 안테나와 직혈로 가변 콘덴서를 달아서 임11I던스 정합올 힐 수 있게 하였다 안테나에 직훌로 달Of줌으 로써 안테니의 인덕턴스훌 훌여주는 효과훌 얻올 수 있다 안테나에 흐르는 전류룰 측정하기 위해서 사 각형 루프로 전류 픽업 코일을 만들었고 진공상태에서 RF 파워률 인가하고 안테나의 전류와 전압을 측정하여 픽업 코일걸과훌 조정하였다. 발생기체로는 헬륨올 사용하였고 1-100mTorr 의 압력범위에서 실험을 하였다 플라즈마롤 빌샘시키고 파워를 증가 시킴에 따라 E-H mode transition 현상이 관찰되었고 그 때의 임계 전류 값을 측정하였다. 압력이 낮올수록 모드 변화가 일어나는 전류의 값이 작았다 임계 전류는 압력에 대해서 선형적인 특성을 보였다 이는 압력이 낮을수록 유도걸힘이 더 잘 된다는 것을 의미한다 1 1 mTorr에서는 H-mode에서 안테나의 전류가 파워훌 증가시킴에 따라 계속 증가하였으니, 압력이 올라 갈수록 조금씩 증가하는 정도가 줄어들고. 100mTorr에서는 포화된 값을 나타냈다 H-mode로 넘어간 후 에는 파워가 증가황에 따라 안테나의 임피던스 값이 모든 압력영역에서 줄어드는 경황을 보였고, 이는 플라즈마의 인덕턴스에 의해서 안테나의 인덕턴스 기 감소되기 때문이다, 파워가 증가할수록 안테U오} 플라즈마 루프사이의 상호걸합이 증가하는 걸로 해석힐 수 있다 안테나의 인되턴스 변화보다는 저항.성 분의 변화가 컸다 하지만 전체 임피던스로 볼 때 저항성분이 상대적으로 작기 때문에 인덕턴스의 감소 가 더 큰 영향을 미치는 걸로 볼 수 있다. 하지만 플라즈마로의 파워 전달에는 저항성분만이 영향올 미 치므로 저항성분의 큰 변화는 파워가 많이 전달될올 의미한다 피워전달 효율을 계산해 본 결과 수 r mTorr 부근이 80-90% 정도의 높은 효율올 보였고 5mTorr 일 때가 가장 좋았다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.38 no.5
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• pp.456-466
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• 2010

Typical combustion instability such as DC-Shift found in the hybrid rocket motor is characterized by non-linearity. DC-Shift can occur in two different realizations. One is so-called a positive shift of measured DC voltage where the pressure increase suddenly. The other is a negative shift where the pressure drops abruptly. In the present work, specifically the negative DC-Shift was investigated to analyze the effect of oxidizer flow condition and the resonance between fundamental frequency and other ones, such as Helmholtz frequency, and acoustic frequency. Results show a peak frequency of several hundreds HZ shifts as combustion proceeds. A negative DC-shift was found as the result of phase cancellation between two dominant frequency, combustion frequency and flow related frequency. Still is it required to study further to identify the change of dominance of frequency during the combustion.

• Journal of the Korean Society of Propulsion Engineers
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• v.11 no.1
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• pp.11-17
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• 2007

Effects of combustion chamber design on combustion stability characteristics of a full-scale gas generator were studied experimentally. Thirty seven double-swirl injectors with recess number of 1.5 were distributed in the injector head, which significantly influences combustion performance. The characteristics of combustion stability were inspected by the parametric variations such as changing length and diameter of the combustion chamber and installing a turbulence ring. The experimental result shows that as the effective length of the combustion chamber decreased, an instability frequency took place in a high-frequency region, and the amplitude of the dynamic pressure generally diminished and could be reduced to the unharmful level. However, the dynamic pressure fluctuation in the region of longitudinal resonant frequency could not be suppressed perfectly.

• Korean Journal of Optics and Photonics
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• v.5 no.3
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• pp.386-393
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• 1994

We have investigated output characteristics of XeCI excimer laser excited by transeverse electronbeam. We used e-beam output of 880 kV, 21 kA (70 ns, FWHM) and controlled current density of e-beam by pulsed magnetic coil (4.7 kG) which was fabricated around an e-beam diode (A-K gap is 21 mm) and laser chamber. We have obtained 35 J (4 atm) of e-beam deposition energy injected into laser media. The deposition energy was converted from an exposure area of Radcolor film and rising pressure of gas media which is measured by pressure jump method. The excited volume of $320cm^{3}$ was calculated. The maximum efficiency of 1.7% was obtained with the mixing ratio of HCllXe/Ar==0.2/ 6.3/93.5% and total pressure of 3 atm. Also laser output energy and specific energy were obtained 0.52 J and 1.7 J/I, respectively. For the analysis of experimental results we have developed computer simulation code. From the good agreements with the results of experiment and simulation we could theoretically explain the XeCI* formation channel. relaxation channel, and absorption channel of 308 nm.308 nm.

• Korean Journal of Optics and Photonics
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• v.18 no.2
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• pp.142-148
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• 2007

A mechanically induced long-period fiber grating array was fabricated and its transmission characteristics were measured. The grating away consisted of a rubber cover and a 45 cm metal bar with 10 grating groups. Each grating group was composed of 60 gratings. The period of the grating of the grating groups was increased by $10{\mu}m$ increments from $690{\mu}m$ to $780{\mu}m$. The long period fiber grating was induced when the pressure was applied on the long period grating array and the resonant wavelength depended on the position of applied pressure. The experimental results shows that this long period fiber grating away can be used as a various band rejection filter or a fiber optic sensor.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2907-2912
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• 2007

The cooling water system for the PEFP 20 MeV proton accelerator was established and tested to obtain the precise resonance frequency of DTL through the temperature control of cooling water. The water temperature in the main flow loop was manipulated by adjusting the proportion of hot water returning from the DTL structures through the heat exchanger loop. Due to low duty factor operation and insufficient cooling loop installation of the DTL tanks, the manual mode operation was applied to maintain the DTL temperatures close to their resonance temperatures. The optimized process conditions with flow balancing and pressure drop in the DTL cooling systems are reported.

• Geotechnical Engineering
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• v.4 no.3
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• pp.27-34
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• 1988

Soils behave non-linearly at high strain. This study investigated the non-linear behavior of silty sands (Mixture of Ottawa Sand and Quartz Powder) by resonant column tests. The results were ·compared with Ramberg-Osgood's non-linear equation. From the tests, it was shown that the change of shear modulus and damping ratio was more sharp at low fine content, high void ratio and low confining pressure. It was also found that famberg-Osgood parameter, R was approximately 2.0, however the range of C varied from 200 to 3200.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.601-606
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• 2004

Vibration spectrums of the test loop according to flow conditions were analyzed in order to identify the sources of vibration at peak frequencies. While a flow condition of the sweep test was changed by varying pump rotational speed from 450 rpm to 1500 rpm by the step 150 rpm, midspan acceleration of the test section in width-direction and dynamic pressure perturbation in the test section were measured. Other sources of vibration due to the flow structure interactions, such as acoustic resonance, blade pulsing frequency and bellows wrinkles, were investigated. Pressure perturbation in the section and acoustic resonance due to branch pipe give major effects to the vibration of the test section in high frequency range of 1.5 kHz to 2.8 kHz.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1872-1874
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• 2001

This paper presents an implantable telemetry LC resonance-type pressure sensor to measure the cerebral ventricle pressure. The sensor consists of an inductor and a capacitor. The LC resonant circuit consists of the sensor and an external antenna coil that are coupled magnetically. The resonance frequency of the circuit decreases as the applied pressure increases the capacitance of the sensor. The sensor is designed in consideration of the biocompatibility and long lifetime for continuous monitoring of the ventricle pressure. The sensor is simple to fabricate and small in comparison with others reported previously. The inductor is fabricated by electroplating and the variable capacitor is constructed with a flexible p+ diaphragm. Also, the deflection of the diaphragm, the variation of the capacitance and the resonance frequency are analyzed and calculated.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.1277-1282
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• 2009

The main objective of this prototype is to control resonance frequency of DTL system through the temperature control of cooling water. It is to resonant frequency of the drift tube cavities to 350 MHz. This paper describes the design of a prototype cooling water skid required for the temperature control of the DTL cavities, focusing in the modeling and simulation of the cooling system, the sizing of water pumping skid component.