• 한국정밀공학회지
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• 제14권10호
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• pp.151-156
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• 1997

A laser measurement system, a modified Michelson interferometer, which can accurately measure high speed length and displacement of servomechanisms by detecting a phase shift in the measurement beam using an optical interference was developed. A frequency stabilized laser source and a 20 fold frequency interpolation and digitizing circuit were applied to the system. The refra- ctive index of the ambient air was calibrated through the Edlens formula. The system achieved a resolution of /40, 16nm, a maximum allow-able measurement speed of 600nm/sec, and a length measure- ment range of 1500 mm. Performance of the system was evaluated on the machining center in short and long length measurements.