• Journal of the Microelectronics and Packaging Society
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• v.20 no.2
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• pp.23-28
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• 2013

Microlens array as basic element of the optical system have been fabricated with various focal length (mainly with long focal length) depending on the purpose of application. In this paper, the microlens arrays were fabricated for observing fluorescent images within sol-gel. Though the fluorescent signal is very low, the microlens array can help obtaining clear images through extracting the fluorescent light from sol-gel. We fabricated microlens arrays with short focal length, which can extract the light using photoresist thermal reflow method. In the experiment, the diameter of microlens decreased after thermal reflow because the solvent within the photoresist was vaporized. Therefore, to compensate the shape error by this reduction, microlens diameter in photomask was altered and spin-coat recipe of photoresist were modified.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.11
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• pp.1129-1137
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• 2013

We report a centerless grinding machine which can perform multi-function with 600 mm wide grinding wheels. By increasing manufacturing area, long workpiece such as camshaft and steering shaft, is allowed to grind more quickly, compared with cylindrical grinding system. In this paper, the design of centerless grinding machine puts emphasis on symmetry to exploit the thermal stability. Results of finite element analysis shows that the difference of the structural deflection in the front and rear guideways is less than $1.5{\mu}m$ due to symmetric design. The difference is less than $3.0{\mu}m$, even though the thermal deformation is considered. According to the performance evaluation, the radial error motion of the G/W spindle, which is measured by applying Donaldson Ball Reversal, is about 1.1${\mu}m$. The yaw error of the G/W slide is improved from 2.1 arcsec to 0.5 arcsec by readjusting the slide preload and ball screw.