• Journal of the Korean Vacuum Society
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• v.15 no.1
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• pp.14-23
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• 2006

The scroll pump is widely used in ultra clean vacuum systems. However, there is no commonly available information on the hydrogen pumping characteristics of this pump, which creates a difficulty in determining whether the scroll pump can be used or not in a fusion experiment system where hydrogen ,is the main working gas. In this paper the experimental setup, measurement procedures, experimental results, and discussions on the pumping speed, the maximum compression ratio and the back-streaming properties of the scroll pump, especially for the hydrogen gas, are reported.