• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.12
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• pp.559-561
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• 2003

We report a new excimer laser annealing method which successfully results in a single grain boundary formation in the channel of polycrystalline silicon thin film transistor. The proposed method is based on lateral grain growth and employs aluminum patterns which act as selective beam mask and lateral heat sink. The maximum grain size obtained by the proposed method is about 1.6${\mu}{\textrm}{m}$ in the length. The grainboundaries should be arranged parallel with the direction of current flow for the best device performance, so we propose a new device fabrication method and a new poly-Si TFT structure. Poly-Si TFT fabricated by the proposed method exhibits considerably improved electrical characteristics, such as high field effect mobility exceeding 240 $cm^2$/Vsec.

• Proceedings of the KIEE Conference
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• 2001.11a
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• pp.106-108
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• 2001

본 실험에서는 플라즈마 화학기상증착(PECVD)으로 증착한 비경질 실리콘(amorphous silicon, a-Si) 박막에 국부적으로 Si+ 이온을 주입한 후 엑시머 레이저 어닐링(exicimer laser annealing, ELA)을 수행하여 그레인의 수평 성장(lateral growth)에 미치는 영향을 관찰한다. Si+ 이온 주입은 비정질 실리콘 박막의 원자 결합 에너지를 효과적으로 감소시키는 역할을 하여 박막이 녹기 시작하는 문턱(threshold) 에너지가 $105mJ/cm^2$에서 $85mJ/cm^2$ 까지 낮아지는 것을 확인하였다. 결과적으로 선택적인 Si 이온 주입을 통해 비정질 박막의 결정화 시 온도 구배에 의한 결정핵(nucleation) 형성의 차이를 유발시킴으로써 위치 제어가 가능한 1um 크기를 갖는 수평 성장 그레인을 얻었다.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1410-1412
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• 2002

TFT의 게이트 전극을 형성하기 전에 소오스/드레인 이온 주입과 ELA를 수행함으로써 이온 주입에 의해 발생하는 결정 결함을 줄이는 새로운 poly-Si TFT를 제안한다. 한번의 ELA 공정을 통해서 채널 실리콘 박막의 결정화와 소오스/드레인의 불순물 활성화를 동시에 이루어 접합부의 결함을 치유하였고, 이온 주입에 의해서 비정질화된 소오스/드레인 실리콘과 채널 비정질 실리콘의 용융조건 차이를 이용하여 소오스/드레인 접합부에 실리콘 그레인의 수평성장을 유도하였다. 제안된 소자는 기존의 소자(이동도 : 86 $cm^2/V{\cdot}S$, ON/OFF 전류비 $6.1{\times}10^6$)에 비해 우수한 특성(이동도 : 171 $cm^2/V{\cdot}S$, ON/OFF 전류비 $4.1{\times}10^7$)을 나타내었다. LDD나 off-set 구조 없이도 소오스/드레인 접합부의 결함이 완전히 제거되어 누설전류가 감소하였고 소오스/드레인 접합부 결함이 있던 자리에 1 ${\mu}m$ 이상의 수평성장 그레인이 위치함으로써 ON 전류도 증가하여 ON/OFF 전류비가 크게 개선되었다.

• The Journal of the Petrological Society of Korea
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• v.19 no.4
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• pp.283-292
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• 2010

The Suljeongri east three-story stone pagoda in Changnyeong (National Treasure No. 34) has been damaged mainly by lots of cracks. The stones used for this pagoda are medium-granied equigranular pinkish biotite granite. Measured magnetic susceptibility values are of from 2 to 9 (${\times}10^{-3}$ SI unit). From the ${\gamma}$-ray spectrometer mesurement K, eU, and eTh contents of the stones are 3 to 7%, 8 to 19 ppm, and 11 to 35 ppm, respectively. Comparing the petrographical and chemical characteristics between the stones of the pagoda and the country rocks near Suljeongri, it is suggested that the most similar rock could be equigranular biotite granite in the western slope of the Mt. Hwawangsan. Vertical, horizontal and diagonal cracks are intensely developed at the lower part of the stone pagoda. Biotite granite has intrinsic microcracks defined as rift and grain rock cleavages. Both rock cleavages are assumed to have led to the crack growth and consequent mechanical damage of the pagoda. It seems that vertical cracks have been grown parallel to the principal compressional stress, and that horizontal cracks to the reacting tensional stress. Diagonal cracks seems likely to have been resulted from conjugate rift and grain rock cleavages.

• Korean Journal of Heritage: History & Science
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• v.46 no.2
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• pp.136-149
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• 2013

We studied the characteristics and the growth mechanism of surface cracks from the Naksansa seven-storied stone pagoda(Treasure No. 499). The pagoda is composed of both medium-grained, porphyritic biotite granite and hornblende-biotite granite. Alkali feldspar megacrysts are easily found as phenocrysts in the rocks. Surface cracks intensely developed at the lower part of the stone pagoda, and their directions are of vertical, horizontal, and diagonal. The rocks of the pagoda have intrinsic microcracks which can be defined as rift and grain rock cleavages. Both rock cleavages seems likely to have led to the crack growth and consequently to the mechanical deterioration of the pagoda. The vertical cracks developed parallel to the vertical compressive stress, whereas horizontal ones formed by tensile strength normal to the vertical compression. In addition mineral cleavages and twin planes of alkali feldspar phenocrysts seems to have been closely related to the mechanical breakdown of the rocks in the NE part of the pagoda.