모든 3차 수차와 5차 구면수차를 제거하여 얻은 극자외선 리소그라피용 5-반사광학계 (Five Mirror System Derived From the Numerical Solutions of all Zero 3rd Order Aberrations and Zero 5th Order Spherical Aberration for DUV Optical Lithography)
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- 한국광학회지
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- 제4권4호
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- pp.373-380
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- 1993