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Studies on Curved Diffractive Optical Elements in EUV (극자외선 영역에서 곡면 DOEs에 관한 연구)

  • Choi, Sung-Eul;Lee, Yong-Woo;Kwon, Myung-Hoi;Kim, Yong-Hoo
    • Korean Journal of Optics and Photonics
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    • v.16 no.4
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    • pp.304-312
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    • 2005

  • Field performance of several different types of diffractive optical elements(DOEs) has been carried out. Using Zemax model, we have designed five different types of DOEs, such as transmissive flat-DOE, transmissive curved-DOE, reflective flat-DOE, reflective curved-DOE and parabolic mirror, We have applied two different wavelengths, i.e., 13 m(EUV) and 632.8 nm(visible) to above DOEs. Off_axis dominate aberrations and the diffraction limiting (Rayleigh limit) field angles have been investigated and compared at both wavelengths for each DOE. At diffraction limit, field angle of curved-DOEs was much greater than that of flat-DOEs for both transmission and reflective types. We also showed that dominated off_axis aberration of flat-DOEs was coma, but that of curved-DOEs was mixture of astigmatism and curvature of field. The measured field angle and expected OPD aberrations were well coincided with theoretical ones. Increasing the ratio of field angle with wavelength was more effective in curved-DOEs than flat-DOEs.

  • https://doi.org/10.3807/KJOP.2005.16.4.304 인용 PDF KSCI