Real-time plasma condition estimate model based on Optical Emission Spectroscopy (OES) datafor semiconductor processing (반도체공정을 위한 OES 데이터 기반 실시간 플라즈마 상태예측 모형)
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- Proceedings of the Korea Information Processing Society Conference
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- 2023.11a
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- pp.341-344
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- 2023