• Title/Summary/Keyword: 손상확산

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A study of electrical characteristic of MOSFET device (고에너지 이온주입에 따른 격자 결함 발생 및 거동에 관한 열처리 최적화방안에 관한 연구)

  • Song, Young-Doo;Kwack, Kae-Dal
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1830-1832
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    • 1999
  • 고에너지 이온주입(1)에 기인한 격자 손상 발생 및 열처리에 따라 이들의 회복이 어느정도 가능한지에 대하여 측정 및 분석방법을 통하여 조사하였다. 그리고 본 실험에서는 이온주입시 형성되는 빈자리 결함(Vacancy defect)과 격자간 결함(interstitial defect)의 재결할(recombination)을 이용 점결합(point defect)를 감소 시킬 수 있는 effective RTA조건을 설정하여 well 특성을 개선하고자 하였다. 8inch p-type Si(100)기판에 pad oxide 100A을 형성한 후 NMOS 형성하기 위해 vtn${\sim}$p-well과 PMOS 형성을 위해 vtp$\sim$n-well을 이온주입 하였다. Mev damage anneal은 RTA(2)(Rapid Thermal Anneal)로 $1000\sim1150C$ 온도에서 $15\sim60$초간 spilt 하여 실험후 suprem-4 simulation data를 이용하여 실제 SIMS측정 분석결과를 비교하였으며 이온주입에 의해 발생된 격자손상이 열처리후 damage 정도를 알아보기 위해 T.W(Therma-Wave)을 이용하였으며 열처리후 면저항값은 4-point probe를 사용하였다. 이온주입후 열처리 전,후에 따른 불순물 분포를 SIMS(Secondary ion Mass Spectrometry)를 이용하여 살펴보았다. SIMS 결과로는 열처리 온도 및 시간의 증가에 따라서 dopant확산 및 활성화는 큰차이는 보이지 않고 오히려 감소하는 경향을 볼 수 있으며 또한 접합깊이와 농도가 약간 낮아지는 것을 볼 수 있었다. 결점(defect)을 감소시키기 위해서 diffusivity가 빠른 임계온도영역($1150^{\circ}C$-60sec)에서 RTA를 실시하여 dopant확산을 억제하고 점결점(point defect)의 재결합(recombination)을 이용하여 전위 (dislocation)밀도를 감소시켜 이온주입 Damage 및 면저항을 감소 시켰다. 이와 같은 특성을 process simulation(3)(silvaco)을 통하여 비교검토 하였다.

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Measurement of the Anisotropy of Nerve Fibers in the Hippocampal Region according to the Drinking beginning Age using TBSS(Tract-Based Spatial Statics) (TBSS(Tract-Based Spatial Statics)를 이용한 음주 시작연령에 따른 해마 영역 부위의 신경섬유의 비등방도 측정)

  • Kwak, Jong Hyeok;Kim, Gyeong Rip
    • Journal of the Korean Society of Radiology
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    • v.14 no.6
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    • pp.781-790
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    • 2020
  • Tract-Based Spatial Statics (TBSS) after obtaining the image by examining a diffusion tensor image that can determine the presence or absence of damage to the cerebral white matter and gray matter for middle-aged men aged 30 to 50 with the starting age of drinking as a variable. As a result of measuring and analyzing the FA (fractional anisotropy) value of the brain gray matter region to the hippocampal region nerve fibers, the lower the alcohol start age in all regions, the lower the anisotropy measurement value, but the FA value was statistically significant. The study results indicated by the FA results measured in this study are that the earlier the drinking start age, the more severe the morphological changes in all neurological and anatomical brain regions in the hippocampal region of the brain gray matter and seriously affect the nerve fiber tissue. It can be said to harm and damage nerve fibers and affect functional morphological variations associated with alcohol.

A study on the lattice defects in $LiNbO_3$ single crystal by crystal by $OH^-$ absorption band ($OH^-$ 흡수밴드에 의한 $LiNbO_3$ 단결정의 격자결함에 관한 연구)

  • 조용석;강길영;윤종규
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.3
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    • pp.401-406
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    • 1998
  • For the applications in optical waveguides and devices, LiNbO_3$ single crystals need to overcome the weakness of optical damage due to the inhomogeneities of laser-induced refractive index. This problem can be solved by doping of Mg in LiNbO_3$ and proton exchange of LiNbO_3$. In this study, to understand the mechanism of optical damage resistance in LiNbO_3$, the changes of lattice defects in LiNbO_3$ caused by MgO doping and acid treatment were observed indirectly by $OH^-$ absorption bands using a FT-IR spectrophotometer. The effect of lattice defects on temperature, heat-treatment and polishing were also investigated. It is shown that MgO doping increases optical damage resistance by generating the defects of $Mg_{Nb}^{2+}$ in the lattice of LiNbO_3$, and that proton exchange by implantation of $H^+$ ion in the hexagonally closest packed oxygen layers on the surface of LiNbO_3$, makes lattice defects, which diffuse into the crystal after heat-treatment above $400^{\circ}C$.

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Effcets of Initial Oxygen Concentration on Oxygen Pileup and the Diffusion of Impurities after High-energy Ion Impaltation (초기 산소 농도가 고에너지 이온 주입시 발생하는 산소 축적 및 불순물 확산에 미치는 영향)

  • 고봉균;곽계달
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.36D no.4
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    • pp.48-56
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    • 1999
  • In this paper, we have investigated experimentally the effects of initial oxygen concentration on oxygen pileup phenomenon and the diffusion of implanted impurities. 1.2 MeV $^{11}B^{+}$ and 2.2 MeV $^{31}P^{+}$ ions were implanted into p-type (100) Si wafers with a dose of 1${\times}10^{15}$ / $\textrm{cm}^2$. Secondary ion mass spectrometry(SIMS) measurements were carried out to obtain depth distribution profiles for implanted impurities and oxygen atoms after two-step annealing of $700^{\circ}C$(20 hours)+$1000^{\circ}C$(10 hours). Residual secondary defect distribution and annealing behabiour were also studied by cross-sectional transmission electron microscopy(TEM) observations. Oxygen pileup nearly $R_p$(projected range) were observed by SIMS measurements and considerable amount of residual secondary defect layer were observed by TEM observations. It can be seen that oxygen atoms are trapped at the secondary defects by the experimental results. Enhanced diffusions of boron and phosphorus to the bulk direction were observed with the increasing of initial oxygen concentration.

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Process Hazard Review and Consequence Effect Analysis for the Release of Chlorine Gas from Its Storage Tank (염소저장탱크에서의 가스 누출시 공정위험검토 및 결과영향분석)

  • Ko, Jae-Sun;Kim, Hyo
    • Fire Science and Engineering
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    • v.17 no.3
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    • pp.61-73
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    • 2003
  • Most of the accidents occurred from the chemical plants are related to the catastrophic gas release events when the large amount of toxic materials is leaked from its storage tank or transmitting pipe lines. In this case, the greatest concerns are how the spreading behaviors of leakages are depended on the ambient conditions such as air stability and other environmental factors. Hence, we have focused on the risk assessments and consequential analysis for chlorine as an illustrative example. As appeared in the result, Fire & Explosion Index depicted it a bit dangerous with presenting the comprehensive degrees of hazard 90.7. And as a result of Phast6.0/ALOHA, the trends of each scenario appeared considerably identical although there are some differences in the resulting effects according to the input data for the Gas Model. The consequence analysis is performed numerically based on the dense gas mode. In the future, using more correct input data, material properties, and topographical configuration, the method of this research will be useful for the guideline of the risk assessment when the release of toxicants breaks out.

A Study on the Relation of Rebar Corrosion Rate and the Strength Reliability Index of RC Slab Decks having Chloride Contamination (염해 손상을 받는 RC 교량 바닥판의 강도 신뢰성 지수와 철근 부식도 등급과의 관계 연구)

  • Cha, Chul-Jun;Park, Mi-Yun;Cho, Hyo-Nam
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.9 no.2
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    • pp.121-128
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    • 2005
  • This study focuses on evaluating the reliability index of a deck of RC slab having chloride contamination and studying the relation of grades of rebar corrosion and the reliability index of a bridge deck For this purpose, first, the failure probability related to flexural strength was calculated using a model for deterioration, which contains the application of deicing salts that usually causes significant long-term deterioration and reduction in the structural safety for strength of structure. And also, according to the depth of covering, the chloride contents depending on time due to depths of RC slab deck, the appearance time for initial corrosion of rebar and the occurrence time for split of covering were investigated using a MCS method.

Design Consideration about Large Caliber Piping of Polyethylene Material (폴리에틸렌 소재의 대구경 배관 설계 고찰)

  • Kim, Eung-Soo;Yoon, Myong-O
    • Fire Science and Engineering
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    • v.27 no.6
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    • pp.44-49
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    • 2013
  • As the polyethylene of high strength and ductility stabilized chemically has been mass-produced, it is spreading widely as material of industrial piping and water service piping. Recently, High density polyethylene (HDPE) pipe has been used even in water supply system of plant as buried pipe instead of cast iron pipe in domestic, but HDPE pipe has a probability of occurrence of damage if plant design and operating conditions are not considered. As a result of reviewing with respect of system design engineering based on operating conditions and verification test results, the specific design criteria for the use of HDPE piping in fire water supply system need to be established because of the possibility of crack damage due to water hammer.

Study on the Consequence Effect Analysis & Process Hazard Review at Gas Release from Hydrogen Fluoride Storage Tank (최근 불산 저장탱크에서의 가스 누출시 공정위험 및 결과영향 분석)

  • Ko, JaeSun
    • Journal of the Society of Disaster Information
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    • v.9 no.4
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    • pp.449-461
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    • 2013
  • As the hydrofluoric acid leak in Gumi-si, Gyeongsangbuk-do or hydrochloric acid leak in Ulsan, Gyeongsangnam-do demonstrated, chemical related accidents are mostly caused by large amounts of volatile toxic substances leaking due to the damages of storage tank or pipe lines of transporter. Safety assessment is the most important concern because such toxic material accidents cause human and material damages to the environment and atmosphere of the surrounding area. Therefore, in this study, a hydrofluoric acid leaked from a storage tank was selected as the study example to simulate the leaked substance diffusing into the atmosphere and result analysis was performed through the numerical Analysis and diffusion simulation of ALOHA(Areal Location of Hazardous Atmospheres). the results of a qualitative evaluation of HAZOP (Hazard Operability)was looked at to find that the flange leak, operation delay due to leakage of the valve and the hose, and toxic gas leak were danger factors. Possibility of fire from temperature, pressure and corrosion, nitrogen supply overpressure and toxic leak from internal corrosion of tank or pipe joints were also found to be high. ALOHA resulting effects were a little different depending on the input data of Dense Gas Model, however, the wind direction and speed, rather than atmospheric stability, played bigger role. Higher wind speed affected the diffusion of contaminant. In term of the diffusion concentration, both liquid and gas leaks resulted in almost the same $LC_{50}$ and ALOHA AEGL-3(Acute Exposure Guidline Level) values. Each scenarios showed almost identical results in ALOHA model. Therefore, a buffer distance of toxic gas can be determined by comparing the numerical analysis and the diffusion concentration to the IDLH(Immediately Dangerous to Life and Health). Such study will help perform the risk assessment of toxic leak more efficiently and be utilized in establishing community emergency response system properly.

Compressing Method of NetCDF Files Based on Sparse Matrix (희소행렬 기반 NetCDF 파일의 압축 방법)

  • Choi, Gyuyeun;Heo, Daeyoung;Hwang, Suntae
    • KIISE Transactions on Computing Practices
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    • v.20 no.11
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    • pp.610-614
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    • 2014
  • Like many types of scientific data, results from simulations of volcanic ash diffusion are of a clustered sparse matrix in the netCDF format. Since these data sets are large in size, they generate high storage and transmission costs. In this paper, we suggest a new method that reduces the size of the data of volcanic ash diffusion simulations by converting the multi-dimensional index to a single dimension and keeping only the starting point and length of the consecutive zeros. This method presents performance that is almost as good as that of ZIP format compression, but does not destroy the netCDF structure. The suggested method is expected to allow for storage space to be efficiently used by reducing both the data size and the network transmission time.

Electrical Properties of Silicon Implants in Cr-Doped GaAs (실리콘을 주입한 크롬이 도핑된 GaAs의 전기적 성질에 관한 연구)

  • 김용윤
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.20 no.5
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    • pp.50-55
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    • 1983
  • A comprehensive study of the electrical properties of low-dose Si implants in Cr-doped GaAs substrates has been made using the Hall-effect/sheet-resistivity measurement technique for various ion doses and annealing temperatures. The samples were implanted at room temperature and annealed with silicon nitride encapsulants in a hydrogen atmosphere for 15 minutes. H-type layers were produced at all dose levels investigated, and the optimum annealing temperature was 850$^{\circ}C$ for all doses. The highest electrical activation efficiency was 89% for Cr-doped GaAs substrates. Depth profiles of carrier concentrations and mo-bilities are highly dependent upon ion dose and annealing temperature. Significant im-plantation damage still remains after an 800$^{\circ}C$ anneal, and a 900$^{\circ}C$ anneal produces signi-ficant outdiffusion as well as indiffusion of the implanted Si ions.

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