• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.10a
• /
• pp.604-608
• /
• 2004

In this paper, an efficient method is proposed to analyze the radial error of a miniaturized-high speed spindle system. Initially, a device is constructed for measuring the radial error motion using capacitance sensors. The capacitance sensors are placed perpendicular to the axis of the shaft and at 90o to each other. The spindle is rotated at high speed and the profile of the spindle is recorded. An algorithm is developed for analyzing the spindle data and determining the radial error of spindle. The present algorithm uses homogeneous transform matrix (HTM) method and iterative process for determining the radial error. The analysis procedure is performed for different speeds of the spindle. The data obtained from the present system and the results of evaluation are also presented in this paper. It is observed that this method is effective in determining and analyzing the spindle errors for high speed miniaturized spindle.

• 전기의세계
• /
• v.45 no.1
• /
• pp.28-32
• /
• 1996

드라이브 기술의 최신동향 및 향후 전망에 대해 앞으로 전개될 항목을 간략히 요약하면 다음과 같다. 1. 모듈화 및 소형화 2. 직류 전압원의 고전압화 3. 드라이브와 NC간의 간편한 연결 4. NC의 조작화면을 통한 손쉬운 파라미터 조정 5. 디지탈 폐루프 제어 채용(FULL 디지탈화) 6. 에너지 절감형 모델 개발 7. 사용자 편의 기능의 확대 서보/스핀들 드라이브 설계기술의 최신동향 및 향후 개발 전망에 대해서 특징, 기능을 중심으로 이상과 같이 간략하게 설명하였다. 본고가 드라이브 기술 개발에 힘쓰는 관련 engineer들에게 조금이나마 참고가 되길 기대한다.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2008.11a
• /
• pp.461-462
• /
• 2008

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.12 no.12
• /
• pp.5412-5419
• /
• 2011

The need is growing for high-speed spindle because various equipment are becoming more precise, miniaturization and high speed with the development of industries. Air-lubricated dynamic bearings are widely used in the optical lithographic manufacturing of wafers to realize nearly zero friction for the motion of the stage. Air-lubricated dynamic bearing can be used in high-speed, high-precision spindle system and hard disk drive(HDD) because of its advantages such as low frictional loss, low heat generation, averaging effect leading better running accuracy. In the paper, numerical analysis is undertaken to calculate the performance of air-lubricated dynamic bearing with herringbone groove. The static performances of herringbone groove bearings which can be used to support the thrust load are calculated. Electrochemical micro machining($EC{\mu}M$) which is non-contact ultra precision machining method has been developed to fabricate the air-lubricated dynamic bearing and optimum parameters which are inter electrode gap size, concentration of electrolyte, machining time are simulated using numerical analysis program.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2008.11a
• /
• pp.184-185
• /
• 2008

Modal analysis is an important and essential process in design of a high speed machining center. Generally, modal analysis of a built-in spindle system has not taken the work piece's shape and dimension into consideration. Since small and long work pieces influence greatly the natural frequency of the entire system, the high speed spindle system which continuously makes small machine parts by long work pieces for improvement of machining time has to consider the machining work pieces. Therefore frequency characteristics of the spindle system with long work pieces are studied in this paper.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2008.11a
• /
• pp.182-183
• /
• 2008

In this study, rotor dynamic analysis have been conducted using three-dimensional solid model. Analysis object has smaller size and higher speed than any general CNC spindle. It is important to consider the real supporting conditions and external forces for whirl behavior analysis. As a results, the bearing stiffness is higher, whirl motion is less than before.

• 대한공업교육학회지
• /
• v.31 no.2
• /
• pp.350-363
• /
• 2006

Recently, the micro end-milling processing is demanded the high-precise technique with good surface roughness and rapid time in milli-structure parts, micro machine parts and molding industry. The cutting conditions of micro end-milling has an effect on surface roughness of cutting surface. Therefore this study was carried out to cut stainless steel using high revolution air bearing spindle and micro end-mill and analyze the cutting condition to get the optimum surface roughness by design of experiment. From this study, surface roughness have an much effect according to priority on depth of cut, revolution of spindle and feed.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.19 no.3
• /
• pp.334-339
• /
• 2010

The development of high-speed spindle have been studied extensively for micro machining in advanced industrial countries. The research of miniaturized high-speed air spindle is important part which needs for the micro machining process of high quality. So, This study was to carry out results about design characteristics of miniaturized high-speed air spindle. We had designed 4type turbines and shaft. They were simulated in use the computer simulation programs. We made them as products. They measured RPM (revolutions per minute). As a result of experiments, there was a contrast among 4type Turbines. it reached 384,000rpm in 4.5bar of air pressure. And, We tried to compare the results of measurement whit the results of computer simulation.

• Journal of the Korean Society for Precision Engineering
• /
• v.26 no.11
• /
• pp.99-107
• /
• 2009

Since a long work piece influences the natural frequency of the entire system with a miniature high speed spindle, a bar-feeder is used for a long work piece to improve the vibration characteristics of a spindle system. Therefore, it is very important to design optimally support positions between a bar-feeder and a long work piece for a miniature high speed spindle system. The goal of the current paper is to present an optimization method for the design of support positions between a bar-feeder and a long work piece. This optimization method is effectively composed of the method of design of experiment (DOE), the artificial neural network (ANN) and the genetic algorithm (GA). First, finite element models which include a high speed spindle, a long work piece and the support conditions of a bar-feeder were generated from the orthogonal array of the DOE method, and then the results of natural vibration analysis using FEM were provided for the learning inputs of the neural network. Finally, the design of bar-feeder support positions was optimized by the genetic algorithm method using the neural network approximations.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2010.05a
• /
• pp.58.2-58.2
• /
• 2010

FPD (Flat Panel Display) 제조 공정에서 사용되는 패턴은 수 ${\mu}m$ 수준까지 감소하였으며, FPD의 크기는 급격하게 대형화 되여 현재 8세대(2200mm*2500mm)에 이르고 있다. 이에 따라, $1\;{\mu}m$ 이상의 크기를 갖는 오염입자에 의한 수율 저하를 극복하기 위한 세정효율의 향상 및 다량의 초순수 사용에 따른 폐수 발생으로 인한 환경오염, 또한 장비의 크기에 따른 공간 효용성 감소와 이에 따른 공정 비용의 증가 등의 어려움에 직면하고 있다. 따라서, 현장에서는 고효율, 저비용의 세정 공정 기술 개발에 대한 연구가 활발히 진행되고 있다. 이러한 문제점들을 해결 하고자 이류체 노즐 세정 장치와, 화학액 린스를 위한 초순수 Spray, 건조 공정에 해당하는 Air-knife, Halogen lamp로 구성된 소형화 된 고속 FPD(Flat Panel Display) 세정기에 대한 연구를 진행 하였다. 이류체 노즐은 초순수와 $N_2$ 가스를 내부에서 혼합하여 액적(Droplet)을 형성하여 고압으로 분사시키는 장치로서 화학액을 사용하지 않고 물리적인 방법으로 오염입자를 제거한다. Spray는 유기 오염입자 제거를 위한 오존수의 린스 공정을 위해 설치 하였다. 세정 후 표면에 남아있는 기판의 액막(water film)은 고압의 가스를 분사하는 Air-knife를 통해 제거하였으며, 고속 공정시 발생할 수 있는 Air-knife에서 제거하지 못한 잔류 액막을 Halogen lamp를 사용하여 효과적으로 제거함으로써, 물반점(water mark) 없는 건조 공정을 얻을 수 있었다. 실험에는 미세 입자의 정량적인 측정을 위하여 유리 기판 대신에 6인치 실리콘 웨이퍼(P-type (100))를 사용하였으며, > $\;1{\mu}m$ 실리카 입자를 스핀방식을 사용하여 정량적으로 균일하게 오염하였으며, 오염물의 개수 및 분포는 파티클 스캐너 (Surfscan 6200, KLA-Tancor, USA)를 사용하여 분포 및 개수를 정량적으로 측정 하였다. 이류체 노즐은 $N_2$ 가스의 압력과 초순수의 압력을 변화시켜 측정하여, 각각 0.20 MPa, 0.01 MPa에서 최적의 세정 결과를 얻을 수 있었으며, 건조 효율은 Air-Knife의 입사 각도와 건조면 간격, 할로겐 램프의 온도를 조절 하여 최적의 조건을 얻을 수 있었다.