• Electrical & Electronic Materials
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• v.10 no.6
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• pp.555-561
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• 1997

The passivation of n-GaAs(100) surface has investigated by photoreflectance(PR). The surface of the sample was treated with the 0.001 N solution Se/NH$_4$OH. After the surface treatment, the samples were annealed between 400 to $700^{\circ}C$ in a $N_2$atmosphere for 10 min. The intensity of PR signal and period of Franz-Deldysh oscillation(FKO) gradually decreased as the annealing temperature increased. The surface electric field(E$_{s}$) of the sample annealed at $600^{\circ}C$ is obtained 1.34$\times$10$^{5}$ V/cm. This value is 1.97 times less than that of unannealed sample. It has found that the passivation of surface occurred when the surface of the sample had been treated with Se/NH$_4$OH solution and annealed from 500 to $600^{\circ}C$. This result could be due to activation of elemental Se on the surface. It has also found that the elemental Se of the surface diffused about 100 $\AA$ into the bulk GaAs when Se-treated sample was annealed at $600^{\circ}C$.>.