• Title/Summary/Keyword: 센서제작

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A Study on Direct Georeferencing by Combined Multi-sensor (다중센서 결합에 의한 외부표정요소 직접결정기법에 관한 연구)

  • Song, Youn-Kyung
    • Journal of the Korean Association of Geographic Information Studies
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    • v.8 no.1
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    • pp.88-95
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    • 2005
  • Direct Georeferencing by combined multi-sensor based on the direct measurement of the projection centers and rotation angle of sensor through loading the GPS and INS in aircraft. The method of combined multi-sensor can offer us to acquire the exterior orientation parameters with only minimum GCPs, even the ground control process could be completely skipped. Consequently, It is possible extreme to reduce the time and expense for the mapping process. In this study, a CCD camera is simultaneously used in combined multi-sensor surveying, and acquired CCD image through Direct Georeferencing produce digital orthoimage. In this process, methods of combining sensor and digital orthoimage are examined and estimated. For the comparison of the positioning accuracy digital orthoimage through Direct Georeferencing, GCPs determined by GPS surveying are used. Two digital orthoimage are produced; one with a few GCP and the other without them. The accuracy of orthoimages produced through combined multi-sensor with GCPs meets that of 1:1,000 maps. Without GCPs, it meets that of 1:5,000 maps.

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Fabrication of low power micro-heater based on electrochemically prepared anodic porous alumnia (다공성 알루미늄 산화물을 이용한 저전력 마이크로 히터의 제조)

  • Park, Seung-Ho;Byeon, Seong-Hyeon;Lee, Dong-Eun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2016.11a
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    • pp.116.1-116.1
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    • 2016
  • 반도체 가스센서에서는 가연성 및 탄화수소계 가스를 감지 하기 위해서 $100{\sim}500^{\circ}C$ 이상의 동작온도를 필요로 한며, 이에 따라 반도체식 가스센서의 마이크로 히터 소재는 고온에서 열적 안정성이 있는 소재가 요구된다. 현재 상용화되고 있는 반도체식 가스센서는 실리콘(Silicon) 기반의 MEMS 기술을 이용한 가스센서이며, 구조적으로나 성능적 한계가 드러남에 따라 실리콘 이외의 다양한 재료의 MEMS 응용기술 개발이 필요한 실정이다. 본 연구에서는 이러한 실리콘의 재료적 한계를 극복하기 위해 다공성 알루미늄 산화물(AAO)을 기판으로 사용하여 마이크로 히터를 제작하였다. AAO의 제작에 앞서 CMP, 화학연마, 전해연마를 이용하여 적합한 전처리 공정을 선정하였고, AAO 제작 시 온도, 시간, 전압의 변수를 주어 마이크로 히터 기판에 적합한 공정을 탐색하였다. 마이크로 플랫폼은 MEMS 공정으로 제작되었으며, PR(Photo Resist)을 LPR(Liquid Photo Resist)과 DFR(Dry Film Resist)로 각각 2종 씩 선택하여 AAO에 적합한 제품을 선정하였다. 제작된 마이크로 히터는 $1.8mm{\times}1,8mm$로 소형화 하였고, 열손실의 제어를 위해 열확산 방지층을 추가하였다. 구동 온도, 소비전력, 장시간 구동시 안정성의 측정 및 평가는 적외선 열화상 카메라와 kiethly 2420 source meter를 이용하여 측정하였으며, 열확산 방지층의 유 무에 따른 온도 분포 및 소비전력을 비교평가 하였다. 최종적으로는 현재 사용화 되어있는 가스센서들의 소비전력과 비교 평가 하여 논의 하였다.

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Design and Implementation of the Small Size Microwave Sensor Receiver for Human Body Detection (인체 감지용 소형 마이크로파 센서 수신기의 설계 및 제작)

  • Son, Hong-Min;Choi, Hyun-Ho
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.27 no.4
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    • pp.403-406
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    • 2016
  • This paper presents the design and implementation of the small size receiver to put a passive microwave sensor for human body detection to practical use. The requirements and specifications of the sensor receiver are drawn using the experimental data of human body detection by the existing sensor operated at 5.1 GHz. The small size sensor receiver to satisfy the drawn specifications is designed and implemented. The effectiveness of the fabricated sensor with small size receiver on human body detection is demonstrated experimentally in laboratory. The results show the sensor can detect human body to within 4 m distance from the antenna. The size and power consumption of the small size receiver are decreased to 60 % and 40 % compared to those of the existing receiver, respectively.

Fabrication of pyroelectric IR sensors with PLT thin plates compensating for piezoelectric effect (PLT 박편을 이용한 압전특성이 보상된 초전형 적외선 센서의 제작)

  • Kim, Young-Eil;Roh, Yong-Rae;Choi, Sie-Young
    • Journal of Sensor Science and Technology
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    • v.6 no.1
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    • pp.1-5
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    • 1997
  • Highly sensitive pyroelectric IR sensors were fabricated with La-modified $PbTiO_{3}(PLT)$ thin plates compensating for piezoelectric effect. The device was fabricated in a dual form by placing two PLT cells, each of $1{\times}2\;mm^{2}$, side by side with appropriate electrode configuration. The dual element sensor had a signal to noise ratio of about 350 that was much larger than that of single element sensors. Further the dual element sensors exhibited excellent pyroelectric properties such as a large voltage responsivity of 2400 V/W, a pyro-coefficient of $4.6{\times}10^{-8}\;C/cm^{2}K$, a voltage figure of merit of $4.2{\times}10^{-11}\;Ccm/J$, and a small thermal time constant of 8.7 msec. It was confirmed through experiments that the dual element sensor was applicable to detect the two-dimensional moving direction of human beings.

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Trench 형성 및 High-k 물질의 적층을 통한 고출력 특성 EIS pH센서 제작

  • Bae, Tae-Eon;Jang, Hyeon-Jun;Jeong, Hong-Bae;Lee, Yeong-Hui;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.238-238
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    • 2011
  • Ion sensitive field effect transistor (ISFET)는 용액의 이온 농도를 측정하는 반도체 센서로, 1970년 Bergveld에 의해 처음으로 제안되었다. ISFET가 제안된 이래로, 제조공정이 간단하고 감지막의 감지 특성 평가가 용이한 electrolyte-insulator-semiconductor (EIS) pH센서 또한 지속적으로 연구되었다. EIS pH센서는 작은 소자 크기, 견고한 구조, 빠른 응답속도와 CMOS공정과의 호환성이 좋다는 장점이 있다. EIS 또는 ISFET 센서를 이용하여 생물학적 요소의 신호 감지 특성을 평가함에 있어 소자의 signal to noise 비율이 우수해야 한다. EIS pH센서의 높은 signal to noise 비율을 얻기 위해, 소자의 표면적을 증가시키거나 감지막으로 유전상수가 높은 물질을 사용하여 출력 특성을 향상시켜야 한다. 본 연구에서는 trench구조와 SiO2/HfO2/Al2O3 (OHA) 적층 감지막을 갖는 EIS pH센서를 제작하여 출력 특성을 증가시키는 실험을 실시하였다. 120 nm, 380 nm, 780 nm의 다양한 깊이를 가진 trench를 형성하였으며, trench 깊이에 따른 출력특성을 비교하였다. 또한, 제작된 EIS 소자의 pH감지 특성을 분석하였다. 제작된 EIS소자의 감지막 중 SiO2는 Si와 high-k물질의 계면 상태를 보완하기 위한 완충막으로 성장되었고, HfO2는 높은 유전상수를 가지고 있어 signal to noise 비율을 향상시키는 물질로 증착되었다. 최종적으로 Al2O3는 pH용액과의 화학적 손상을 막기 위한 물질로 증착되었다. 실험 결과, trench 깊이가 깊어질수록 출력값이 증가하였고 이는 signal to noise 비율이 향상되는 것을 의미한다. 결론적으로 trench 형성을 통한 표면적 증가와 high-k물질을 적층한 감지막으로 인해 높은 출력 특성을 갖는 우수한 EIS 바이오센서를 제작할 수 있었다.

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Pattern recognition and characteristics of basic taste substances using the evanescent wave in multichannel optical fiber sensor (소산파를 이용한 다채널 광섬유형 미각센서의 제작 및 기본 맛에 대한 패턴분석)

  • Lee, Su-Mi;Kang, Shin-Won
    • Journal of Sensor Science and Technology
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    • v.9 no.5
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    • pp.365-372
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    • 2000
  • In this study, a multichannel taste sensor using the evanescent field absorption in fiber optic was developed, and evaluated its characteristics for several basic taste substances. This sensor is based on the change of evanescent field absorption at the surface of optical fiber core layer. The sensor device was made of a plastic-clad-silica fiber (3M Co., FP-400-UHT, core diameter $400\;{\mu}m$) and a middle portion of cladding layer was removed and the surface of stripped fiber core was dip-coated with a sensing membrane. And then, it was determined the difference of evanescent field absorption into the sensing membrane, according to various taste substances and its concentrations variance. The sensing membranes were prepared with six kinds of dyes, were known as potential sensitive dye together with silicone polymer the same refractive index of cladding. Each output patterns were obtained from the sensor devices could be distinguished not only five kinds of basic taste substances such as sweetness, saltiness, sourness, bitterness and umami, but also various mixed taste substances.

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Implementation of weight sensor with polarization maintaining photonic crystal fiber (편광유지 광결정 광섬유를 이용한 무게센서)

  • Kim, Eung-Soo
    • The Journal of the Korea institute of electronic communication sciences
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    • v.10 no.1
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    • pp.133-138
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    • 2015
  • A weight sensor with a polarization maintaining photonic crystal fiber (PCF) is proposed and investigated by experimentally. The sensor system consists of a 3 dB fiber coupler, a half-wave plate, and light source. Wavelength shift induced by weight acting on the polarization maintaining PCF was measured. Two types of sensor patterns, circle type and straight type, were implemented and evaluated. The sensitivity of straight line type was 680 pm/kg and the circle type was 270 pm/kg, respectively. The both types of sensors have a good sensitivity and good linearity in the wide range.

Measurement of Transverse Strain Using Polarization Maintaining Fiber Bragg Grating Sensor (편광 유지 광섬유 브래그 격자 센서를 이용한 횡방향 변형률 측정)

  • Yoon, Hyuk-Jin;Kim, Dae-Hyun;Hong, Chang-Sun;Kim, Chun-Gon
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.31 no.6
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    • pp.30-35
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    • 2003
  • In this paper, the transverse strain was measured using polarization maintaining fiber Bragg grating(PMFBG) sensor. PMFBG sensor was fabricated using phase mask and Excidmer laser. The reflected wavelength of PMFBG sensor had dual peaks due to intrinsic birefringence. To find the polarization axes, peak sensitivity was measured under compression test. The signal characteristics of PMFBG sensor were also examined in embedding condition. The embedded PMFBG sensor in epoxy block was loaded for the transverse strain measurement, The wavelength-swept fiber laser(WSFL) was used to construct the PMFBG sensor system. Experiments showed that the PMFBG sensor could successfully measure the transverse strain.

세라믹 재료를 이용한 MEMS 센서

  • 양상식
    • Ceramist
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    • v.7 no.3
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    • pp.21-27
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    • 2004
  • MEMS(Micro Electro Mechanical Systems)는 초소형 구조물의 제작 기술인 마이크로머시닝 기술을 이용하여 제작되는 초소형 전자기계 시스템을 말한다. 최근 10여 년간 MEMS 기술이 상당히 진척되었고 다양한 마이크로머시닝 기술이 개발되었다. 이에 따라 이를 이용하여 다양한 MEMS 소자의 개발이 이루어지고 있다. 그 중에서도 MEMS 센서는 비교적 간단한 제작 공정과 작은 크기, 그리고 저비용으로 인하여 상품화가 쉽게 이루어지고 있다. (중략)

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Detection of Levitated Ring using Photo Sensor and Construct of an Education System (광센서를 이용한 점핑링의 위치검출과 교육용 시스템 제작)

  • Park, Seong-Wook
    • Journal of Sensor Science and Technology
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    • v.11 no.6
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    • pp.365-370
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    • 2002
  • The jumping ring apparatus described in this study is used to demonstrate and educate the effects of electromagnetic induction. Placing an aluminum ring over the core and switching on AC source causes the ring to jump in the air due to induced currents in the ring producing a magnetic field opposed to that produced in the core. This force is a function of flux density, ac current of ring and levitated height of the ring. Using photo sensor arrays, detect the ring position and represent the position of the ring to analog voltage for an education performance. This paper presents modelling of the jumping ring system and shows how does control signal generate in order to follow desired position.