• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.134-134
• /
• 2012

최근 반도체 및 디스플레이 산업에서 진공, 특히 플라즈마 공정은 중요한 기술로 알려져 있다. 반도체 제조공정은 플라즈마를 이용하여 증착(deposition)공정 및 패터닝을 위한 식각(Dry Etch)공정으로 크게 나뉘고, 디스플레이 공정에서는 Glass위에 형성된 금속오염입자 및 polymer와 같은 불순물을 제거하는 공정으로 식각(Dry Etch)공정을 주로 사용하고 있다. 진공공정장비인 CVD, Etcher는 플라즈마와 활성기체, 고온의 공정온도에 노출 되면서 진공공정장비 부품에 부식이 진행되기 때문에 내플라즈마성이 강한 재료를 코팅하여 사용하고 있다. 하지만 장시간 부식환경에 노출이 되면, 코팅부품에서도 부식이 진행되면서 다량의 오염입자가 발생하여 생산수율 저하에 원인이 되기도 하고, 부품 교체비용이 많이 들기 때문에 산업체에서 많은 어려움을 겪고 있다. 본 연구에서는 산업체에서 코팅부품으로 많이 사용되고 있는 다양한(Al2O3, Y2O3 등) 산화막 및 세라믹코팅 부품의 내플라즈마 특성을 비교 연구하였다.

• Proceedings of the KAIS Fall Conference
• /
• 2000.10a
• /
• pp.27-29
• /
• 2000

다공성 세라믹 기질에 제올라이트의 코팅은 기체 분리용 membrane으로 매우 효과적이다. 수열합성법으로 NaX 제올라이트를 다공성 cordierite와 cordierite, mullite 복합기질의 표면에 코팅하는 과정에서 H₂O/Al₂O₃ 몰비를 500, 1000으로 증가시키면서 코팅 특성의 변화와 코팅 속도를 측정한 결과 몰비가 감소할수록 코팅층에 NaA 제올라이트의 존재비가 증가하였으며, 코팅층의 형성 속도는 증가하였다. H₂O/Al₂O₃ 1000 몰에서는 반응 9일에 매우 치밀하고 균일한 NaX 제올라이트 코팅층을 얻을 수 있었으며, H₂O/Al₂O₃ 1000 몰에서는 반응3일에서 1000 몰의 9일과 같은 결과를 얻을 수 있었다.

• Proceedings of the Membrane Society of Korea Conference
• /
• 1993.04a
• /
• pp.35-35
• /
• 1993

튜브형 $\alpha-Al_2O_3$ 담체에 졸-겔 침지코팅법과 가압코팅(pressurized coating) 법으로 boehmite 졸과 극미세 입자 SiO$_2$ 및 TiO$_2$ 졸을 코팅한 후 200$\circ$C~500$\circ$C 에서 열처리하여 복합분리막을 제조하였다.

• Journal of the Korean Ceramic Society
• /
• v.35 no.1
• /
• pp.48-54
• /
• 1998

The effect of coating thickness on the contact fracture was studied, in Si3N4 coated Si3N4-BN system When the elastic/plastic mismatch is relatively large betwen two layers in bilayer certain critical coating thickness was required to prevent cone crack initiation and this critical thickness was decreased by de-creasing the elastic/plastic mismatch,. In addition the required critical thickness should be increased when higher loads apply. In conclusion an appropriate coating thickness should be designed by elastic/plastic mismatch between two layers and environment (applied load) to prevent the coating fracture

• Journal of the Korean Ceramic Society
• /
• v.42 no.2 s.273
• /
• pp.117-122
• /
• 2005

Electron Beam Physical Vapor Deposition (EB-PVD) is a typical technology for thermal barrier coating with Yttria Stabilized Zirconia (YSZ) on aero gas turbine engine. In this study EB-PVD method was used to fabricate dense YSZ film on NiO-YSZ as a electrolyte of Solid Oxide Fuel Cell (SOFC). Dense YSZ films of -10 $\mu$m thickness showed nano surface structure depending on deposition temperature. Electrical conductivities of YSZ film and electric power density of the single cell were evaluated after screen- printing $LaSrCoO_3$ as a cathode.

• Journal of Ocean Engineering and Technology
• /
• v.15 no.3
• /
• pp.69-74
• /
• 2001

This paper was to investigate of a adhesiveness for the plasma sprayed coating materials did salt spray by acoustic emission method in tensile loadings. The powders used for the coating were nickel aluminum composite powder Ni-4.5wt.%Al and titanium dioxide powder $TiO_2$. These powders were coated on a carbon steel S45C by plasma spray method. The result solution was a 5% NaCl and the slat spray times were 2, 5 and 10 hours respectively. The salt solution penetrated into the surface of the substrate through pore of the coating layer built in the process of plasma spay. Corrosion productions formed on the surface of substrate. The adhesiveness between the substrate and the coating layer is weaken by corrosion and the exfoliation initiated chiefly at the corrosion surface of the substrate. The AE events and energy of the corroded coating specimens decreased as the salt spray times increased.

• Proceedings of the Membrane Society of Korea Conference
• /
• 1994.04a
• /
• pp.58-58
• /
• 1994

슬립캐스팅법으로 제조한 튜브형 $\alpha$-알루미나 담체 (평균기공크기 = $0.1 \mum$)에 졸-겔 침지코팅(dipcoating) 또는 가압코팅 (pressurized coating) 법에 의하여 극미세입자 $\gamma$-AlOOH, $TiO_2, SiO_2$, 및 aluminosilicate diphasic 졸을 코팅한 후 300 ~ 500$\circ$C 에서 열처리하여 세라믹 복합막을 제조하였다. 복합막 전체에 대한 균열유무는 $N_2$ 기체투과율의 평균압력에 대한 의존성으로부터 평가하였으며, 한외여과 (ultrafiltration)에의 응용성을 규명하기 위하여 막의 재질 및 제조조건에 따른 polyethylene glycol (PEG) 수용액의 분획분자량 변화를 측정하였다. 합성 세라믹 복합막의 분획분자량 측정 결과 $SiO_2$의 경우 2,000 정도로 매우 우수하였으며 $\gamma-Al_2O_3, TiO_2$, 그리고 aluminosilcate 막들은 6,000 ~ 10,000 범위 값을 갖고 있었다. 또한 막의 기공크기 및 분획분자량을 제어하기 위한 방법으로서 $TiO_2$ 복합막을 300 ~ 700$\circ$C 에서 열처리하였으며 이들에 대한 분획분자량 변화를 비교 분석하였다.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
• /
• 2001.05a
• /
• pp.344-349
• /
• 2001

This paper was to investigate of a adhesiveness for the plasma sprayed coating materials did salt spray by acoustic emission method in tensile loadings. The powders used for the coating were nickel aluminum composite powder Ni-4,5wt.%Al and titanium dioxide powder Ti02. These powders were coated on a carbon steel S45C by plasma spray method. The salt solution was a 5% NaCl and the salt spray times were 2, 5 and 10 hours respectively. The salt solution penetrated into the surface of the substrate through pore of the coating layer built in the process of plasma spay. Corrosion productions formed on the surface of substrate. The adhesiveness between the substrate and the coating layer is weaken by corrosion and the exfoliation initiated chiefly at the corrosion surface of the substrate. The AE events and energy of the corroded coating specimens decreased as the salt spray times increased.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.32 no.3
• /
• pp.89-95
• /
• 2022

In this study, glassy carbon coating was performed on the graphite using a phenolic resin and a curing agent was mixed with ethylene glycol as an additive to form the uniform surface. The phenolic resin was dried and cured under the environments of hot air, then converted into a glassy carbon layer by pyrolysis at 500~1,500℃. FTIR, XRD, SEM analysis, and density/porosity/contact angle measurement were performed for characterization of glassy carbon. The pyrolysis temperature for high-quality glassy carbon was optimized to be about 1,000℃. As the content of the additive increased, the effect of reducing surface defects on the coated surface, reduction of porosity, increase of contact angle, and increase of density were investigated in this study. The method of forming a glassy carbon coating layer through an additive is expected to be applicable to graphite coating and other fields.

• Proceedings of the Korean Ceranic Society Conference
• /
• 2004.04b
• /
• pp.41.3-41.3
• /
• 2004