• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.3
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• pp.452-460
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• 2002

The precision stage using a novel contact-free planar actuator based on magnetic farces, magnetized force and Lorentz farce, is suggested. In the promising magnetic structure, the mover is driven directly without any transmission mechanism, and doesn't need any auxiliary driver for its posture calibration. Then it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness, or general-purpose nano-stage. In this paper, we discuss a driving principle of the planar system including the magnetic force generation mechanism, a framework for the force model, governing characteristics of the levitated plate, and a planar motion control of the constructed prototype. And experimental results are given to verify the derived theoretical model and a feasibility of the system.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.4
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• pp.76-83
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• 2003

To cope with stringent performance targets requested in many fields spanning the whole range of industry, the driver is necessary to realize large dynamic range as well as nano resolution, manipulate the mover orientation without additional driver, and be suitable for clean environment. As one of those purposes, authors have developed the planar precision stages with the integrated operating principle of levitation and propel. In this paper, we discuss potential of magnetic suspension technology by comparing various features of non-contact planar stages, that is, repulsive type of surface actuator and attractive type of surface actuator.