• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.1462-1465
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• 2004

A new method to fabricate metal electrodes on side wall of the microchannel is presented. Coulter counter allows to count the number of cell passing through the microchannel by detecting impedance variation between two electrodes. The relative position of two electrodes is important for sensitivity of impedance measurement. 100nm thick Al electrodes are deposited on the channel side wall by means of shadow evaporation.

• 한국기계가공학회지
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• 제5권3호
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• pp.11-16
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• 2006

A new method to fabricate metal electrodes on side wall of the microchannel is presented. Electrical signal can be measured by the metal electrodes on channel side wall when microparticles pass through a polymer microchannel. 3 dimensional metal electrodes on channel side wall could be fabricated by local deposition of metal through a shadowmask and inclined evaporation. The polymer microchannel with side wall electrodes could be precisely aligned onto metal contact patterns on pyrex glass. The impedance measurement test showed possibility of electrical signal measurement using the fabricated device.