• Journal of the Microelectronics and Packaging Society
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• v.13 no.4
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• pp.27-36
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• 2006

We fabricated thermally evaporated 10 nm-Ni/(poly)Si, 10 nm-Ni/l nm-Ir/(poly)Si and 10 nm-Ni/l nm-Pt/(poly)Si films to investigate the thermal stability of nickel monosilicides at the elevated temperatures by rapid annealing them at the temperatures of $300{\sim}1200^{\circ}C$ for 40 seconds. Silicides of 50 nm-thick were formed on top of both the single crystal silicon actives and the polycrystalline silicon gates. A four-point tester was used to examine sheet resistance. A scanning electron microscope and field ion beam were employed for thickness and microstructure evolution characterization. An X-ray diffractometer and an Auger depth profiler were used for phase and composition analysis, respectively. Nickel silicides with platinum have no effect on widening the NiSi stabilization temperature region. Nickel silicides with iridium farmed on single crystal silicon showed a low resistance up to $1200^{\circ}C$ while the ones formed on polycrystalline silicon substrate showed low resistance up to $850^{\circ}C$. The grain boundary diffusion and agglomeration of silicides lowered the NiSi stable temperature with polycrystalline silicon substrates. Our result implies that our newly proposed Ir added NiSi process may widen the thermal process window for nano CMOS process.

• Journal of Korean Society of Environmental Engineers
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• v.35 no.2
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• pp.115-123
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• 2013

Stoker type incinerator is one of the most popular one used as municipal solid waste (MSW) incineration because, in general, it is quite suitable for large capacity and need no preprocessing facility. Nowadays, however, since the combustible portion of incoming MSW increases together with the decrease of the moisture content due to prohibition of directly burying food waste in landfill, the heating value of waste is remarkably increasing in comparison with the early stage of incinerator installation. Consequently, the increased heating value in incinerator operation causes a number of serious problems such as reduction of waste amount to be burned due to the boiler heat capacity together with the significant NO generation in high temperature environment. Therefore, in this study, a series of numerical simulation have been made as parameters of waste amount and the fraction of moisture in air stream in order to investigate optimal operating condition for the resolution of the problems associated with the high heating value of waste mentioned above. In specific, a detailed turbulent reaction flow field calculation with NO model was made for the full scale incinerator of D city. To this end, the injection method of moisturized air as oxidizer was intensively reviewed by the addition of moisture water amount from 10% and 20%. The calculation result, in general, showed that the reduction of maximum flame temperature appears consistently due to the combined effects of the increased specific heat of combustion air and vaporization heat by the addition of water moisture. As a consequence, the generation of NOx concentration was substantially reduced. Further, for the case of 20% moisture amount stream, the afterburner region is quite appropriate in temperature range for the operation of SNCR. This suggests the SNCR facility can be considered for reoperation. which is not in service at all due to the increased heating value of MSW.