• Journal of the Korean Society for Nondestructive Testing
• /
• v.21 no.2
• /
• pp.169-176
• /
• 2001

In modern industry, the accuracy and the sulfate-finish requirements for machined parts have been becoming ever more stringent. In addition, the measurement and understanding of surface topography is rapidly attracting the attention of the physicist and chemist as well as the engineer. Optical measuring method is used in vibration measurement, crack and defect detection with the advent of opto-mechatronics, and it is expected to play an important role in surface topography. In this study, the principle of confocal microscope is described, and the advanced 3-D surface measuring system that has better performance than the traditional confocal microscope is developed. Suitable fixtures arc developed and integrated with the computer system for generating 3-D surface and form data. Software for data acquisition and analysis of various parameters in surface geometrical features has been developed.