Selective Area Epitaxy of GaAs and InGaAs by Ultrahigh Vacuum Chemical vapor Deposition(UHVCVD) (Ultrahigh Vacuum Chemical Vapor Deposition (UHVCVD)법에 의한 GaAs와 InGaAs 박막의 선택 에피택시)
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- Journal of the Korean Vacuum Society
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- v.4 no.3
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- pp.275-282
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- 1995