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Investigation on EO Characteristics of SiNx Thin Film Irradiated by Ion-beam (이온 빔 조사된 SiNx 박막의 전기 광학적 특성에 관한 연구)

  • Lee, Sang-Keuk;Oh, Byeong-Yun;Kim, Byoung-Yong;Han, Jin-Woo;Kim, Young-Hwan;Ok, Chul-Ho;Kim, Jong-Hwan;Han, Jeong-Min;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.429-429
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    • 2007
  • For various applications of liquid crystal displays (LCDs), the uniform alignment of liquid crystal (LC) molecules on treated surfaces is significantly important. Generally, a rubbing method has been widely used to align the LC molecules on polyimide (PI) surfaces. Rubbed PI surfaces have suitable characteristics, such as uniform alignment. However, the rubbing method has some drawbacks, such as the generation of electrostatic charges and the creation of contaminating particles. Thus, we strongly recommend a non contact alignment technique for future generations of large high-resolution LCDs. Most recently, the LC aligning capabilities achieved by ultraviolet and ion-beam exposures which are non contact methods, on diamond-like carbon (DLC) inorganic thin film layers have been successfully studied because DLC thin films have a high mechanical hardness, a high electrical resistivity, optical transparency, and chemical inertness. In addition, nitrogen-doped DLC (NDLC) thin films exhibit properties similar to those of the DLC thin films and a higher thermal stability than the DLC thin films because C:N bonding in the NDLC thin filmsis stronger against thermal stress than C:H bonding in the DLC thin films. Our research group has already studied the NDLC thin films by an ion-beam alignment method. The $SiN_x$ thin films deposited by plasma-enhanced chemical vapor deposition are widely used as an insulation layer for a thin film transistor, which has characteristics similar to those of DLC inorganic thin films. Therefore, in this paper, we report on LC alignment effects and pretilt angle generation on a $SiN_x$, thin film treated by ion-beam irradiation for various N ratios

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Properties of liquid crystal alignment layers exposued to ion-beam irradiation enemies (이온빔 에너지에 따른 액정배향막의 전기광학적 특성연구)

  • Oh, Byeong-Yun;Lee, Kang-Min;Park, Hong-Gyu;Kim, Byoung-Yong;Kang, Dong-Hun;Han, Jin-Woo;Kim, Young-Hwan;Han, Jeong-Min;Lee, Sang-Keuk;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.430-430
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    • 2007
  • In general, polyimides (PIs) are used in liquid crystal displays (LCDs) as alignment layer of liquid crystals (LCs). Up to date, the rubbing alignment technique has been widely used to align liquid crystals on the PI surface, which is suitable for mass-production of LCDs because of its simple process and high productivity. However, this method has some disadvantages. Rubbed PI surfaces include the debris left by the cloth and the generation of electrostatic charges during rubbing process. Therefore, rubbing-free techniques for LC alignment are strongly required in LCD technology. In this experiment, PI was uniformly coated on indium-tin-oxide electrode substrates to form LC alignment layers using a spin-coating method and the PI layers were subsequently imidized at 433 K for 1 h. The thickness of the PI layer was set at 50 nm. The LC alignment layer surfaces were exposed to an $Ar^+$ ion-beam under various ion-beam energies. The antiparallel cells and twisted-nematic (TN) cells for the measurement of pretile angle and electro-optical characteristics were fabricated with the cell gap of 60 and $5\;{\mu}m$, respectively. The LC cells were filled with nematic LC (NLC, MJ001929, Merck) and were assembled. The NLC alignment capability on ion-beam-treated PI was observed using photomicroscope and the pretilt angle of the NLC was measured by the crystal-rotation method at room temperature. Voltage-transmittance (V-T) and response time characteristics of the ion-beam irradiated TN cell were measured by a LCD evaluation system.

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Modelling and Analysis of Roll-Type Steel Mats for Rapid Stabilization of Permafrost (I) - Modeling - (영구동토 급속안정화를 위한 롤타입강재매트의 모델링과 해석(I) - 해석모델의 수립 -)

  • Moon, Do Young;Kang, Jae Mo;Lee, Janggeun;Lee, Sang Yoon;Zi, Goangseuo
    • Journal of the Korean Geosynthetics Society
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    • v.13 no.4
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    • pp.97-107
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    • 2014
  • Finite element modelling and analysis were conducted for the roll-type steel mats which were placed on loose sand and subjected to a standard truck wheel load in this study. The roll-type steel mats mean that the steel mats can be folded as a circle shape for the carrying to fields in cold regions where workability is limited and are developed for a rapid rehabilitation method for roadway across soft ground which is caused by thawing during the summer season in cold regions. The model is composed of link elements to simulate nonlinear behavior of connections between steel mats, thick shell elements to have flexural stiffness of the steel mats, and springs to simulate characteristics of foundation soils. The structural behaviors of the shell, link elements, and springs were verified at each modelling step through experiment and analysis. Beam and shell analysis without the link elements were conducted and compared to results obtained from the model presented in this study. Significant vertical displacement is shown in the shell model with hinge connections. Therefore, the results demonstrate that the analysis model for the roll-type steel mats on loose sand needs further detail parametric studies.

Study on the Analysis of Vehicle Impact to Small Sign Support (소형표지판 지주와 차량의 충돌해석에 관한 연구)

  • Ko, Man-Gil;Kim, Kee-Dong;Sung, Jung-Gon;Yun, Duk-Geun
    • International Journal of Highway Engineering
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    • v.9 no.3
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    • pp.39-50
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    • 2007
  • Barrier VII program is normally used for the design of flexible barrier, but if modelled properly it can be used for the analysis of vehicle impact to small sign posts. In this paper sign post is shown to be modelled as flexible barrier by combining beam and column elements at each beam node. Simulations with the Barrier VII program have been made for 7 impact cases composed of sign posts of circular and H section with rigidly connected support and breakaway support system. The impact speed used for the simulation ranged from 30km/h to 110km/h. The study shows that in the vehicle impacts to a circular sign post with high speed, the large deflection and high inertia force causes the sign plate to hit the windshield leading to a hazard to the occupants. It is also shown that impact to H section post results in small deflection of the post and abrupt velocity change and high deceleration of the impact vehicle causing severe damage to both the vehicle and occupants. Simulation study also shows that breakaway support system eliminates the potential danger of the vehicle impact to the rigidly connected small sign posts by reducing deflection of the post, abrupt change in velocity and deceleration level.

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Polymer Optical Microring Resonator Using Nanoimprint Technique (나노 임프린트 기술을 이용한 폴리머 링 광공진기)

  • Kim, Do-Hwan;Im, Jung-Gyu;Lee, Sang-Shin;Ahn, Seh-Won;Lee, Ki-Dong
    • Korean Journal of Optics and Photonics
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    • v.16 no.4
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    • pp.384-391
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    • 2005
  • A polymer optical microring resonator, which is laterally coupled to a straight bus waveguide, has been proposed and demonstrated using a nanoimprint technique. The propagation loss of the ring waveguide and the optical power coupling between the ring and bus waveguides was calculated by using a beam propagation method, then the dependence of the device performance on them was investigated using a transfer matrix method. We have especially introduced an imprint stamp incorporating a smoothing buffer layer made of a silicon nitride thin film. This layer played an efficient role in improving the sidewall roughness of the waveguide pattern engraved on the stamp and thus reducing the scattering loss. As a result the overall Q factor of the resonator was greatly increased. Also it reduced the gap between the ring and bus waveguides effectively to enhance the coupling between them, without relying on the direct writing method based on an e-beam writer. As for the achieved device performance at the wavelength of 1550 nm, the quality factor, the extinction ratio, and the free spectral range were ~103800, ~11 dB, and 1.16 m, respectively.

수소처리와 후성장층의 특성이 다이아몬드 박막의 전계방출 특성에 미치는 영향

  • 심재엽;송기문;이세종;백홍구
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.96-96
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    • 2000
  • 화학증착법으로 증착된 다이아몬드 박막은 우수한 전기적 특성과 뛰어난 화학적, 열적 안정성 때문에 전계방출소재로 많은 관심을 불러 일으키고 있다. 다이아몬드 박막의 전계방출은 저전계에서 일어나는 것으로 알려져 있으며, 저전계방출의 원인을 규명하려는 많은 연구가 진행되어 왔다. 한편, 다이아몬드 박막의 전계방출전류는 금속기판의 사용에 의한 기판/다이아몬드 접촉의 개선, 다이아몬드 박막내의 흑연성분의 조절에 의한 구조변화, 보론이나 인 (P), 질소의 도핑, 수소 플라즈마나 cesium 등의 금속을 이용한 표면처리 등의 여러 방법에 의하여 향상된다는 것이 입증되었다. 그 외에 메탄과 대기 분위기 처리, 암모니아 분위기에서의 레이저 조사도 전계방출특성을 향상시키는 것으로 보고되었다. 그러나, 다이아몬드 박막의 성장후 구조적 특성이 다른 박막의 후성장이나 열분해된 운자수소 처리가 다이아몬드 박막의 전계방출특성에 미치는 영향에 관한 연구는 지금까지 이루어지지 않았다. 본 연구에서는 수소처리와 후성장이 다이아몬드 박막의 전계방출특성에 미치는 영향을 고찰하고 이로부터 그 원인을 규명하고자 하였다. 다이아몬드 박막은 hot-filament 화학증착법을 이용하여 증착하였다. 후성장한 다잉아몬드 박막내의 흑연성분과 박막의 두께를 체계적으로 조절하여 후성장 박막의 구조적 특성과 그 두께의 영향을 확인할 수 있었다. 후성장층내의 흑연성분과 두께가 증가할수록 전계방출특성은 향상되다가 저하되었다. 한편, 다이아몬드 박막을 성장시킨 후 수소분위기 처리를 함에 따라 전계방출특성은 향상되었지만 수소처리시간이 5분 이상으로 증가함에 따라 그 특성은 저하되었다. 본 연구에서는 수소처리와 후성장시 나타나는 전계방출특성의 변화 원인을 규명하고자 한다.기판위에서 polymer-like Carbon 구조는 향상되는 경향을 보였다.0 mm인 백금 망을 마스크로 사용하여 실제 3차원 미세구조를 제작하여 보았다. 그림 1에서 제작된 구조물의 SEM 사진을 보여주었으며, 식각된 면의 조도가 매우 뛰어나며 모서리의 직각성도 우수함을 확인할 수 있다. 이와 같이 도출된 시험 조건을 기초로 하여 리소그래피 후에 전기 도금을 이용한 금속 몰드 제작 및 이온빔 리소그래피 장점을 최대한 살릴수 있는 미세구조 제작에 대한 연구를 계속 추진할 계획이다. 비정질 Si1-xCx 박막을 증착하여 특성을 분석한 결과 성장된 박막의 성장률은 Carbonfid의 증가에 따라 다른 성장특성을 보였고, Silcne(SiH4) 가스량의 감소와 함께 박막의 성장률이 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 줄어들어 성장률이 Silane가스량에 의해 지배됨을 볼 수 있다. UV-VIS spectrophotometer에 의한 비정질 SiC 박막의 투과도와 파장과의 관계에 있어 유리를 기판으로 사용했으므로 유리의투과도를 감안했으며, 유리에 대한 상대적인 비율 관계로 투과도를 나타냈었다. 또한 비저질 SiC 박막의 흡수계수는 Ellipsometry에 의해 측정된 Δ과 Ψ값을 이용하여 시뮬레이션한 결과로 비정질 SiC 박막의 두께를 이용하여 구하였다. 또한 Tauc Plot을 통해 박막의 optical band gap을 2.6~3.7eV로 조절할 수 있었다. 20$0^{\circ}C$이상으로 증가시켜도 광투과율은 큰 변화를 나타내지 않았다.부터

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단일벽 탄소나노튜브의 직경 분포에 미치는 합성 템플레이트 및 공정변수의 영향

  • Gwak, Eun-Hye;Yun, Gyeong-Byeong;Jeong, Gu-Hwan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.250-250
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    • 2013
  • 단일벽 탄소나노튜브(Single-walled nanotubes, SWNTs)는 나노스케일의 크기와 우수한 물성으로 인하여, 전자, 에너지, 바이오 분야로의 응용이 기대되고 있다. 특히 SWNTs의 직경을 제어하게 되면 튜브의 전도성 제어가 훨씬 수월하게 되어, 차세대 나노전자소자의 실현을 앞당길 수 있으며 이러한 이유로 많은 연구들이 현재 행해지고 있다. SWNTs의 직경제어 합성을 위해서는 현재 열화학기상증착법(Thermal chemical vapor deposition; TCVD)이 가장 일반적으로 이용되고 있으며, 합성 촉매와 합성되는 튜브의 직경과의 크기 연관성이 알려진 후로는, 촉매의 크기를 제어하여 SWNTs의 직경을 제어하고자 하는 연구들이 활발하게 보고되고 있다. 특히, 촉매 나노입자의 직경이 1~2 nm 이하로 감소될 경우, SWNTs의 직경 분포가 어떻게 변화할 것인지가 최근 가장 중요한 관심사로 남아 있으나, 이러한 크기의 금속입자는 나노입자의 융점저하 현상이 발현되는 영역이므로, SWNTs의 합성온도 영역에서 촉매 금속입자는 반액체(Semi-liquid) 상태로 존재할 것으로 추측하고 있다. 본 연구에서는 고온의 SWNTs 합성환경에서 금속나노촉매의 유동성을 제한하기 위하여 나노사이즈의 기공이 규칙적으로 정렬된 다공성 물질인 제올라이트를 촉매담지체로 이용하였고, 이 때 다양한 합성변수가 SWNTs의 직경에 미치는 영향을 살펴보고자 하였다. SWNTs의 합성을 위해 실리콘 산화막 기판 위에 제올라이트를 도포한 후, 합성 촉매로서 전자빔증발법을 통하여 수 ${\AA}$에서 수 nm 두께의 철 박막을 증착하였다. 합성은 메탄을 원료가스로 하여 TCVD법으로 실시하였다. 주요변수로는 제올라이트 종류, 증착하는 철 박막의 두께, 합성온도를 설정하였으며, 이에 따라 합성된 SWNTs의 합성수율 및 직경분포의 변화를 체계적으로 살펴보았다. SWNTs의 전체적인 합성수율의 변화는 SEM 관찰결과를 이용하였으며, SWNTs의 직경은 AFM 관찰 및 Raman 스펙트럼의 분석에서 도출하였다. 실험결과, 제올라이트 종류에 따라서는 명확한 튜브직경 분포의 변화 없이 비교적 좁은 직경분포를 갖는 SWNTs가 합성되었으며, 합성온도가 $850^{\circ}C$ 이하로 감소되면 합성수율이 현저히 감소되는 것을 알 수 있었다. 촉매박막의 두께가 1 nm 이상인 경우에서는 직경 5 nm 전후의 나노입자가 형성되었으며, 이때 SWNTs의 합성수율은 높았으나 다양한 직경의 튜브가 합성이 된 것을 확인할 수 있었다. 반면, 촉매입자의 크기가 2 nm 이하에서는 합성수율은 다소 저하되었으나, SWNTs의 직경분포의 폭이 상대적으로 훨씬 좁아지는 것을 알 수 있었다. 추후, 극미세 촉매와 저온합성 환경에서의 합성수율 향상을 위한 합성공정의 개량이 지속적으로 요구된다.

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Comparison of the Dose of the Normal Tissues among Various Conventional Techniques for Whole Brain Radiotherapy (여러 통상적인 전뇌방사선치료 기법에서의 정상조직의 조사선량 비교)

  • Kang, Min-Kyu
    • Radiation Oncology Journal
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    • v.28 no.2
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    • pp.99-105
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    • 2010
  • Purpose: To compare radiation dose of the brain and lens among various conventional whole brain radiotherapy (WBRT) techniques. Materials and Methods: Treatment plans for WBRT were generated with planning computed tomography scans of 11 patients. A traditional plan with an isocenter located at the field center and a parallel anterior margin at the lateral bony canthus was generated (P1). Blocks were automatically generated with a 1 cm margin on the brain (5 mm for the lens). Subsequently, the isocenter was moved to the lateral bony canthus (P2), and the blocks were replaced into the multileaf collimator (MLC) with a 5 mm leaf width in the craniocaudal direction (P3). For each patient plan, 30 Gy was prescribed at the isocenter of P1. Dose volume histogram (DVH) parameters of the brain and lens were compared by way of a paired t-test. Results: Mean values of $D_{max}$ and $V_{105}$ of the brain in P1 were 111.9% and 23.6%, respectively. In P2 and P3, $D_{max}$ and $V_{105}$ of the brain were significantly reduced to 107.2% and 4.5~4.6%, respectively (p<0.001). The mean value of $D_{mean}$ of the lens was 3.1 Gy in P1 and 2.4~2.9 Gy in P2 and P3 (p<0.001). Conclusion: WBRT treatment plans with an isocenter located at the lateral bony canthus have dosimetric advantages for both the brain and lens without any complex method changes.

Creep Behaviours of 9% Ni Alloy (Ni 합금강의 크리프 거동)

  • Hwang, Kyung-Choong;Kim, Jong-Bae;Kang, Sung Soo
    • Journal of Korean Ophthalmic Optics Society
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    • v.13 no.4
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    • pp.89-94
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    • 2008
  • Purpose: To observe the high temperature creep test and the fracture surface of the samples of 9% Ni alloy steel generally used for all kinds of mahine parts and predict the durability of that by determining a constant of C with a Larson-Miller variable. Methods: The equipment of this test was made into lever-beam style designed by Andrade and F. Garofalo et al.. The condition of creep test was set under 16 kinds of conditions after fixing 4 kinds of temperature condition and 4 kinds of stress condition to check how it effects the samples. Results: The temperature of creep test was increased, the stress index (n) of creep deformation was gradually decreased from 3.97 to 3.55. The activation energy of creep deformation was decreased from 90.39 to 83.64 kcal/mol when the stress was increased. A constant of C value by calculation of larson-Miller variable was about 22 and if temperature for use is suggested, the durability could be calculated. Conclusions: By analyzing the fracture phenomenon and suggesting the observation result of the fracture surface of the samples and creep test of 9% Ni alloy steel, the basic design data for the practical use of accessories in the field of equipment could be constructed and used to predict the durability of the equipment.

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Pulsed Laser System of Ultra-scan Way for Uterus Rehabilitation Treatment (자궁 재활치료를 위한 울트라-스캔 방식의 펄스형 레이저시스템)

  • Kim, Whi-Young
    • The Journal of the Korea Contents Association
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    • v.9 no.6
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    • pp.256-265
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    • 2009
  • Laser output becomes output adjustment from 20 w to 100 w consecutively and time of exposure is available adjustment through water plant in 0.01 seconds. Pulse action can intercept laser beam periodically and supermarket pulse 0.1 $\sim$ between 1ms discharge consist and momentary laser output is increased to 5 $\sim$ 10. Specially, that must remove malignancy cell in womb nine escarps in the case of uterine cancer first of all stability of tube output about pulse by weight very, stable soft switching action area is defined without high frequency transformer leakage inductance ($L_1$) increase and additional series inductor insertion to converter the first main circuit securing zero voltage and marks of switching action in this research specially, because circulation current path of inductor ($L_f$) current is intercepted, converter the first main circuit switching component and spiritual enlightenment damage of high frequency transformer take decreasing greatly and high frequency the second stoppage department ($D_5,\;D_6$) becomes soft switching, and also, switching damage absorption quantity characteristic that can come to life again as subordinate have, and to become tube stabilization design and result that manufacture and experiment, brought result that improve of 10% than existing equipment, and if supplement as systematic late, it becomes thought to get into superior result.