Analysis of Tension Mask Thermal Deformations under Localized Heating and Prediction of Electron Beam Landing Shifts (국부가열에 의한 Tension Mask 의 열변형 해석 및 전자빔의 오착 예측)
-
- Journal of the Korean Society for Precision Engineering
- /
- v.16 no.8
- /
- pp.138-148
- /
- 1999