• Title/Summary/Keyword: 비저항성

Search Result 2,970, Processing Time 0.036 seconds

스퍼터링 방법으로 증착한 $RuO_2$ 박막의 구조 및 전기적 특성

  • 조광래;임원택;이창효
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 1998.02a
    • /
    • pp.80-80
    • /
    • 1998
  • RU02 박막은 전이금속으로서 rutile 구조이며, 넓은 온도 영역에서 금속성의 를 나타내고, 700도 이상의 높은 온도에서 열적 안정성을 갖는 물질이다 이러한 특성 때문 에 RU02 박막은 실리콘 디바이스에서 배선 게이트 전극 확산 장벽 등에 응용가능성이 높 은 물질로 각광을 받고 있다- 특히 다결정 RU02 박막은 DRAM (dynamic random access m memory) 내의 강유전성 축전기의 전극으로서 유망한 물질이다. 지금까지 이러한 응용분야에 사용된 전극물질은 pt 금속이었다 그러나 이러한 금속전극은 SI 산소 그리고 강유전체의 구성물질 등과의 상호확산, pt 표면의 hillock의 존재로 생기는 전기적 단락, 기판과의 나쁜 점작성, 어려운 에칭 프로세스 등의 단점을 가지고 있다 더욱 더 심각한 문제는 P Pt'ferroelectric/Pt 구조에서 나타나는 aging과 fatigue인데, 이는 108 사이쿨 이후에 스위칭 가 능한 잔류 pOlarization 으$\mid$ 감소를 유발하게 된다- 최근 Berstein은 Pt 대신에 RU02를 사용함으로써 강유전체 축전기에서의 fatigue 현상을 크게 감소시켰다고 보고 한 바 있다 Burst川도 RU02 가 실리콘 표면과 유전체 물질 사이에 전기전도 어떠한 상호 확산도 일어나지 않음을 보였다. 그러나 이러한 연구 결과에도 증착조건과 RU02 박악의 특성에 관한 상호 관계가 충분히 더욱 더 중은 강유전성 박막올 만들기 위해서는 이러한 박막 전극에 않고 있다 연구되지 대한 상세한 연구가 반드시 필요하다고 본다. RU02 박막은 실리콘 기판 위에 고주파 마그네트론 스퍼터링 방법으로 증착하였다. 사용 한 타켓은 2 인치의 직경을 가지는 CERAC 사에서 제작한 Ruol다 초기 진공은 1O~6 Torr 이하였고, 고주파 전력은 20 - 80W 까지 변화시켰다 반응성 스퍼터링율 하기 위해 아르곤과 산소롤 주입하였고, 산소/(산소+아르곤)의 비를 변화시켰다 기판의 온도와 증착압력은 각각 상온에 서 500도까지 , 5mTorr에 서 100mTorr 까지 변 화시 켰 다 RU02 박막의 결정성을 조사하기 위해 XRD 표면 형상과 단면을 조사하기 위해 SEM을 사용하였다‘ 박악의 비저항을 조사하기 위해 4-단자법 van der Pauw 방법을 사용하였다. RU02 박막은 증착압력이 높을수록 비저항은 높아지고, 두께는 감소하였다. 특히 1 100mTorr에서는 작업가스와 스퍼터된 입자사이의 심각한 산란 때문에 아예 증착이 이루어 지지 않았다‘ RF 전력이 증가할수록 비저항이 낮아졌다. 이는 두께에 의존하는 결과이며 전형적인 금속박막에서 나타나는 현상과 유사함을 알 수 있었다- 기판온도와 작업가스의 산소 분압이 높을수록 비저항이 감소하였다‘ 이러한 사실은 성장한 박악의 결정구조와 밀접한 관련이 있음을 보여준다.

  • PDF

Effects of Walking Exercise Intervention on Body Composition, Insulin Resistance, and Blood Pressure in Elderly Obese Women with Stage 1 Hypertension (걷기운동이 1기 고혈압을 가진 비만 노인 여성의 신체조성, 인슐린 저항성 및 혈압에 미치는 영향)

  • Moon-Soo Park;Yi-Sub Kwak
    • Journal of Life Science
    • /
    • v.33 no.10
    • /
    • pp.791-796
    • /
    • 2023
  • It is well known that any kind of physical activity can be a useful nonpharmacological tool in the prevention and treatment of cardiovascular diseases, including antihypertension. There is also strong evidence that suggests that people with cardiovascular disease are less active than healthy people. Therefore, the aim of this study was to investigate the effect of a 12-week walking exercise intervention program on body composition, insulin resistance, and blood pressure in obese elderly women with stage 1 hypertension. The walking exercise program was performed for 50 min, three times per week. The intensity progressively increased: RPE 11 to 12, 40-50% HRR, for weeks 1-4; RPE 12 to 13, 50-60% HRR, for weeks 5-8; and RPE 13 to 14, 60-65% HRR, for weeks 9-12. The subjects were 20 obese elderly women with stage 1 hypertension (SBP: 140-159 mmHg or DBP: 90-99 mmHg). Half were placed in the walking exercise group (EX, n=10), and half were placed in the control group (CON, n=10). At the end of the program, the EX group members had significantly lower body fat, insulin resistance, and SBP compared to the CON group members. These results suggest that undertaking a 12-week walking exercise program improves body fat, insulin resistance, and SBP, which may improve the incidence of metabolic disease in elderly obese women with stage 1 hypertension.

Detection of cavities in a karst area by means of a 3D electrical resistivity technique (3차원 전기비저항탐사에 의한 카르스트 지역에서의 공동탐지)

  • Park, Sam-Gyu;Kim, Chang-Ryol;Son, Jung-Sul;Yi, Myeong-Jong;Kim, Jung-Ho
    • Geophysics and Geophysical Exploration
    • /
    • v.12 no.1
    • /
    • pp.27-32
    • /
    • 2009
  • In this study, we examined the applicability of a 3D electrical resistivity technique for the probing of underground cavities at a field test site in a karst area in Yongweol-ri, Muan-gun, in the south-western part of the Korean peninsula. At the test site, where the ground has subsided in the past, underground cavities are commonly found in the limestone bedrock, which is overlain with alluvial deposits. The limestone cavities at the test site are mostly filled with groundwater and clay; hence, they show levels of electrical resistivity that are significantly lower than those of the surrounding host bedrock. The results of this study demonstrate that the zones of low resistivity correspond to the zones of the cavities identified in the boreholes at the site, and that our 3D electrical resistivity survey is a very effective tool for detecting and mapping underground cavities in a karst area.

A Study on the Possibility of Construction Supervision by Geophysical Prospecting (지구 물리탐사에 의한 시공감리성 연구)

  • Shon, Ho-Woong
    • The Journal of Engineering Research
    • /
    • v.2 no.1
    • /
    • pp.165-174
    • /
    • 1997
  • It is not possible to define the earth's interior because of it complicity. However, it can be interpreted directly and/ or indirectly. Geophysics is the subject of this study. To study the possibility of construction supervision by geophysical method, geophysical prospecting was performed and studied at the SamYang pumping well area in Cheju Island, where, although underground dam was constructed, the saline water invade the pumping well area. This study focuses on the construction supervision by electrical measurements. Two electric resistivity survey lines are installed in the pumping well site, and at each line electric survey was conducted at ebb and flow tides. To increase the data quality SP (self-potential) survey was also performed. As a result the geophysical exploration methods explained the defect of construction well, and It shows that geophysical probe can be a useful tool for the construction supervision.

  • PDF

Case history of electrical resistivity survey at the river for bridge design (장대교량 기초 설계를 위한 수륙혼합 전기비저항탐사 사례)

  • Chung Ho-Joon;Kim Jung-Ho;Kwon Hyoung-Seok;Ahn Hee-Yoon;Kim Ki-Seog
    • 한국지구물리탐사학회:학술대회논문집
    • /
    • 2002.09a
    • /
    • pp.126-138
    • /
    • 2002
  • Designing the bridge with wider span is the present-day trends. Therefore, constructing the foundation on the suitable ground is one of the important factor for the safety of bridge. But, getting a subsurface information under the river is not easy problem. This paper shows results of electrical resistivity survey at the river. Electrical resistivity survey have revealed geoelectrical structure successfully. The result is well matched with boring and can provide useful information on the geological structure such as fault fracture zone for suitable location of foundation. It is expected that application of electrical resistivity survey at the river will be helpful in preventing modification of design due to unexpected ground condition during the construction, or water contamination and increment of costs accompanied with ground reinforcement.

  • PDF

Numerical simulation study on applicability of electrical resistivity survey at tunnel face (터널 굴착면에서의 전기비저항 탐사 적용성에 관한 수치해석 연구)

  • Yi, Myeong-Jong;Kim, Nag-Young;Lee, Sangrae;Hwang, Bumsik;Ha, Myung Jin;Kim, Ki-Seog;Cho, In-Ky;Lee, Kang-Hyun
    • Journal of Korean Tunnelling and Underground Space Association
    • /
    • v.24 no.3
    • /
    • pp.279-292
    • /
    • 2022
  • Unexpected anomalies in the geotechnical investigation at design stage may cause problems during tunnel excavation. Therefore, it is important to predict the ground condition ahead of a tunnel face during tunnel excavation in order to prevent tunnel collapse. Despite the fulfillment of an electrical resistivity survey at the tunnel face, the existing electrical resistivity survey program can produce distorted results by the limitation of tunnel modelling. In this background, this study develops a modelling program for an electrical resistivity survey considering the tunnel shape. Numerical simulation and inverse calculation were performed for the electrical resistivity survey in the tunnel using the developed program. As a result, it was proved that the developed program could predict accurately the anomalous object's location and condition ahead of the tunnel face.

Resistivity Imaging Using Borehole Electrical Resistivity Tomography: A Case of Land Subsidence in Karst Area Due to the Excessive Groundwater Withdrawal (시추공 전기비저항 토모그래피를 이용한 비저항 영상화: 과잉취수에 의한 석회암 지반침하 지역 사례)

  • Song, Sung-Ho;Lee, Gyu-Sang;Um, Jae-Youn;Suh, Jung-Jin
    • Journal of the Korean earth science society
    • /
    • v.32 no.6
    • /
    • pp.537-547
    • /
    • 2011
  • Electrical resistivity tomography surveys using boreholes were applied to reveal the cause of a catastrophic land subsidence accompanied by the excessive groundwater withdrawal in urban karst area and to map the connectivity of disseminated cavities over the study area. In order to understand the hydrogeological characteristics, resistivity using exsitu core samples, groundwater level for five boreholes, and hydraulic conductivity using slug test were measured. The hydraulic conductivity variation ranging from 0.8 to $9.3{\times}10^{-4}\;cm/s$ for five boreholes and a gentle slope of groundwater level indicated that there is no significant characteristics of hydraulic heterogeneity. Core samples of the lime-silicated rock were classified as three groups including cracked, weathered, and fresh and measured the resistivity values ranged from 103 to 161, 218 to 277, and 597 to 662 ohm-m, respectively. Drilling results that showed the cavity filled with clay materials and tomogram for this region indicated resistivity value lower than 50 ohm-m. From the inverted resistivity results for each section with five boreholes, cavity and fractured layer were distributed along the depth between 10 and 20 m overall area and cavities ranging from 4 to 6 m filled with clay materials.

Automated Analysis for PDC-R Technique by Multiple Filtering (다중필터링에 의한 PDC-R 기법의 자동화 해석)

  • Joh, Sung-Ho;Rahman, Norinah Abd;Hassanul, Raja
    • KSCE Journal of Civil and Environmental Engineering Research
    • /
    • v.30 no.3C
    • /
    • pp.141-148
    • /
    • 2010
  • Electrical noises like self potential, burst noises and 60-Hz electrical noises are one of the causes to reduce reliability of electrical resistivity survey. Even the PDC-R (Pseudo DC resisitivity) technique, recently developed, is suffering from the problem of low reliability due to electrical noises. That is, both DC-based and AC-based resistivity technique is subject to reliability problem due to electrical noises embedded in urban geotechnical sites. In this research, a new technique to enhance reliability of the PDC-R technique by minimizing influence of electrical noises was proposed. In addition, an automated procedure was also proposed to facilitate data analysis and interpretation of PDC-R measurements. The proposed technique is composed of two steps: 1. to extract information only related with the input current by means of multiple-filter technique, and 2. to undertake a task to sort out signal information only to show stable and reliable characteristics. This automated procedure was verified by a synthetic harmonic wave including DC shift, burst random noises and 60-Hz electrical noises. Also the procedure was applied to site investigation at urban areas for proving its feasibility and accuracy.

Decoupling Control of an Induction Motor with Recursive Adaptation of Rotor Resistance ((재귀)궤환형 회전자 저항 추정기를 갖는 유도전동기의 비간섭제어)

  • 김규식
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
    • /
    • v.12 no.3
    • /
    • pp.99-103
    • /
    • 1998
  • We propose a nonlinear feedback controller that can control the induction motors which have been applied to many electrical facilities with high dynamic performance by means of decoupling of moor speed and rotor flux. The nonlinear feedback controller needs the information on some motor parameters. Among them, rotor resistance varies greatly with machine temperature. Anew recursive adaptation algorithm for rotor resistance which can e applied to our nonlinear feedback controller is also presented in this paper. To demonstrate the practical significance of our results, we present some experimental results.

  • PDF

Estimation of Soil Volume Conversion Factor using Smart Geophysical Exploration Method (스마트 물리탐사 기법을 이용한 토량환산계수 산정)

  • Ryu, Hee-Hwan;Jin, Kyu-Nam;Park, Sung-Wook;Cho, Gye-Chun
    • Proceedings of the Computational Structural Engineering Institute Conference
    • /
    • 2011.04a
    • /
    • pp.170-173
    • /
    • 2011
  • 국내 풍화지반의 토량환산계수를 정확하고 합리적으로 추정하는 것은 공사의 성패에 있어 매우 중요한 사항이다. 하지만 현업에서는 풍화지반의 풍화도를 정량화하는 것이 어렵고, 토량환산계수를 적용 시 외국의 기준을 사용하는 경우가 빈번하다. 뿐만 아니라, 국내 풍화지반의 토량환산계수에 관한 연구는 아직 미비하여, 끊임없이 토량환산계수의 정확성 및 사용성에 대해 문제 제기가 있어 왔다. 이에 본 연구에서는 TEPS (Tunnel Electrical resistivity Prospecting System)를 이용하여 화강암의 풍화 정도와 전기비저항의 상관관계를 도출하고 풍화지반 내 흙이 차지하는 비율(S/W 비)을 전기비저항과 개괄적으로 상관관계를 맺어 전기비저항을 이용하여 토량환산계수를 산정하는 방법을 제안하였다. 현장 관리자가 풍화지반에서 쉽게 토량환산계수 및 토공량에 관한 정보를 획득할 수 있도록 풍화지반 토공관리프로그램(WEMP)을 개발하고 토량환산계수 측정시스템을 설계하였다.

  • PDF