• Title/Summary/Keyword: 비등 수

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Failure Analysis of Ferroelectric $(Bi,La)_4Ti_3O_{12}$ Capacitor in Fabricating High Density FeRAM Device (고밀도 강유전체 메모리 소자 제작 시 발생하는 $(Bi,La)_4Ti_3O_{12}$ 커패시터의 불량 분석)

  • Kim, Young-Min;Jang, Gun-Eik;Kim, Nam-Kyeong;Yeom, Seung-Jin;Hong, Suk-Kyoung;Kweon, Soon-Yong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.257-257
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    • 2007
  • 고밀도 FeRAM (Ferroe!ectric Random Access Memory) 소자를 개발하기 위해서는 강유전체 물질을 이용한 안정적인 스텍형의 커패시터 개발이 필수적이다. 특히 $(Bi,La)_4Ti_3O_{12}$ (BLT) 강유전체 물질을 이용하는 경우에는 낮은 열처리 온도에서도 균질하고 높은 값의 잔류 분극 값을 확보하는 것이 가장 중요한 과제 중의 하나이다. 불행히도, BLT 물질은 a-축으로는 약 $50\;{\mu}C/cm^2$ 정도의 높은 잔류 분극 값을 갖지만, c-축 방향으로는 $4\;{\mu}C/cm^2$ 정도의 낮은 잔류 분극 값을 나타내는 동의 강한 비등방성 특성을 보인다. 따라서 BLT 박막에서 각각 입자들의 크기 및 결정 방향성을 세밀하게 제어하는 것은 무엇보다 중요하다. 본 연구에서는 16 Mb의 1T/1C (1-transistor/1-capacitor) 형의 FeRAM 소자를 BLT 박막을 적용하여 제작하였다. 솔-젤 (sol-gel) 용액을 이용하여 스핀코팅법으로 BLT 박막을 증착하고, 후속 열처리 공정을 RTP (rapid thermal process) 공정을 이용하여 수행하였다. 커패시터의 하부 전극 및 상부 전극은 각각 Pt/IrOx/lr 및 Pt을 적용하였다. 반응성 이온 에칭 (RIE: reactive ion etching) 공정을 이용하여 커패시터를 형성시킨 후, 32k-array (unit capacitor: $0.68\;{\mu}m$) 패턴에서 측정한 스위칭 분극 (dP=P*-P^) 값은 약 $16\;{\mu}C/cm^2$ 정도이고, 웨이퍼 내에서의 균일도도 2.8% 정도로 매우 우수한 특성을 보였다. 그러나 단위 셀들의 특성을 평가하기 위하여 bit-line의 전압을 측정한 결과, 약 10% 정도의 커패시터에서 불량이 발생하였다. 그리고 이러한 불량 젤들은 매우 불규칙적으로 분포함을 확인할 수 있었다. 이러한 불량 원인을 파악하기 위하여 양호한 젤과 불량이 발생한 셀에서의 BLT 박막의 미세구조를 분석하였다. 양호한 셀의 BLT 박막 입자들은 불량한 셀에 비하여 작고 비교적 균일한 크기를 갖고 있었다. 이에 비하여 불량한 셀에서의 BLT 박막에는 과대 성장한 입자들이 존재하고 이에 따라서 입자 크기가 매우 불균질한 것으로 확인되었다. 또 이러한 과대 성장한 입자들은 거의 모두 c-축 배향성을 나타내었다. 이상의 실험 결과들로부터, BLT 박막을 이용하여 제작한 FeRAM 소자에서 발생하는 불규칙한 셀 불량의 주된 원인은 c-축 배향성을 갖는 과대 성장한 입자의 생성임을 알 수 있었다. 즉 BLT 박막을 이용하여 FeRAM 소자를 제작하는 경우, 균일한 크기의 입자 및 c-축 배향성의 입자 억제가 매우 중요한 기술적 요소임을 알 수 있었다.

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Kinetics of Nitric Oxide Reduction with Alkali Metal and Alkali Earth Metal Impregnated Bamboo Activated Carbon (알칼리금속과 알칼리 토금속 촉매 담지 대나무 활성탄의 NO 가스 반응 특성)

  • Bak, Young-Cheol;Choi, Joo-Hong
    • Korean Chemical Engineering Research
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    • v.54 no.5
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    • pp.671-677
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    • 2016
  • The impregnated alkali metal (Na, K), and the alkali earth metal (Ca, Mg) activated carbons were produced from the bamboo activated carbon by soaking method of alkali metals and alkali earth metals solution. The carbonization and activation of raw material was conducted at $900^{\circ}C$. The specific surface area and the pore size distribution of the prepared activated carbons were measured. Also, NO and activated carbon reaction were conducted in a thermogravimetric analyzer in order to use for de-NOx agents of the used activated carbon. Carbon-NO reactions were carried out in the nonisothermal condition (the reaction temperature $20{\sim}850^{\circ}C$, NO 1 kPa) and the isothermal condition (the reaction temperature 600, 650, 700, 750, 800, $850^{\circ}C$, NO 0.1~1.8 kPa). As results, the specific volume and the surface area of the impregnated alkali bamboo activated carbons were decreased with increasing amounts of the alkali. In the NO reaction, the reaction rate of the impregnated alkali bamboo activated carbons was promoted to compare with that of the bamboo activated carbon [BA] in the order of BA(Ca)> BA(Na)> BA(K)> BA(Mg) > BA. Measured the reaction orders of NO concentration and the activation energy were 0.76[BA], 0.63[BA(Na)], 0.77[BA(K)], 0.42[BA(Ca)], 0.30 [BA(Mg)], and 82.87 kJ/mol[BA], 37.85 kJ/mol[BA(Na)], 69.98 kJ/mol[BA(K)], 33.43 kJ/mol[BA(Ca)], 88.90 kJ/mol [BA(Mg)], respectively.

Geochemical Studies on Au-Ag Hydrothermal Vein Deposits, Republic of Korea : Goryeong-Waegwan Mineralized Area (한반도(韓半島) 금(金)-은(銀) 열수(熱水) 광상(鑛床)의 지화학적(地化學的) 연구(硏究) : 고령(高靈)-왜관지역(倭館地域) 광화대(鑛化帶))

  • So, Chil-Sup;Choi, Sang-Hoon;Chi, Se-Jung;Choi, Seon-Gyu;Shelton, Kevin L.
    • Economic and Environmental Geology
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    • v.22 no.3
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    • pp.221-235
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    • 1989
  • Gold-silver mineralization of the Goryeong-Waegwan area was deposited in three stages of quartz and calcite veins which fill fissures in Cretaceous sedimentary rocks of the Sindong Group. Radiometric dating indicates that mineralization is Late Cretaceous age(98 Ma) likely associated genetically with intrusion of a small biotite granite stock. Fluid inclusion and stable isotope data indicate that Au-Ag ore was deposited at temperatures between $280^{\circ}C$ and $230^{\circ}C$ from fluids with salinities between 1.7 and 8.7 equiv.wt.% NaCl. Evidence of boiling indicates pressures of <100 bars, corresponding to depths of 425 and 1,150m, respectively, assuming lithostatic and hydrostatic loads. Within ore stage I there is an apparent decrease in ${\delta}^{34}S$ values of $H_2S$ with paragenetic time, from +1.4 to -2.5 per mil. This pattern was likely achieved through progressive increases in pH and activity of oxygen accompanying boiling. Measured and calculated hydrogen and oxygen isotope values of ore-forming fluids(${\delta}D$ = -90 to -100 per mil; ${\delta}^{18}O$ = +3.9 to -11.4 per mil) indicate meteoric water dominance, approaching unex-changed meteoric water values. Au-Ag deposition is thought to be the result of cooling and dilution of a boiling fluid through mixing with less evolved meteoric waters.

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Studies on the Utilization of Sweet Potatoes for Takju Brewing (탁주양조원료(濁酒釀造原料)로서 고구마의 이용(利用)에 관(關)한 연구(硏究))

  • Kim, Chan-Jo;Choi, Woo-Young;Oh, Man-Jin
    • Applied Biological Chemistry
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    • v.15 no.3
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    • pp.213-219
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    • 1972
  • In order to utilize sweet potatoes for the material of Takju, brewing experiments with raw sweet potatoes, sweet potato chips powder and its koji were conducted; and various tests were carried out on effect of the treatments of acid, alkali, polyphenol oxidase inhibitor, oxidizing and reducing agents upon the prevention against coloring of sweet potato chips by steaming, and on peeling effect of sweet potatoes by the alkali and heat treatments. The results obtained were as follows. 1) In the case of brewing with raw sweet potatose, each plot showed low acid and ethanol content, and its finished Takju had an undersirable color and odor. The plots which were mashed after peeling showed higher ethanol contents than the plots mashed without peeling. 2) In the case of brewing with sweet potato chips powder, each plot contained considerably more amount of ethanol than the plots brewed with raw sweet potatoes, white it contained less amount of acid. The ethanol contents of the plots using wheat bran koji were $10.5{\sim}11.4$ per cent 4 days after mashing, and were higher than those of the plots using malts powder. Their finished Takju was inferior in quality because of the lack of acid and being darkened gradually in process of time. 3) The kojies which were made of sweet potato chips powder with Neurospora sitophila or Aspergillus oryzae had good appearance, but the Takju mashes brewed with these contained remarkably less amount of ethanol. 4) Effect of the treatments of acid, alkali, polyphenol oxidase inhibitor and organic solvents such as ether and ethanol upon the prevention against coloring of sweet potato chips was not recognized. Alum and burnt alum were effective a little on the decolorization, and among the oxidizing and reducing agents tested, potassium permanganate was most effective. 5) Darkening of sweet potato chips powder in course of heating after mixing with water was not affected by pectin and amino acids, but by tannin. 6) Sweet potatoes were not peeled easily by friction after soaking in the boiling solution of 3 per cent alkali for 6 minutes and peeled in boiling water for 12 minutes. From the viewpoint of the results above mentioned, it seems to be necessary to study further on the isolation of microorganisms which are able to decompose the coloring substances and yeasts which are adequate for the fermentation of sweet potatoes in order to utilize sweet potatoes for Takju brewing, because brewing with raw sweet potatoes, sweet potato chips powder and its koji was unsuccessful, and effect of the various treatments on the decolorization of sweet potatoes was not recognized.

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Characterization of Chemical Composition and Thermal Behavior of Biomass Originated from Tobacco Industry (담배산업유래 바이오매스의 화학성분 및 열분해 특성 평가)

  • Sung, Yong Joo;Seo, Yung Bum
    • Journal of the Korean Wood Science and Technology
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    • v.36 no.6
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    • pp.138-146
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    • 2008
  • The chemical compositions, cell wall biopolymers and non-isothermal behavior of the stem biomass of Nicotiana Tabacum originated from tobacco industry were investigated in depth. On a weight basis, the contents of total ash and total sugar are 19.1% and 20.7% respectively. Lignin content was around 3% of tobacco stem biomass while pectin was over 7%. The holo-cellulose content in cell wall biopolymer was around 13% and the $\alpha$-cellulose constitutes 60% of the total holo-cellulose. The thermal behavior of stem biomass showed different patterns depending on either inert (nitrogen) or oxidizing (air) atmospheric condition. In the air atmosphere, the rapid thermal decompositions at around $473^{\circ}C$ and $581^{\circ}C$ were recorded as the peaks in DTG curve, while the peaks were not shown in the nitrogen atmosphere condition. The thermal analysis of the freeze dried soluble obtained from hot water extraction of tobacco stem biomass showed that the rapid thermal decomposition at around $581^{\circ}C$ in the air atmosphere was due to the residual char originated from the soluble fraction. The distinct difference in thermal decomposition between hemicellulose and cellulose were easily found in the DTG curve obtained in the nitrogen atmosphere.

Metal Surface Coating Using Electrospray of Biodegradable Polymers and $\alpha$-Lipoic Acid Release Behavior for Drug-Eluting Stents (생분해성 고분자의 전기분사를 이용한 약물방출 스텐트용 금속표면 코팅 및 ALA방출 거동)

  • Kim, Dong-Min;Lee, Bong-Soo;Park, Cheol-Ho;Park, Kwi-Deok;Son, Tae-Il;Jeong, Myeong-Ho;Han, Dong-Keun
    • Polymer(Korea)
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    • v.34 no.2
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    • pp.178-183
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    • 2010
  • Medical metal stents inserted to patients with a cardiovascular disease associated with coronary artery system have relatively increased the survival rate. The development of new stents is, however, urgently required due to restenosis and late thrombosis generated in metal stents. To solve these problems, the biodegradable polymers such as poly(lactide-co-glycolide) (PLGA), poly(L-lactide)(PLLA), and poly ($\varepsilon$-caprolactone)(PCL) were mixed with alpha lipoic acid (ALA), which is well known to inhibit the proliferation of neointimal hyperplasia. Subsequently, the ALA-loaded polymers were coated on stainless steel by electrospray. The drug-eluting behaviors from the coated polymers were investigated according to kinds and concentrations of polymers, spray rates, and kinds of solvents. The drug-eluting rate from PCL with the lowest glass transition temperature was the fastest among three polymers and followed by PLGA and PLLA. The surface roughness increased as the spray rate was increased and also the drug-eluting rate was affected by kinds of solvents with different boiling point. It is expected that drug-eluting stent (DES) coated with ALA-loaded polymers can be applied practically for clinical applications by controlling the behavior of drug release.

An Analysis of Sister Journal Characteristics for Enhancing the Publication of International Journals (국제 학술지 발간 개선을 위한 자매학술지의 분석 연구)

  • Oh, Dong-Gen;Yang, Kiduk;Yeo, Ji-Suk;Park, Sang-Hoo
    • Journal of Korean Library and Information Science Society
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    • v.49 no.3
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    • pp.219-240
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    • 2018
  • The study analyzed the characteristics of two library and information science journals indexed by Web of Science (WoS) and Scopus in 2015 along with two of their non-indexed sister journals. The study also analyzed the characteristics of a SCIE- and Scopus-indexed oceanographic journal published domestically along with its sister journal indexed by Scopus only. In addition, the study collected and analyzed the articles published during 2014 and 2015 in these 6 journals as well as the citations they received in 2016. By comparing the characteristics and publication data of indexed journals and their sister journals, the study aimed to identify the properties of WoS-indexed journals that may be helpful in enhancing international journal publication. The findings from the analysis of data can be summarized as follows: WoS-indexed journals publish more frequently, focus mainly on articles, are authored by researchers from many countries, and have higher quality papers that receive more citations than their non-WoS-indexed sister journals. The study also found higher rates of co-authored papers in WoS indexed journals, which were amplified in LIS journals. This is an important factor to consider for Korean LIS journals that are dominated by singe-author articles when they prepare to be indexed in WoS.

Kinetics of NO Reduction with Copper Containing Bamboo Activated Carbon (구리 촉매 담지 대나무 활성탄의 NO 가스 반응 특성)

  • Bak, Young-Cheol;Choi, Joo-Hong
    • Journal of Korean Society of Environmental Engineers
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    • v.38 no.3
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    • pp.144-149
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    • 2016
  • The metal-impregnated activated carbon was produced from bamboo activated carbon by soaking method of metal nitrate solution. The carbonization and activation of raw material was conducted at $900^{\circ}C$. The specific surface area and pore size distribution of the prepared activated carbons were measured. Also, NO and activated carbon reaction were conducted in a thermogravimetric analyzer in order to use as de-NOx agents of used activated carbon. Carbon-NO reactions were carried out with respect to reaction temperature ($20^{\circ}C{\sim}850^{\circ}C$) and NO gas partial pressure (0.1 kPa~1.8 kPa). As results, the specific volume and surface area of bamboo activated carbon impregnated with copper were decreased with increasing Cu amounts of activated carbon. In NO reaction, the reaction rate of Cu impregnated bamboo activated carbon[BA(Cu)] was promoted to compare with that of bamboo activated carbon[BA]. But the reaction rate of Ag impregnated bamboo activated carbon[BA(Ag)] was retarded. Measured reaction orders of NO concentration and activation energy were 0.63[BA], 0.92[BA(Cu)], and 80.5 kJ/mol[BA], 48.5 kJ/mol[BA(Cu)], 66.4 kJ/mol[BA(Ag)], respectively.

Microfabrication of submicron-size hole for potential held emission and near field optical sensor applications (전계방출 및 근접 광센서 응용을 위한 서브 마이크론 aperture의 제작)

  • Lee, J.W.;Park, S.S.;Kim, J.W.;M.Y. Jung;Kim, D.W.
    • Journal of the Korean Vacuum Society
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    • v.9 no.2
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    • pp.99-101
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    • 2000
  • The fabrication of the submicron size hole has been interesting due to the potential application of the near field optical sensor or liquid metal ion source. The 2 micron size dot array was photolithographically patterned. After formation of the V-groove shape by anisotropic KOH etching, dry oxidation at $1000^{\circ}C$ for 600 minutes was followed. In this procedure, the orientation dependent oxide growth was performed to have an etch-mask for dry etching. The reactive ion etching by the inductively coupled plasma (ICP) system was performed in order to etch ~90 nm $SiO_2$ layer at the bottom of the V-groove and to etch the Si at the bottom. The negative ion energy would enhance the anisotropic etching by the $Cl_2$ gas. After etching, the remaining thickness of the oxide on the Si(111) surface was measured to be ~130 nm by scanning electron microscopy. The etched Si aperture can be used for NSOM sensor.

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Development of TANK_GS Model to Consider the Interaction between Surface Water and Groundwater (지표수-지하수 상호흐름을 고려한 TANK_GS 모형의 개발)

  • Lee, Woo-Seok;Chung, Eun-Sung;Kim, Sang-Ug;Lee, Kil-Seong
    • Journal of Korea Water Resources Association
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    • v.43 no.10
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    • pp.893-909
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    • 2010
  • The purpose of this study is to consider the interaction between surface water and groundwater in basin scale by developing TANK_GS model. The soil moisture structure of tank model with 3 tanks is improved to simulate the appropriate stream-aquifer interactions. Maximum likelihood method is applied to calibrate parameters with variance functions to deal with heteroscedasticity of residuals. The parameters of improved TANK_GS model and variance function are simultaneously estimated by Simulated Annealing method, a global optimization technique. The results of TANK-GE are compared to those of the SWMM-GE model which had been developed to consider the stream-aquifer interactions. The new TANK_GS model and SWMM-GE model are applied to Gapcheon basin, which belongs to Geum River basin. TANK_GS model showed better model performance compared to the original TANK model and characterized the relationship of stream-aquifer interactions as satisfactorily as the SWMM-GE model. The sustainable groundwater yield can be estimated for the regional water resources planning using the TANK_GS model