• Journal of the Microelectronics and Packaging Society
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• v.10 no.3
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• pp.57-65
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• 2003

In this study, we carry out reliability tests and investigate the failure mechanisms of the anodically bonded wafer level vacuum packaging (WLVP) MEMS gyroscope sensor. There are three failure mechanisms of WLVP: leakage, permeation and out-gassing. The leakage is caused by small dimension of the leak channel through the bonding interface and internal defects. The larger bonding width and the use of single crystalline silicon can reduce the leak rate. Silicon and glass wafer itself generates a large amount of outgassing including $H_2O$, $C_3H_5$, $CO_2$, and organic gases. Epi-poly wafer generates 10 times larger amount of outgassing than SOI wafer. The sandblasting process in the glass increases outgassing substantially. Outgassing can be minimized by pre-baking of the wafer in the vacuum oven before bonding process. An optimum pre-baking temperature of the wafers would be between $400^{\circ}C$ and $500^{\circ}C$.

• Korean Journal of Mineralogy and Petrology
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• v.36 no.4
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• pp.365-376
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• 2023

Songaksan, formed about 3800 year ago, is one of the tuff rings in the Jeju Island. Mantle xenoliths, spinel peridotites, are enclosed in the Songaksan Trachybasalt. The spinel peridotites are less than 2 cm in size and are composed of olivine, orthopyroxene, clinopyroxene, and spinel. The uniform compositions of the minerals from core to rim indicate that equilibrium was reached in the spinel peridotites before these were enclosed in the host magma. The spinel peridotites originated at depths between 55 and 60 km with equilibrium temperatures ranging from 915 to 968℃. The spinel peridotites from Songaksan reveal porphyroclastic texture with a lot of neoblast minerals. Olivines display strong kink banding, indicating that the upper mantle of Songaksan has been deformed. The spinel peridotites from Songaksan have undergone about 5~7% fractional melting, and cryptic metasomatism by an silicate melt. The period of entrainment and transport of the spinel peridotites in the host magma is about 15 days.

• The Journal of the Petrological Society of Korea
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• v.25 no.1
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• pp.39-50
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• 2016

Negative crystal shaped $CO_2$-rich fluid inclusions, trapped as primary inclusions in neoblasts and as secondary inclusions in porphyroblasts, were studied in spinel peridotite xenoliths from Jeju Island. Based on microthermometric experiments, the solid phase melts at $-57.1^{\circ}C$(${\pm}0.9^{\circ}C$) with no other observable melting events, indicating that the trapped fluid is mostly $CO_2$. The homogenization temperatures show a much wider range from $-39^{\circ}C$(${\rho}=1.12g/cm^{3)}$) to $23^{\circ}C$(${\rho}=0.82g/cm^{3)}$), suggesting that most of the inclusions (originally trapped at mantle conditions) re-equilibrated to lower density values. Nevertheless, the highest density $CO_2$ in our fluid inclusions is consistent with entrapment of fluids at upper mantle pressures (and depths). The calculated trapping pressure from $CO_2$-rich fluid inclusions that appear to be free from re-equilibrium, e.g., showing the lowest homogenization temperatures, is ${\approx}0.9GPa$. Based on the petrographic evidences, the fluid entrapment can be regarded as a late stage event in the evolution of the shallow lithospheric mantle.

• The korean journal of orthodontics
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• v.38 no.4
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• pp.275-282
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• 2008

Objective: The purpose of this study was to investigate the effect of using laser for ceramic bracket bonding of porcelain surfaces and to compare it with conventional treatment of porcelain surfaces. Methods: Ninety feldspathic porcelain specimens were divided into 9 groups of 10, with each group having different surface treatments performed. Surface treatment groups were orthophosphoric acid, orthophosphoric acid with silane, hydrofluoric acid, hydrofluoric acid with silane, sandblasted, sandblasted with silane, laser etched, laser etched with silane, and glazed surface served as a control group. In the laser etched groups, the specimens were irradiated with 2-watt superpulse carbon dioxide ($CO_2$) laser for 20 seconds. Ceramic brackets were bonded with light-cure composite resin and all specimens were stored in water at $37^{\circ}C$ for 24 hours. Shear bond strength was determined in megapascals (MPa) by shear test at 1 mm/minute crosshead speed and the failure pattern was assessed. For statistical analysis, one-way ANOVA and tukey test were used. Results: Statistical analysis showed significant differences between the groups. The HFA + S group showed the highest mean shear bond strength ($13.92{\pm}1.94\;MPa$). This was followed by SB + S ($10.16\;{\pm}\;1.27\;MPa$), HFA ($10.09\;{\pm}\;1.07\;MPa$), L + S ($8.25\;{\pm}\;1.24\;MPa$), L ($7.86\;{\pm}\;0.96\;MPa$), OFA + S ($7.22\;{\pm}\;1.09\;MPa$), SB ($3.41\;{\pm}\;0.37\;MPa$), OFA ($2.81\;{\pm}\;0.37\;MPa$), G ($2.46\;{\pm}\;1.36\;MPa$), Bond failure patterns of HFA and silane groups, except L + S, were cohesive modes in porcelain while adhesive failure was observed in the control group and the rest of the groups. Conclusions : A 2-watt superpulse $CO_2$ laser etching of porcelain surfaces can provide a satisfactory result for porcelain surface treatment for ceramic bracket bonding. Laser irradiation may be an alternative conditioning method for the treatment of porcelain surfaces.