• Proceedings of the Korean Society of Propulsion Engineers Conference
• /
• 2008.05a
• /
• pp.285-288
• /
• 2008

The Present Study describes the numerical investigations concerning a fuel(Hydrogen), inert gas (Nitrogen) or supersonic air stream issued between each other. The basic flow configuration consists of a plane, double shear/mixing layer flow. For the numerical solution, a fully conservative unsteady $2^{nd}$ order time accurate sub-iteration method and a $2^{nd}$ order Total Variation Diminishing(TVD) scheme are used with the finite volume method(FVM). The results are consist of three categories ; single shear layer consist of fuel and supersonic air stream, inert gas stream issued between supersonic air and fuel stream, fuel gas stream issued between supersonic air and fuel stream. The numerical calculations has been carried out in case of 1,2, and 4mm thickness of center stream. The width of total gas stream is 4cm.

• Fire Science and Engineering
• /
• v.28 no.3
• /
• pp.34-42
• /
• 2014

The concentrations of inert gases ($N_2$, Ar, $CO_2$ and He) required to induce the flame instabilities such as swing, rotation, lifted and blow-out were measured in a cup burner nonpremixed flames for $CH_4$ and $C_3H_8$ fuels. Quantitative differences in the extinguishing concentration with fire suppression criteria (i.e. blow-out or onset of flame instability) were also examined. It was found that the difference in extinguishing concentration was increased with the appearance of lifted flame and the low extinguishing performance of inert gaseous. The maximum difference in extinguishing concentration with the suppression criteria was approximately 35% at the highest fuel velocity condition (1.3 cm/s) for the $C_3H_8$-air nonpremixed flame. It can be also expected that the extinguishing concentration by the criteria based on the onset of flame instability will provide the useful information from the viewpoint of the accurate and economical design concentration.

• Proceedings of the Korean Vacuum Society Conference
• /
• 1993.02a
• /
• pp.115-115
• /
• 1993

• Fire Science and Engineering
• /
• v.18 no.3
• /
• pp.9-17
• /
• 2004

The values of physical properties of the inert gases of Ar, $N_2$, $CO_2$ were calculated by the empirical equations. The regression coefficients were obtained by the experimental data and the resulting calculated values. For the empirical equation with a lower regression coefficient, a new correlation was suggested. At an atmosphere pressure, the empirical equation was confirmed by the experimental values for the viscosity, density, saturated pressure, and surface tension of Ar, $N_2$, $CO_2$. The correlation coefficients of the empirical equations proposed in this work was higher than 0.99.

• Journal of the Microelectronics and Packaging Society
• /
• v.5 no.1
• /
• pp.39-44
• /
• 1998

절연체기판으로서는 아루미나 세라믹 기판을 사용하고 전극으로서는 copper를 사용 하여 DBC공정으로 접합하여 제조하였다. 접합재료는 전처리과정을 거친다음 불활성기체 분 위기 하에서 1065~1083$^{\circ}C$의 온도로 1~60분 동안 유지시켜 접합하였다. 본 실험에서 접합 된 세라믹기판과 Cu의 계면의 SEM 관찰 결과 안정된 접합면이 생성되었으며 접합강도는 약 116MPa로 양호한 값을 얻었다. 또한 Al2O3/Copper 접합계면을 ESCA를 통하여 분석한 결과 CuAlO2의 화합물의 생성을 확인하였다. 이 DBC공정은 제조공정의 단순화를 실현시켜 대량생산에 적합함으로 전자부품 모듈생산에 유용하게 적용될 수있을것이다.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.139.1-139.1
• /
• 2014

구연산 전처리 후 진공 중 산화처리를 한 스테인레스강 진공용기에 비증발성 게터(NEG)와 스퍼터 이온펌프의 조합을 사용하여 낮은 10의 -12 mbar의 극고진공에 도달하였다. 실험에 사용된 진공용기의 기체방출률은 기존의 일반 스테인레스강 진공용기에 비해 15배 이상 낮은 것으로 측정되었다. 극고진공에 도달하기 위해 수소에 대한 배기속도가 높은 NEG 펌프를 주 펌프로 사용하였으며 스퍼터 이온펌프는 NEG가 배기하지 못하는 무극성 또는 불활성 기체를 배기하는 보조펌프로 작용하도록 하였다.

• Fire Science and Engineering
• /
• v.17 no.2
• /
• pp.43-49
• /
• 2003

For the inert gases of Ar, $N_2$and $CO_2$, the empirical equations of the gas mixture were correlated in terms of saturated pressure, density and viscosity. They were obtained by regression analysis based on the mixing rule. The empirical equation of saturated pressure was assumed as the first order function of temperature. The empirical form of density was expressed as compressibility factor and saturated pressure while the empirical equation of viscosity was formulated as a power function of temperature. This empirical equations of the physical properties were obtained in the composition of Ar, $N_2$and $CO_2$, 40/50/10(mol. %).

• Journal of the Korean Vacuum Society
• /
• v.11 no.2
• /
• pp.108-112
• /
• 2002

We investigated the secondary electron emission characteristics of MgO layer used as the protecting material in a.c. plasma display panel(a.c.-PDPs) using a pulsed ion beam technique, where the surface charging can be effectively suppressed during the measurement. The measurement of the secondary electron emission coefficients ($\gamma$) on the surface of $SiO_2$ was carried out and then, it was found that the yields were dependent on incident ion energies. In addition, it was clearly demonstrated that the sputtering on MgO surface leads to lower yields, which suggests that the surface plays a key role on the operating conditions, such as life time, fast response, and etc.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.217-217
• /
• 2011

플라즈마를 이용하는 식각 및 증착등의 반도체공정에 있어서 최근에는 기판의 크기가 점차 증가하는 추세에 있다. 이러한 대면적 플라즈마 발생장치 내에서 플라즈마 밀도와 라디칼 농도의 공간적인 특성을 이해하는 것에 대한 중요성이 더해지고 있다. 이를 위해 Langmuir probe와 같은 전기적 접근법에 의한 진단방법이나 광학적 접근법에 의한 진단방법에 대한 연구가 이루어 졌다. 전기적 접근법에 의한 플라즈마의 진단방법은 원리가 간단하고 정확도가 높다는 장점이 있지만 진단 장치에 의한 플라즈마의 간섭이 크고 식각가스의 경우 진단이 어렵다는 단점이 있다. 그에 비해 광학적 진단방법은 플라즈마에 간섭이 많지 않은 방법으로 알려져 있고 레이저 형광법(LIF), 원적외선 레이저 흡수 분광법(IR laser Absorption Spectroscopy), 광량측정법(Actinometry)등이 있다. 이 중 레이저 형광법, 원적외선 레이저 흡수 분광법의 경우, 진단장치가 매우 복잡하고 가격이 비싸다는 단점을 가지고 있다. 반면 광량측정법의 경우 다른 광학적 접근법에 의한 진단방법에 비해 원리와 실험장치가 간단하고 공간적인 라디칼 분포의 진단이 쉽다는 점에서 장점을 가지고 있다. Actinometry는 Ar과 같은 불활성 기체를 작은 비율을 넣어서 여기 된 불활성 기체의 파장세기와 여기 된 측정 라디칼의 파장세기의 비교를 통해 상대밀도를 측정하는 방법이다. 이 측정 방법에 Abel's inversion equation을 적용함으로 해서 대면적 M-ICP(Magnetized - Induced Coupled Plasma)에서 식각가스인 $CF_4$플라즈마에서 F 라디칼 농도의 공간적인 분포를 측정하고 분석하였다. 또한 플라즈마의 압력, 소스 전력 값과 기판 전력 값등의 조건의 변화에 따라 F 라디칼 농도의 분포가 어떻게 달라지는지에 대해 측정 분석하여 다루었다.

• Fire Science and Engineering
• /
• v.17 no.1
• /
• pp.26-32
• /
• 2003

Inert gases, Af, $N_2$, $CO_2$, as a Halon alternative, the empirical equations were correlated in terms of saturated pressure, density and viscosity, They were obtained by regression analysis from the experimental data in the literature. The empirical equations of saturated pressure were expressed as the second and third order function of temperature. The empirical equation for Ar and $N_2$ of density were expressed as the first order function of temperature. And $CO_2$ was expressed as the second and third order function of temperature. The empirical equation of viscosity was formulated as a power function with temperature. This empirical equations would allow us to predict pure component state.