• Journal of the Korean Vacuum Society
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• v.3 no.2
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• pp.173-178
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• 1994

박막성장을 위한 초고진공 응용시스템을 제작하고 이것의 특성을 사중극질량분석계로 측정하였 다. 초고진공 시스템을 박막성장에 활용하기 위해서는 챔버 뿐만 아니라 펌프, 이온게이지, 전자총 등도 베이킹이 요구되었다. 또한 이온게이지와 전자총은 적어도 박막성장 20분전에 탈가스를 하여야함을 알 았다. 이 시스템으로 달성된 진공도는 7x10-11 torr이었다.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.1569-1573
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• 2004

Two ring-type conductance meters were manufactured to measure void fraction and its propagation speed in slug flow. The signal of conductance meter with two rings depends on liquid temperature. Therefore a conductance meter with separated probe designed by Coney (1973), which is independent of liquid temperature, was used and experimentally proved. The manufactured conductance meters showed a good repeatability and agreement with the analytical solution by Coney (1973). From time lag between two conductance meter, we could calculate the propagation speed of void fraction.