• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.214-214
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• 2010

Indium-tin-oxide(ITO)는 평판디스플레이 산업이 성장함에 따라 그 수요는 계속 늘고 있지만 세계적으로 In의 매장량의 한계로 그 단가가 매우 높다. 또한 ITO는 플렉시블 디스플레이에 적용함에 있어서 고온 공정으로 인해 많은 단점을 보이고 있어 이를 대체할 새로운 투명전극의 개발이 활발히 진행되고 있다. 본 연구에서는 IZTO($In_2O_3$:ZnO:$SnO_2$=80:10:10 wt.%)의 In 량을 절감한 조성의 타겟을 제조하였다. 그리고 유리기판 위에 IZTO 박막을 펄스 DC 마그네트론 스퍼터링을 이용하여 증착압력과 활성 산소의 분압을 변화시키며 증착하였다. 증착압력의 변화는 3mTorr~8mTorr 범위에서 제어하였고 활성 산소의 분압은 0%~3% 범위에서 제어하였으며 기판의 온도의 제어 없이 상온에서 증착하였다. 증착한 박막은 전기적, 광학적 및 구조적 특성 등을 조사하였다. 증착압력 6mTorr와 산소분압 2%의 조건에서 비저항은 $5.07{\times}10^{-4}\;({\Omega}{\cdot}cm)$, 캐리어 농도는 $2.96{\times}10^{20}(cm^{-3})$, 이동도는 $41.6(cm^{-2}/Vs)$로 가장 좋은 전기적 특성을 보였다. 박막의 투과율을 측정한 결과 평균 85% (400nm~800nm)이상의 우수한 광학적 특성을 보였다. 또한 이 IZTO 박막을 이용하여 OLED 소자를 제작하여 그 특성을 조사하였다. 조사 결과 플렉시블 디스플레이 분야에서 IZTO 박막은 In 절감효과와 상온 공정에서 우수한 투명전극 특성을 보여 ITO를 대체할 물질로 가능성을 보여주었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.226-226
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• 2013

GaN는 III-V족 물질로 밴드갭이 3.4 eV으로 가시광선 영역에서 투명하며 우수한 전기적 특성으로 인해 여러 반도체 분야에서 응용되고 있는 물질이다. GaN 박막의 성장 방법으로는 molecular beam epitaxial 방법과 metal organic chemical vapor deposition 방법이 있지만 고비용인 단점이 있다. 이에 비해 sputtering 방법으로 성장시킨 GaN 박막은 비용이 적게 들고 저온에서 성장이 가능하다는 장점이 있다. 이 연구에서는 radio frequency sputter를 사용하여 GaN 박막을 성장하여 구조적, 광학적 특성을 분석하였다. GaN 박막은 각각 단일층의 그래핀과 c-축 사파이어 기판에 증착 하였으며, 이때 기판온도는 $25^{\circ}C$, $100^{\circ}C$, $200^{\circ}C$로 변화를 주었고, N2 분압은 2 sccm, 5 sccm, 10 sccm으로 변화를 주었다. 그래핀과 사파이어 기판에 성장된 각각의 GaN 박막의 결정성을 투과전자현미경 이미지로 측정하여 비교하였다. $4{\times}10^{-3}$ Torr 진공도와 50 W의 방전 전력과 Ar 10 sccm 분위기에서 20 min 동안 증착된 GaN 박막 두께는 70 nm정도를 가지는 것으로 확인하였다. X-ray Diffraction 측정으로 사파이어 기판 및 (002) 방향으로 성장된 GaN의 피크를 확인하였다. 추가적으로 Photoluminescence 스펙트럼은 N2 분압의 변화와 yellow luminescence 영향을 받는 것을 확인하였다. 본 연구를 통하여, 증착된 기판온도와 N2 분압의 변화에 따른 그래핀 및 사파이어 기판에 증착된 GaN 박막의 특성을 비교하였으며, sputtering 방법으로 고품질의 GaN 박막을 성장시킬 수 있는 가능성을 확인하였다.

• Journal of the Korean Vacuum Society
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• v.18 no.2
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• pp.141-146
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• 2009

PLZT ferroelectric thin films were deposited on Pt/Ti/$SiO_2$/Si substrate with $TiO_2$ buffer layer in between by rf magnetron sputtering method. In order to investigate the effect of Ar/$O_2$ partial pressure ratio on the ferroelectric properties of PLZT thin films, PLZT thin films were deposited at various Ar/$O_2$ partial pressure ratio ; 27/1.5 seem, 23/5.5 seem, 21/7.5 seem and 19/9.5 seem. The crystallinities of PLZT thin films were analyzed by XRD. The surface morphology was observed using FE-SEM. The P-E hysteresis loops, the remanent polarization characteristics and the leakage current characteristics were obtained using a Precision LC. The crystallinity and elaborateness of PLZT thin films were decreased as increasing the oxygen partial pressure ratio. And preferred orientation of PLZT thin films changed from (110) plane to (111) plane. The oxygen partial pressure ratio affects the thin film surface morphology and the ferroelectric properties.

• Radiation Oncology Journal
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• v.8 no.1
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• pp.1-6
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• 1990

In the present study, a perfluorchemical emulsion (Fluosol-DA $20\%$) did not alter $D_o\;and\;D_q$ values on cell survival curve, indicating that the lack of a direct effect of Fluosol-DA $20\%$ on cellular radiosensitivity in vitro. The effect of Fluosol-DA $20\%$ injection in combination with carbogen breathing was determined on the hypoxic cell fraction in SCK tumors. The hypoxic cell fraction in control SCK tumors was 0.39. This value decreased to 0.05 when the mice were i.v. injected with 12 ml/kg of Fluosol-DA $20\%$ in a carbogen atomosphere. The measured mean and median $PO_2$ values with a microelectrode in the control tumors was 9 mmHg and 4 mmHg, respectively. The treatment of the SCK tumors in the host mice with injected Fluosol-DA $20\%$ in combination with carbogen breathing increased the mean and median $PO_2$ values to 67 mmHg and 62 mmHg, respectively. Using carbogen breathing alone caused a moderate increase of tumor $PO_2$. But Fluosol-DA $20\%$ injection alone caused little change $PO_2$ in the tumor. It was concluded that the combination of Fluosol-DA injection and carbogen breathing is an effective means to improve oxygenation of tumors.

• Journal of the Korean Chemical Society
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• v.36 no.4
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• pp.511-516
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• 1992

The x-values of the nonstoichiometric compound YbO$_x$ have been measured in a temperature range of 600 to 1150$^{\circ}C$ under oxygen partial pressure of 1.00 ${\times}$ 10$^{-2}$ atm∼atmospheric air pressure. The values are varied between 1.55453 and 1.60794 in the conditions. The enthalpy of the formation for x' in YbO$_{1.5＋x'}$(${\Delta}$H$_f$) was 1.55, 1.18, and 1.05 kJ/mol under the above conditions, respectively. The electrical conductivities of the oxides or ${\sigma}$ have been measured in the temperature range from 600 to 1100$^{\circ}C$ under oxygen partial pressure of 1.00 ${\times}$ 10$^{-5}$ ∼ 2.00 ${\times}$ 10$^{-1}$ atm. They varied from 10$^{-9}$ to 10$^{-5}$ ohm$^{-1}$ cm$^{-1}$ within the semiconductor range. The Arrhenius plots of the electrical conductivities show a linearity and the activation energy for the conduction was about 1.7eV. The oxygen partial pressure dependence of the conductivity or 1/n value increases with the pressure. The nonstoichiometric conduction mechanism of the oxide was discussed in terms of the x values, ${\sigma}$ values, and the thermodynamic data.

• Journal of the Korean Vacuum Society
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• v.9 no.3
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• pp.258-262
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• 2000

$YMnO_3$thin films are deposited on Si(100) and $Y_2O_3/Si(100)$ substrate by radio frequency sputtering. The deposition condition of oxygen partial pressure and annealing temperature have significant influences on the preferred orientation of $YMnO_3$film and the size of memory window. The results of x-ray diffraction show that the film deposited in the oxygen partial pressure of 0% is highly oriented along c-axis after annealing at $870^{\circ}C$ for 1 hr in oxygen ambient. However, the films deposited on Si and $Y_2O_3/Si$ in the oxygen partial pressures of 20% show $Y_2O_3$ peak, the excess $Y_2O_3$ in the $YMnO_3$film suppresses the c-axis oriented crystallization. Especially memory windows of the $Pt/YMnO_3/Y_2O_3/Si$ capacitor are 0.67~3.65 V at applied voltage of 2~12 V, which is 3 times higher than that of the film deposited on $Y_2O_3/Si$ in 20% oxygen (0.19~1.21 V) at the same gate voltage because the film deposited in 0% oxygen is well crystallized along c-axis.

• Tuberculosis and Respiratory Diseases
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• v.44 no.2
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• pp.309-320
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• 1997

Background : There are many suggested methods for the indirect determination of anaerobic threshold(AT) using the changes of ventilatory parameters in response to ventilatory load accompanying the increase of blood lactic acid level during exercise and the threshold derived from them is called ventilatory threshold(VT). They include ventilatory equivalent method(VEM), End-tidal $PO_2$ method($PETO_2$). V-slope method(VSM), and respiratory quotient method(RQ). But in the patients with chronic airway obstruction(CAO), the AT determined by ventilatory methods may not reflect true AT because the patients with CAO show inadequate ventilatory response to the increase of blood lactic acid level during excercise. Methods : For the investigation of detection rate and reliability of above four VT determination methods in the patients with CAO, we performed the symptom-limited and maximal incremental exercise test in 17 patients with CAO and 12 normal controls. The incremental workload was 10 W /min in CAO group and 25 W/min in control group. The reliability of VT in each group was investigated by the calculation of Spearman correlation coefficient. Results : The detection rates of VT were 100% by RQ, 91.7% by both VEM and $POETO_2$, and 83.3% by VSM in normal control group, while 94.1% by RQ, 64.7% by VEM and $PETO_2$, and 83.3% by VSM in CAO group. Good correlations were noted among VEM, $POETO_2$, and VSM except RQ in normal control group. But there was no significant correlation except between VEM and $PETO_2$ in CAO group. Conclusions : RQ is very sensitive but crude and VEM is near similar to $PETO_2$. The clinical usefulness of VT determined by ventilatory method might be limited in patients with severe CAO.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2001.06a
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• pp.69-69
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• 2001

• Proceedings of the Petrological Society of Korea Conference
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• 1998.09a
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• pp.29-29
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• 1998

• Proceedings of the Korean Environmental Sciences Society Conference
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• 1994.10a
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• pp.11-12
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• 1994