• Proceedings of the KIEE Conference
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• 1999.07b
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• pp.618-620
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• 1999

웨이퍼내의 온도 균일도를 확보하는 것은 고속열처리공정장비(RTP)에 있어서 입력신호 수집을 통해 달성해야 할 중요한 제어 요소이며, 이러한 온도의 균일도를 향상시키기 위해서는 웨이퍼의 각 지점에 대한 정확한 온도 계측이 필수적으로 선행되어야 한다. 그러나 RTP의 구조적 특징과 동작특성 때문에 정확한 온도계측이 매우 어려운 면이 있다. 온도계측은 주로 고온계를 통해 이루어지는데 대류와 복사 등 여러 가지 원인에 의해서 웨이퍼내에 온도가 불균일하게 되는 경우 한정된 개수의 고온계로 온도 분포를 정확히 추정할 수 없는 한계를 지니고 있다. 본 논문에서는 RTP 공정을 열역학적으로 접근하여 단일점 온도 계측에 의한 전체 온도 분포 추정 기법을 연구하고 이것을 다중점 온도 계측에 의한 온도 분포 추정 기법으로 확장 발전시켜 웨이퍼에 상대적으로 영향을 끼치는 요소 중 예측 불가능하거나 측정 불가능한 요소까지 포함하여 최소의 측정치를 활용하여, 적절한 제어입력 유도에 필요한 형태로 웨이퍼상의 온도계측을 가능하게 하였다.

• Korean Journal of Optics and Photonics
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• v.7 no.4
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• pp.348-356
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• 1996

A mobile CARS spectrometer is constructed to measure the instantaneous temperature of gases, of which software include the quick fit methods and a least square fitting method to obtain temperatures from the spectra. Two quick-fit-methods give smaller variance of temperatures than the least square fitting method even though they consume much shorter time to yield temperatures. The precision and accuracy of CARS temperature is measured in the graphite tube blackbody furnace in reference to a radiation pyrometer. The accuracy of the CARS temperature is $\pm$2% from 1000K to 2400K and the precision is $\pm$35K at 1600K with the most accurate quick-fit-method. As a demonstration of the instantaneous measurement, the spectrometer is applied for measurement of the turbulent combustion at a certain condition. eograms(HS) are made using a relatively small number of synthesized 2D images. The influence of aliasing artifacts caused by insufficient or improper sampling is presented, and a new sampling theory is proposed, which is used to making holographic stereograms. Also, the optical system for extension of viewing distance and viewing zone is proposed. Results of this analysis can be applied to design normal holographic stereograms and computer based holographic stereograms.

• Journal of the Korean Vacuum Society
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• v.12 no.1
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• pp.64-69
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• 2003

Using a high fewer electron beam gun (max. power 20 kW), Gadolinium (Gd, atomic number 64) metal was melted and the temperature distribution of melted surface was measured. With proper optical filters and the adjustment of aperture of lens, the radiation of melted surface was received by a ccd camera and its signal transferred to a computer. The real time monitoring of melted surface with a variation of electron beam Power was Possible and stable operation of electron beam was achieved. It was found that the max. temperature measured by a ccd camera with an assumption of blackbody radiation of melted Gd surface and adaption of Planet's law was above 100~$200^{\circ}C$ compared to that measured by a pyrometer in the same e-beam power.

• Journal of Bio-Environment Control
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• v.28 no.1
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• pp.78-85
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• 2019

This study was designed to examine the performance of an aspirated radiation shield(ARS), which was made at the investigator's lab and characterized by relatively easier making and lower costs based on survey data and reports on errors in its measurements of temperature and relative humidity. The findings were summarized as follows: the ARS and the Jinju weather station made measurements and recorded the range of maximum, average, and minimum temperature at $2.0{\sim}34.1^{\circ}C$, $-6.1{\sim}22.2^{\circ}C$, $-14.0{\sim}15.1^{\circ}C$ and $0.4{\sim}31.5^{\circ}C$, $-5.8{\sim}22.0^{\circ}C$, $-14.1{\sim}16.3^{\circ}C$, respectively. There were no big differences in temperature measurements between the two institutions except that the lowest and highest point of maximum temperature was higher on the campus by $1.6^{\circ}C$ and $2.6^{\circ}C$, respectively. The measurements of ARS were tested against those of a standard thermometer. The results show that the temperature measured by ARS was lower by $-2.0^{\circ}C$ or higher by $1.8^{\circ}C$ than the temperature measured by a standard thermometer. The analysis results of its correlations with a standard thermometer reveal that the coefficient of determination was 0.99. Temperature was compared between fans and no fans, and the results show that maximum, average, and minimum temperature was higher overall with no fans by $0.5{\sim}7.6^{\circ}C$, $0.3{\sim}4.6^{\circ}C$ and $0.5{\sim}3.9^{\circ}C$, respectively. The daily average relative humidity measurements were compared between ARS and the weather station of Jinju, and the results show that the measurements of ARS were a little bit higher than those of the Jinju weather station. The measurements on June 27, July 26 and 29, and August 20 were relatively higher by 5.7%, 5.2%, 9.1%, and 5.8%, respectively, but differences in the monthly average between the two institutions were trivial at 2.0~3.0%. Relative humidity was in the range of -3.98~+7.78% overall based on measurements with ARS and Assman's psychometer. The study analyzed correlations in relative humidity between the measurements of the Jinju weather station and those of Assman's psychometer and found high correlations between them with the coefficient of determination at 0.94 and 0.97, respectively.

• Journal of Space Technology and Applications
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• v.1 no.3
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• pp.356-363
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• 2021

It was common knowledge in textbooks that images acquired using mid-infrared ray were not suitable for measuring temperature near room temperature. But a recent satellite image using a mid-infrared sensor show the possibility that the result measured using the mid-infrared sensor can also measure the temperature near room temperature. In this paper, the possibility and accuracy of extraction room temperature information from satellite images with mid-infrared sensors are reviewed. The mid-infrared satellite image reviewed in this paper showed the temperature of room temperature well, and regarding the reliability as an absolute value of the measured temperature, the effect of the heat transfer amount due to the direct reflection of sunlight on the surface and the effect of the infrared absorption amount absorbed in the atmosphere can be seen as a relatively small or constant value. However, the problem of uncertainty in the radiation coefficient due to physical properties, which is the limit of the non-contact thermometer, remained a problem to be solved.