[ $SiO_2$ ] Film deposited by APCVD using TEOS/$O_2$ for TFT application
(TFT응용을 위한 TEOS/$O_2$ 를 이용한 APCVD 방법의 $SiO_2$ 박막증착)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2005.11a
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- pp.295-296
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- 2005