• 한국결정성장학회지
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• 제8권1호
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• pp.117-123
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• 1998

초크랄스키 실리콘 기판의 뒷면에 형성된 기계적 손상이 미치는 효과에 대하여 고찰하였다. 기계적 손상의 정도는 레이저 여기/극초단파 반사 광전도 감쇠법에 의한 소수반송자 재결합 수명, 광열범위, X-선 단면 측정 및 습식산화/선택적 식각 방법으로 평가하였다. 그 결과, 웨이퍼 뒷면에 가해지는 기계적 손상의 세기가 강할수록 소수반송자 재결합 수명은 짧아지고, 광열 변위의 평균값은 비례적으로 증가하였으며, 손상된 웨이퍼에서 Grade 1의 과잉 광열 변위값을 1로 봤을 때 과잉 광열 변위의 정규화한 상대 정량 비는 Grade 1: Grade 2:Grade 3 = 1:19.6:41이다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 1993년도 추계학술대회논문집; 반도아카데미, 26 Nov. 1993
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• pp.93-97
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• 1993

방진고무는 진동을 방지하여 다른 구조물의 진동전달 차단은 물론, 장비의 수명연장 및 효율을 증가시키기 위한 목적으로 사용되는데 이러한 방진고무 의 동적특성을 일반화하는 것은 어렵기 때문에 방진고무 시편의 동특성 해 석시험 결과치를 기준으로 원하는 성능에 부합하도록 방진고무의 재질을 선 정하고 사양에 의한 엔진마운트를 설계 제작하여야 한다. 이번에 제작한 UEM 엔진마운트는 해상용, 육상용 설비에 적용 가능하며, 특히 해상용에 적 용하고 외부 환경에 의한 부식으로부터 방진고무 및 기자재를 보호하기 위 하여 하우징을 특수재질로 제작하였고, 수직.수평력을 고려하여 큰 하중에 견딜 수 있도록 원추형 형상설계와 강성을 보강하였다. 특히, 원추형 형상으 로 제작하여 하중을 일정하게 분산시키고, 사용 가능한 선형영역을 확대 시 켰으며, Buffer(Steel Bar)를 이용하여 높은 파고 등에 의한 외부 충격량에 따른 큰 변위의 발생으로부터 설비를 보호할 수 있다. 본 논문에서는 물리적 특성이 같은 방진고무를 사용하고, 적층 수만 다르도록 두가지 모델 UEM-155와 UEM-255를 설계 제작하여 수직.수평방향의 정적시험, 동적시 험, 현장 장착시험 등을 수행함으로써 기업에서 요구한 사양에 적합한가를 고찰하였다.

• 대한기계학회논문집A
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• 제25권10호
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• pp.1528-1534
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• 2001

In order to improve Leak-Be(ore-Break methodology, more precisely the crack growth evaluation, a round robin analysis was proposed by the CEA Saclay. The aim of this analysis was to evaluate the crack initiation life, penetration life and shape of through wall crack under cyclic bending loads. The proposed round robin analysis is composed of three main topic; fatigue crack initiation, crack propagation and crack penetration. This paper deals with the first topic, crack initiation in a notched pipe under four point bending. Both elastic-plastic finite element analysis and Neuber's rule were used to estimate the crack initiation life and the finite element models were verified by mesh-refinement, stress distribution and global deflection. In elastic-plastic finite element analysis, crack initiation life was determined by strain amplitude at the notch tip and strain-life curve of the material. In the analytical method, Neuber's rule with the consideration of load history and mean stress effect, was used for the life estimation. The effect of notch tip radius, strain range, cyclic hardening rule were examined in this study. When these results were compared with the experimental ones, the global deformation was a good agreement but the crack initiation cycle was higher than the experimental result.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집A
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• pp.43-48
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• 2000

In this study, a small punch creep(SP-Creep) test using miniaturized specimen$(10{\times}10{\times}0.5mm)$ has been described for the development of the newly semi-destructive creep test method for high temperature structural components such as headers and tubes of boiler turbine casino and rotor and reactor vessel. The SP-Creep testing technique has been applied to 2.25Cr-1Mo(STBA24) steel used widely as boiler tube material and the creep test temperature are varied at $550^{\circ}C{\sim}600^{\circ}C$. The overall deformations of SP-Creep curves are definitely depended with applied load and creep test temperature and show the creep behaviors of three steps like conventional uniaxial creep curves. The steady state creep rate${\delta}_{ss}$ of SP-Creep curve for miniaturized specimen increases with increasing creep temperature, but the exponential value with creep loading is decreased. The activation energy$(Q_{spc})$ during SP-Creep deformation with various test temperatures shows 605.7kJ/mol that is g.eater than 467.4kJ/mol reported in uniaxial creep test. This may be caused by the difference of stress states during creep deformation In two creep test. But from the experimental results, e.g. SP-Creep curve behaviors, the steady state creep rate${\delta}_{ss}$ with creep temperature, and the exponential value(n) with creep loading, it can be summarized that the SP-Creep test may be a useful test method to evaluate the creep properties of the heat resisting material.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 추계학술대회논문집A
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• pp.99-104
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• 2000

This paper describes the high temperature creep characteristics for virgin material of 9Cr1MoVNb steel using small punch creep(SP-Creep) test technique which is developing recently. In addition, the several results of SP-Creep test are compared with that of 2.25Cr- 1Mo steel which is widely used as boiler materials and that of conventional uniaxial creep test. The obtained SP-Creep curves show the creep behaviors of three regimes like that obtained from conventional uniaxial creep test, and SP-Creep properties are definitely depended on applied load and test temperature. The correlation of SP-Creep rate and creep rupture life with applied load has been determined like the correlation between creep rate/rupture life and stress in uniaxial creep test, and also is satisfied with Power law. The creep rupture times of newly 9Cr1MoVNb steel are higher than those of 2.25Cr1Mo steel at the same creep temperature and applied loading condition, and the decrease extent of creep rupture life with loads is very lower compared with 2.25Cr1Mo steel.