• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.92-92
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• 2016

전기방전의 기본적인 특성을 가지고 있는 플라즈마를 이용하여 재료를 가공하는 증착, 식각, 표면처리 공정에 있어서 플라즈마 내의 전자 충돌 반응에 의한 이온, 라디칼의 생성과 재료 표면의 반응을 분석하는 도구로써 분압 측정은 일반적인 화학 조성 분석에 기원한 오랜 역사를 가지고 있다. 1 amu 정도의 분해능을 가지고 있고 크기가 30 cm 정도에 불과한 사중극자 질량 분석기는 적절한 질량 스캔 시간과 넓은 이온 전류 측정 범위를 가지므로 소형 차등 배기 시스템과 조합하면 1 mTorr 영역의 스퍼터링 시스템에서 1 Torr 영역의 PECVD/PEALD 시스템 진단에도 쉽게 적용이 가능하다. Inficon사의 CPM-300과 Pfeiffer사의 Prisma80을 이용한 플라즈마 식각 공정 분석 결과를 보면 동위원소까지 분석이 가능하다. 또한 전자충돌 이온화 에너지를 조절하여 m/q(질량전하비율)가 중첩되는 경우의 해석도 가능하다. 다중 오리피스를 갖는 compact design의 밸브 블록을 이용한 설계에서는 line-of-sight 입사가 불가능하여 이온 전류를 분석할 수 없다는 단점이 있으나 표준 가스를 이용한 정량화 등의 큰 장점들이 있다. 최근 이루어진 연구의 내용으로는 유도 결합 플라즈마 장치에서 전도성 메쉬를 이용한 라디칼 거동 관찰을 위해서 두 대의 CPM-300을 메쉬 전 후에 설치하여 라디칼의 양 변화를 전류 프로브와 같이 사용하여 조사하였다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.4
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• pp.371-376
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• 2012

The experimental test was conducted for a heavy-duty DME bus in JE-05 exhaust gas test mode using a chassis dynamometer, exhaust gas analyzers, and a PM measurement system. The heavy-duty DME bus was not equipped with after-treatment systems such as DOC or DPF. The dynamic behavior, emission characteristics, and fuel economy of the bus were investigated with an 8.0-liter, 6-cylinder conventional diesel engine. The results showed that the dynamic behavior in DME mode was almost the same as in diesel mode. However, there was little difference among the two operation modes for $NO_x$ and CO emissions. THC emissions were lower for DME mode than for diesel mode. Also, the amount of PM emissions was remarkably lower than for the diesel mode because DME contains a greater amount of oxygen than diesel. The data showed that $CO_2$ emissions were almost similar in the two modes but fuel economy (calculated using heating value) was lower for DME mode than for diesel mode.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.8
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• pp.755-760
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• 2010

In this study, we mainly focused on the PM (Particulate Matter) emission characteristics of a diesel engine. To analyze particle behavior in the tail-pipe, particle emission was measured on the engine-out (downstream of turbocharger), each upstream and downstream both of DOC (Diesel Oxidation Catalyst) and DPF (Diesel Particulate Filter). Moreover, particle emission contours on each sampling point were constructed. The reduction efficiency of particle number concentration and mass through the DOC and DPF was studied. Parameters such as EGR (Exhaust Gas Recirculation) and the main injection timing were varied in part load conditions and evaluated using the engine-out emissions. The DMS500 (Differential Mobility Spectrometer) was used as a particle measurement instrument that can measure particle concentrations from 5 nm to 1000 nm. Nano-particles of sizes less than 30 nm were reduced by oxidation or coagulated with solid particles in the tail-pipe and DOC. The DPF has a very high filtration efficiency over all operating conditions except during natural regeneration of DPF.

• Journal of Internet of Things and Convergence
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• v.7 no.3
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• pp.75-80
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• 2021

Since the optimization of the diesel engine for the ship cannot satisfy the NOx emission limit by the method of reducing the NOx emission, it is necessary to reduce the NOx by post-processing the exhaust gas. In this study, we will review the feasibility of designing a binary nozzle and mixing chamber duct for effectively converting the number of elements into NH3 in the oil burner for the SCR catalyst unit integrated duct in the ship under development through the computational heat flow analysis for the velocity distribution and temperature distribution.

• Transactions of the Korean Society of Automotive Engineers
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• v.22 no.3
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• pp.1-11
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• 2014

The aim of this study is to investigate the effect of SCR reactor on the exhaust emissions characteristics in order to develop a urea-SCR aftertreatment system for reducing $NO_x$ emissions. The experiments are conducted by using a flue tube LPG steam boiler with the urea-SCR aftertreatment system. The urea-SCR aftertreatment system utilizes the ammonia converted from 17% aqueous urea solution injected in front of SCR catalyst as a reducing agent for reducing $NO_x$ emissions. The equivalence ratio, urea injection amount, ammonia slip and $NO_x$ conversion efficiency relative to boiler load are applied to discuss the experimental results. In this experiment, the average equivalence ratio is calculated by changing only the fuel consumption rate while the intake air amount is constantly fixed at $25,957.11cm^3/sec$. The average equivalence ratios are 1.38, 1.11, 0.81 and 0.57 when boiler loads are 100, 80, 60 and 40%. The $NO_x$ conversion efficiency is raised with increasing urea injection amount, and $NH_3$ slip is also boosted at the same time. Consequently, the $NO_x$ conversion efficiency relative to boiler load should be examined in combination with urea injection amount and $NH_3$ slip. The results are calculated by 89, 85, 77 and 79% for the boiler loads of 100, 80, 60 and 40%. The appropriate amount of urea injection for the respective boiler load can be not discussed by only $NO_x$ emissions, and should be determined by considering the $NO_x$ conversion efficiency, $NH_3$ slip and reactive activation temperature simultaneously. In this study, the urea amounts of 230, 235, 233 and 231 mg/min are injected at the boiler loads of 100, 80, 60 and 40%, and the final $NH_3$ slips are measured by 8.48, 5.58, 11.97 and 11.34 ppm at the same conditions. THC emission is affected by the SCR reactor under other experimental conditions except 100% engine load, and CO emission at only 40% engine load. The rest of exhaust emissions are not affected by the SCR reactor under all experimental conditions.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.39 no.1
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• pp.1-9
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• 2015

To satisfy stricter $NO_X$ emission regulations for light- and heavy-duty diesel vehicles, a control algorithm needs to be developed based on a selective catalytic reaction (SCR) dynamics model for chemical reactions. This paper presents the development and validation of a SCR dynamics model through test rig experiments and MATLAB simulations. A nonlinear state space model is proposed based on the mass conservation law of chemical reactions in the SCR dynamics model. Experiments were performed on a test rig to evaluate the effects of the $NO_X$ and $NH_3$ concentrations, gas temperature, and space velocity on the $NO_X$ conversion efficiency for the urea-SCR system. The parameter values of the proposed SCR model were identified using the experimental datasets. Finally, a control-oriented model for an SCR system was developed and validated from the experimental data in a MATLAB simulation. The results of this study should contribute toward developing a closed-loop control strategy for $NO_X$ and $NH_3$ slip reduction in the urea-SCR system for an actual engine test bench.

• Proceedings of the Korean Society of Marine Engineers Conference
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• 2011.10a
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• pp.41-41
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• 2011

국제해사기구(IMO)에서2016년에 건조되는 선박부터 Tier III 규제를 예고하고 있다. 이 규 제를 만족하기 위하여 엔진 전처리 기술 및 후처리 기술 개발과 실증 연구가 활발히 진행되고 있다. 이중 SCR(Selective Catalytic Reduction) 반응을 이용한 질소산화물 저감기술이 80% 이상의 Tier III NOx 규제치를 만족할 수 있는 유일한 기술이다. 육상 플랜트에서 실증과 검증이 확보된 SCR 기술의 선박 엔진에 대한 적용을 위해서는 선박의 급격한 운전조건 변화와 엔진에 의한 저주파 진동에 대한 촉매 내구성 확보가 중요하다. 본 연구에서 기공 분포면에서 마이크로 기공보다는 메죠 및 매크로 기공쪽으로 구조를 개선함으로써 촉매 사용시 우려되는 배기가스중의 Soot 또는 2차 합성물질에 의한 촉매기공 막힘을 최대한 방지한 상용 SCR 촉매를 개발하였다. 또한 촉매에 대한 내구성 실증을 위하여 현재 운항 선박(한진피츠버그호)에 장착하여 실증 실험을 수행하였다. 기존 corrugate 타입의 촉매보다 40% 정도의 부피 감소와 차압 감소를 달성하였고 이로 인하여 선박내 제한된 공간에 효율적으로 SCR 시스템 설치가 가능할 것으로 생각된다. 그리고 본 연구에서는 가이드 베인 설치 없이 유동 균일화를 달성하여 반응기 전체의 크기 축소가 가능하다. 이는 추가적인 비용 및 압력 손실 저감, 유지 보수 공간 확보 등의 장점이 있다.

• Clean Technology
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• v.28 no.2
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• pp.131-137
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• 2022

The semiconductor process currently emits various by-products and unused gases. Emissions containing pollutants are generally classified into categories such as organic, acid, alkali, thermal, and cabinet exhaust. They are discharged after treatment in an atmospheric prevention facility suitable for each exhaust type. The main components of organic exhaust are volatile organic compounds (VOC), which is a generic term for oxygen-containing hydrocarbons, sulfur-containing hydrocarbons, and volatile hydrocarbons, while the main components of alkali exhaust include ammonia and tetramethylammonium hydroxide. The purpose of this study was to determine the combustion characteristics and analyze the NO_X reduction rate by maintaining a direct combustion and temperature to process organic and alkaline exhaust gases simultaneously. Acetone, isopropyl alcohol (IPA), and propylene glycol methyl ether acetate (PGMEA) were used as VOCs and ammonia was used as an alkali exhaust material. Independent and VOC-ammonia mixture combustion tests were conducted for each material. The combustion tests for the VOCs confirmed that complete combustion occurred at an equivalence ratio of 1.4. In the ammonia combustion test, the NO_X concentration decreased at a lower equivalence ratio. In the co-combustion of VOC and ammonia, NO was dominant in the NO_X emission while NO₂ was detected at approximately 10 ppm. Overall, the concentration of nitrogen oxide decreased due to the activation of the oxidation reaction as the reaction temperature increased. On the other hand, the concentration of carbon dioxide increased. Flameless combustion with an electric heat source achieved successful combustion of VOC and ammonia. This technology is expected to have advantages in cost and compactness compared to existing organic and alkaline treatment systems applied separately.

• Transactions of the Korean Society of Automotive Engineers
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• v.18 no.5
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• pp.124-129
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• 2010

The direct injection (DI) diesel engine has become a prime candidate for future transportation needs because of its high thermal efficiency. However, nitrogen oxides (NOx) increase in the local high temperature regions and particulate matter (PM) increases in the diffusion flame region within diesel combustion. Therefore, the demand for developing hybrid system consist of exhaust gas recirculation (EGR) and aftertreatment system as well as diesel particulate filter (DPF) or lean NOx trap (LNT) should be applied. The variation of EGR rate due to the malfunction of EGR valve can affect not only the combustion stability of engine but also the performance of aftertreatment system. In this research, 2.0 liter 4-cylinder turbocharged diesel engine was used to investigate the combustion and emission characteristics for various operating conditions with EGR. While the fuel consumption was increased with increase of EGR rate, NOx emission was improved by maximum 90% at low speed, low load operating condition. To achieve combustion stability and reliability of aftertrearment system with minimum penalty in fuel consumption and emissions, the fault diagnosis of EGR malfunction must be employed.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.9
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• pp.3465-3471
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• 2010

In this paper, we propose assistant device system based on camera that can perform general mouse function for the physically disabled. Most disabled people use special hardware and rely largely on foreign-made assistance device and the using rate of assistance device was very low because of high price. To solve this problem, we propose effective system based on web camera that can perform general mouse function and can raise accessibility for the physically disabled. In the proposed method, we firstly attach color marker on arbitrary device or body parts and then input the information of color using camera and extract coordinate information of color marker and finally, match processing information(coordinate) to special event(keyboard, mouse) and control various applications. The proposed method shows good performance in price and performance compared with other techniques by real field test.