• Clean Technology
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• v.28 no.2
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• pp.131-137
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• 2022

The semiconductor process currently emits various by-products and unused gases. Emissions containing pollutants are generally classified into categories such as organic, acid, alkali, thermal, and cabinet exhaust. They are discharged after treatment in an atmospheric prevention facility suitable for each exhaust type. The main components of organic exhaust are volatile organic compounds (VOC), which is a generic term for oxygen-containing hydrocarbons, sulfur-containing hydrocarbons, and volatile hydrocarbons, while the main components of alkali exhaust include ammonia and tetramethylammonium hydroxide. The purpose of this study was to determine the combustion characteristics and analyze the NO_X reduction rate by maintaining a direct combustion and temperature to process organic and alkaline exhaust gases simultaneously. Acetone, isopropyl alcohol (IPA), and propylene glycol methyl ether acetate (PGMEA) were used as VOCs and ammonia was used as an alkali exhaust material. Independent and VOC-ammonia mixture combustion tests were conducted for each material. The combustion tests for the VOCs confirmed that complete combustion occurred at an equivalence ratio of 1.4. In the ammonia combustion test, the NO_X concentration decreased at a lower equivalence ratio. In the co-combustion of VOC and ammonia, NO was dominant in the NO_X emission while NO₂ was detected at approximately 10 ppm. Overall, the concentration of nitrogen oxide decreased due to the activation of the oxidation reaction as the reaction temperature increased. On the other hand, the concentration of carbon dioxide increased. Flameless combustion with an electric heat source achieved successful combustion of VOC and ammonia. This technology is expected to have advantages in cost and compactness compared to existing organic and alkaline treatment systems applied separately.

• 기계와재료
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• v.24 no.2
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• pp.18-26
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• 2012

지구 환경오염문제가 대두되면서 세계 각국에서는 환경오염을 최소화하려는 움직임이 활발히 이루어지고 있다. 국제해사기구(IMO)에서는 해양 대기오염의 상당량이 선박에서 배출되는 배기가스에 의한 것으로 판단하고 있으며, 이에 따라 선진국을 중심으로 선박관련 환경규제 및 선박 배기가스 배출기준을 점차적으로 강화해 가고 있고, 친환경 선박 및 기자재 개발을 적극적으로 진행하고 있다. 현재 선박에 적용 가능한 NOx 제거장치로는 ECR(Exhaust Gas Recirculation), SCR(Selective, Catalytic Reduction), SAM(Scavenge Air Moistening) 등이 개발되었으며, 연소온도 조절 및 촉매 환원반응 등을 이용하여 NOx를 제거하고 있다. 현재 개발된 탈질설비 중 현실적으로 가장 적합한 것은 SCR시스템으로 인식되고 있으나, 연료효율 감소로 인하여 가스연료를 이용하거나 새로운 연료개발 등 사용연료에 변화를 주는 방법들이 미래의 대안으로 제시되고 있다.

• Journal of Advanced Marine Engineering and Technology
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• v.36 no.6
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• pp.774-779
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• 2012

MILD (Moderate and Intense Low Oxygen Dilution) combustion is a technology that uses the recirculation of combustion gas to increase thermal efficiency not only by keeping down the concentration of Nitric Oxides and temperature but also by uniformizing the internal temperature of the combustion furnace. This study is a trial to obtain MILD combustion characteristics by adjusting the equivalence ratio with the air flow rate in the conical combustor while keeping the fuel flow rate and measuring the exhaust gas of the combustion furnace.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.22 no.2
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• pp.205-212
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• 1998

Experiments were conducted to investigate the temperature profile and the emissions conversion efficiency of catalytic converters for natural gas vehicles. Two types of the catalyst structure and several transient engine operating conditions were used. The dual-bed catalyst effectively reduced the emissions in a transient period due to the low heat capacity of the front bed. The lanthanoid additives were effective in improving catalyst durability. When the natural gas fueled engine were operated outside of a very narrow window of excess air ratio (from 0.993 to 1.004), the HC and NOx conversion efficiency dropped off. The drop-off were especially fast on the lean side of the window.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.52-52
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• 2000

저진공 펌프 제작시 ISO, AVS 등의 국제규격에 ？춤은 필수이고, 도달진공도, 압력구간별·가스별 배기속도, 소음, 기름증기 역류, 압축비 등이 이에 해당된다. 큰 체적의 시험용기가 구비되어 있지 않은 경우에는 배기감압법 대신 일정유량 Q를 흘려 시험용기내에 일정압력 P를 유지시키면서 배기속도를 S=Q/P식으로 구하는 일정압력법을 사용한다. 이 실험은 800~2000 l/min급 유회전 펌프와 드라이 펌프로 압력별 배기속도를 측정, 분석하여 평가방법을 수립하였다. 또 국가 유량 표준기인 sonic nozzle을 reference로 하여, 기존의 유량측정 장비와의 오차를 비교하였다. 온도 상승도를 측정, 압력과의 상관관계를 비교하였고, 오차가 적은 CDG(1, 10, 100torr)를 사용하여, 압력측정의 정확도를 높였다. 비교적 outgassing이 적은 SUS 재질의 chamber를 썼고, 유량조절 장치로 미세누출밸브를 사용하였다.

• Journal of Korean Society of Environmental Engineers
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• v.27 no.3
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• pp.330-336
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• 2005

The ozone injection method was proposed to improve the catalytic process for the removal of nitrogen oxides ($NO_x$). Nitric oxide (NO) in the exhaust gas was first oxidized to nitrogen dioxide ($NO_2$) by ozone produced by dielectric barrier discharge, and then the exhaust gas containing the mixture of NO and $NO_2$ was directed to the catalytic reactor where both NO and $NO_2$ were reduced to $N_2$ in the presence of ammonia as the reducing agent. A commercially available $V_2O_5-WO_3/TiO_2$ catalyst was used as the catalytic reactor. The $NO_2$ content in the mixture of NO and $NO_2$ was changed by the amount of ozone added the exhaust gas. The effect of reaction temperature, initial $NO_x$ concentration, feed gas flow rate, and ammonia concentration on the removal of $NO_x$ at various $NO_2$ contents was examined and discussed. The increase in the content of $NO_2$ by the ozone injection remarkably improved the performance of the catalytic reactor, especially at low temperatures. The present ozone injection method appears to be promising for the improvement of the catalytic reduction of $NO_x$.

• Clean Technology
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• v.26 no.1
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• pp.22-29
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• 2020

Recently, as the fine dust is increased and the emission regulations of diesel engines have been tightened, interest in diesel soot filtration devices has rapidly increased. There is specifically a demand for the technological development of higher diesel exhaust gas after-treatment device efficiency. As part of this, many studies were conducted to increase exhaust gas treatment efficiency by improving the flow uniformity of the exhaust gas in the diesel particulate filter (DPF) and reducing the pressure drop between the inlet and the outlet of DPF. In this study, the effects of pressure drop by the flow rate and temperature of exhaust gas, DPF I/O ratio, Ash, and PM amount in diesel reduction device were simulated via a 12" diameter DPF and diesel oxidation catalyst (DOC) using ANSYS Fluent. As the flow rate and temperature decreased, the pressure drop decreased, whereas the PM amount affected the pressure drop more than the ash amount and the pressure drop was lower in anisotropic DPF than isotropic DPF. In the case of DPF flow uniformity, it was constant regardless of the various variables of DPF. In ESC and ETC conditions, the filtration efficiency for PM was similar regardless of anisotropic and isotropic DPF, but the filtration efficiency for PN (particle number) was higher in anisotropic DPF than isotropic DPF.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.40 no.2
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• pp.69-73
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• 2016

Recently, automotive engineers have paid much attention to waste heat recovery technology as a possible means to improve the thermal efficiency of an automotive engine. A large displacement gasoline engine is generally a V-type engine. It is not cost effective to install two superheaters at each exhaust manifold for the heat recovery purposes. A single superheater could be installed as close to the exhaust manifold as possible for the higher recovery efficiency; however, only half of exhaust gas can be used for heat recovery. On the contrary, the exhaust temperature is decreased for the case where the superheater is installed at a junction of two exhaust tail pipes. With the fact in mind, the optimum position of a single superheater was investigated using simulation models developed from a commercial software package (i.e. AMESim). It was found that installing the superheater near the exhaust manifold could recover 3.8 kW more from the engine exhaust despite utilizing only half of the exhaust mass flow. Based on this result, the optimum layout of an automotive waste heat recovery system was developed and proposed in this paper.

• Journal of Advanced Marine Engineering and Technology
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• v.39 no.7
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• pp.765-772
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• 2015

In this research, the characteristics of SOFC/GT (Solid Oxide Fuel Cell/Gas Turbine) system temperature, stack power and system efficiency for flow rates of air, CH4 and water supplied to SOFC stack have been investigated. The temperature of the gas supplied to cathode and anode of SOFC stack in the SOFC/GT system are maintained by utilizing exhaust gas without the addition of external heat source. As a result, within the scope of this study, temperatures of gas supplied to cathode and anode of SOFC stack were maintained at 1000 (K) by utilizing the exhaust gas of the SOFC/GT system without the addition of external heat source. The system efficiency is increased with increase of air flow rate supplied to the stack and with decrease of $CH_4$ flow rate supplied to the stack. In addition, it can be found that the flow rate of the exhaust gas supplied to the turbine had a significant effect on the system efficiency. And the efficiencies of SOFC stack and SOFC/GT system depending upon various operating conditions of the SOFC/GT system is 51~57% and 57~73%, respectively.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.11a
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• pp.411-415
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• 2008

This paper presents on design factor considered in an altitude test cell facility to determine the best sizing to optimize exhaust diffuser pressure recovery and the exact cooling load required to be supplied under transient operation. Engine simulation was performed to analyse the exhaust gas temperature, exit mass flow rate, specific fuel consumption and exhaust velocity helpful in determining secondary mass air flow and the mixed air temperature entering the ejector. based on this, the amount of cooling load was deduced. It was found that improved pressure recovery reduces operational cost(air supply facility, cooling water).