• 제목/요약/키워드: 방전플라즈마소결

검색결과 143건 처리시간 0.158초

방전플라즈마 소결법에 의해 제조된 Cu 타겟과 스퍼터링 박막의 특성평가 (Evaluation of the Cu Target Fabricated by the SPS Technique and its Sputtered Film)

  • 현혜영;김민정;유정호;양준모;오익현;이승민;오용준
    • 대한금속재료학회지
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    • 제49권3호
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    • pp.250-255
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    • 2011
  • The basic properties and electrical characteristics of sputtering films deposited with a commercial cast target and Spark Plasma Sintering (SPS) were compared and analyzed. From the results, the Cu film prepared heating $60^{\circ}C/min$ (SPS process) showed a similar specific resistance compared to the commercial cast Cu film. Also, auording to the results of XRD, SIMS, and TEM. There was not much difference in the crystal structure and impurities between the two films. Consequently, the SPS Cu target was found to have quite similar properties with the commercial one and it is expected to be applied in futare research to the metal wiring material for semiconductor/display devices.

방전플라즈마 소결 공정을 이용한 WC-Co-B4C 소재의 기계적 특성평가 (Mechanical Property Evaluation of WC-Co-B4C Hard Materials by a Spark Plasma Sintering Process)

  • 이정한;박현국
    • 한국재료학회지
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    • 제31권7호
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    • pp.397-402
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    • 2021
  • In this study, binderless-WC, WC-6 wt%Co, WC-6wt% 1 and 2.5 B4C materials are fabricated by spark plasma sintering process (SPS process). Each fabricated WC material is almost completely dense, with a relative density up to 99.5 % after the simultaneous application of pressure of 60 MPa. The WC added Co and Co-B4C materials resulted in crystalline growth. The WC with HCP crystal structure has respective interfacial energy (basal facet direction: 1.07 ~ 1.34 J·m-2, prismatic direction: 1.43 ~ 3.02 J·m-2) that depends on the grain growth direction. It is confirmed that the continuous grain growth, biased by the basal facet, which has relatively low energy, is promoted at the WC/Co interface. As abnormal grain growth takes place, the grain size increases more than twice from 0.37 to 0.8 um. It is found through analysis that the hardness property also greatly decreases from about 2661.4 to 1721.4 kg/mm2, along with the grain growth.

방전 플라즈마 소결법을 이용한 Al-Ni-Co-Y 벌크 비정질 합금의 제조 (Synthesis of Al-Ni-Co-Y Bulk Metallic Glass fabricated by Spark Plasma Sintering)

  • 이정표;이진규
    • 한국분말재료학회지
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    • 제30권1호
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    • pp.41-46
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    • 2023
  • In this study, an Al82Ni7Co3Y8 (at%) bulk metallic glass is fabricated using gas-atomized Al82Ni7Co3Y8 metallic glass powder and subsequent spark plasma sintering (SPS). The effect of powder size on the consolidation of bulk metallic glass is considered by dividing it into 5 ㎛ or less and 20-45 ㎛. The sintered Al82Ni7Co3Y8 bulk metallic glasses exhibit crystallization behavior and crystallization enthalpy similar to those of the Al82Ni7Co3Y8 powder with 5 ㎛ or less and it is confirmed that no crystallization occurred during the sintering process. From these results, we conclude that the Z-position-controlled spark plasma sintering process, using superplastic deformation by viscous flow in the supercooled liquid-phase region of amorphous powder, is an effective process for manufacturing bulk metallic glass.

방전 플라즈마 소결로 제조된 나노결정 Fe-7wt.%Mn 합금의 오스테나이트 안정성에 미치는 Mo 첨가 효과 (Effect of Mo Addition on the Austenite Stability of Nanocrystalline Fe-7wt.%Mn Alloy Fabricated by Spark Plasma Sintering)

  • 신우철;손승배;정재길;이석재
    • 한국분말재료학회지
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    • 제29권6호
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    • pp.517-522
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    • 2022
  • We investigate the austenite stability in nanocrystalline Fe-7%Mn-X%Mo (X = 0, 1, and 2) alloys fabricated by spark plasma sintering. Mo is known as a ferrite stabilizing element, whereas Mn is an austenite stabilizing element, and many studies have focused on the effect of Mn addition on austenite stability. Herein, the volume fraction of austenite in nanocrystalline Fe-7%Mn alloys with different Mo contents is measured using X-ray diffraction. Using a disk compressive test, austenite in Fe-Mn-Mo alloys is confirmed to transform into strain-induced martensite during plastic deformation by a disk d. The variation in austenite stability in response to the addition of Mo is quantitatively evaluated by comparing the k-parameters of the kinetic equation for the strain-induced martensite transformation.

방전플라즈마 소결법으로 제조된 Bismuth Antimony Telluride의 소결온도에 따른 열전특성 (Effect of Sintering Temperature on the Thermoelectric Properties of Bismuth Antimony Telluride Prepared by Spark Plasma Sintering)

  • 이경석;서성호;진상현;유봉영;정영근
    • 한국재료학회지
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    • 제22권6호
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    • pp.280-284
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    • 2012
  • Bismuth antimony telluride (BiSbTe) thermoelectric materials were successfully prepared by a spark plasma sintering process. Crystalline BiSbTe ingots were crushed into small pieces and then attrition milled into fine powders of about 300 nm ~ 2${\mu}m$ size under argon gas. Spark plasma sintering was applied on the BiSbTe powders at 240, 320, and $380^{\circ}C$, respectively, under a pressure of 40 MPa in vacuum. The heating rate was $50^{\circ}C$/min and the holding time at the sintering temperature was 10 min. At all sintering temperatures, high density bulk BiSbTe was successfully obtained. The XRD patterns verify that all samples were well matched with the $Bi_{0.5}Sb_{1.5}Te_{3}$. Seebeck coefficient (S), electric conductivity (${\sigma}$) and thermal conductivity (k) were evaluated in a temperature range of $25{\sim}300^{\circ}C$. The thermoelectric properties of BiSbTe were evaluated by the thermoelectric figure of merit, ZT (ZT = $S^2{\sigma}T$/k). The grain size and electric conductivity of sintered BiSbTe increased as the sintering temperature increased but the thermal conductivity was similar at all sintering temperatures. Grain growth reduced the carrier concentration, because grain growth reduced the grain boundaries, which serve as acceptors. Meanwhile, the carrier mobility was greatly increased and the electric conductivity was also improved. Consequentially, the grains grew with increasing sintering temperature and the figure of merit was improved.

자기펄스 성형 및 방전 플라즈마 소결 공정으로 제조한 텅스텐 소결체의 특성 (Fabrication and Properties of Densified Tungsten by Magnetic Pulse Compaction and Spark Plasma Sintering)

  • 이의선;변종민;정영근;오승탁
    • 한국재료학회지
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    • 제30권6호
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    • pp.321-325
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    • 2020
  • The present study demonstrates the effect of magnetic pulse compaction and spark plasma sintering on the microstructure and mechanical property of a sintered W body. The relative density of green specimens prepared by magnetic pulse compaction increases with increase in applied pressure, but when the applied pressure is 3.4 GPa or more, some cracks in the specimen are observed. The pressureless-sintered W shows neck growth between W particles, but there are still many pores. The sintered body fabricated by spark plasma sintering exhibits a relative density of above 90 %, and the specimen sintered at 1,600 ℃ after magnetic pulse compaction shows the highest density, with a relative density of 93.6 %. Compared to the specimen for which the W powder is directly sintered, the specimen sintered after magnetic pulse compaction shows a smaller crystal grain size, which is explained by the reduced W particle size and microstructure homogenization during the magnetic pulse compaction process. Sintering at 1,600 ℃ led to the largest Vickers hardness value, but the value is slightly lower than that of the conventional W sintered body, which is attributed mainly to the increased grain size and low sintering density.

방전 플라즈마 소결법에 의한 ZnS 나노입자의 소결과 광학적 특성 (Sintering and Optical Properties of ZnS Nanoparticles Sintered by Spark Plasma Sintering)

  • 김창일;김유비;여서영;홍연우;윤지선;박운익;정영훈;조정호;백종후
    • 한국전기전자재료학회논문지
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    • 제30권6호
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    • pp.349-355
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    • 2017
  • Zinc sulphide (ZnS) nanoparticles were fabricated by hydrothermal synthesis at $180^{\circ}C$ for 12 h. Two kinds of ZnS powder (hydrothermal synthesized ZnS and commercial ZnS) were investigated by X-ray diffraction (XRD) and scanning electron microscopy (SEM) for phase and microstructure, respectively. The XRD patterns showed that all ZnS nanoparticles have a sphalerite (cubic) structure. The nanoparticles of two different ZnS powders were sintered by spark plasma sintering. The sintered ZnS were analyzed by XRD, SEM, and FT-IR. We found that the transmittance of the infrared region is highly dependent on the density and crystal structure of sintered ZnS and the purity of the starting ZnS powder.

기계적 합금화된 Ni-36at.%Al 합금의 상변태에 미치는 결정립 크기 및 냉각속도의 영향 (The Effect of Grain Size and Cooling Rate on Phase Transformation for Mechanically Alloyed Ni-36at.%Al Alloy)

  • 김성욱;김대건;김지순;안인섭;김영도
    • 한국재료학회지
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    • 제10권9호
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    • pp.642-647
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    • 2000
  • Ni-36at.%Al을 함유하는 나도 결정립의 NiAl 합금이 기계적 합금화법에 의해 제조되었다. 제조된 분말은 방전 플라즈마 소결법에 의해 만들어졌다. 상변테에 영향을 주는 인자는 냉각속도와 열처리 시간의 조건으로 논의되었다. 소결체의 상변태 거동은 시차 열분석(DSC)과 X-선 회절(XRD) 분석법에 의해 조사되었다. 미세구조는 주사전자현미경(SEM)으로 관찰되었다. 마르텐사이트 격사상수와 체적 분율은 X-선 회절분석법 중 직접비교법에 의해 계산되었다.

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다이아몬드전착 밴드쏘우장비를 이용한 고치밀도 알루미나소결체의 다이싱가공 성능평가 (Performance Evaluation of Dicing Sawing of High-densified Al2O3 Bulk using Diamond Electroplated Band-saw Machine)

  • 이용문;박영찬;김동현;이만영;강명창
    • 한국기계가공학회지
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    • 제16권6호
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    • pp.1-6
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    • 2017
  • Recently, the brittle materials such as ceramics, glass, sapphire and textile material have been widely used in semiconductors, aerospace and automobile owing to high functional characteristics. On the other hand, it has the characteristics of difficult-to-cut material relative to all materials. In this study, diamond electro-deposited band-saw machine was developed to operate stably using water-coolant type through relative motion between band-saw tool and $Al_2O_3$ material. High densified $Al_2O_3$ material was manufactured by spark plasma sintering method. The bulk density was observed by the Archimedes law and the theoretical density was estimated to be $3.88g/cm^3$ and its hardness 14.7 MPa. From the dicing sawing test of $Al_2O_3$ specimen, behavior of surface roughness and band-saw wear are dominantly affected by the increase of the band-saw linear velocity. Additionally, an continuous pattern type of diamond band-saw was a very effective due to entry impact as a one-off for brittle material.

방전플라즈마 소결법에 의한 탄화 붕소 세라믹스의 소결 거동 및 기계적 특성 (Sintering Behavior and Mechanical Property of B4C Ceramics Fabricated by Spark Plasma Sintering)

  • 김경훈;채재홍;박주석;김대근;심광보;이병하
    • 한국세라믹학회지
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    • 제45권1호
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    • pp.60-64
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    • 2008
  • [ $B_4C$ ] ceramics were fabricated by spark plasma sintering process and their sintering behavior, microstructure and mechanical properties were evaluated. Relative density of $B_4C$ ceramics could be achieved by spark plasma sintering method reached as high as 99% at lower temperature than conventional sintering method, in addition, without any sintering additives. The mechanical properties of $B_4C$ ceramics could be improved by the heat treatment at $1300^{\circ}C$ during sintering process which can be removed $B_2O_3$ phase from a $B_4C$ powder surface. This improvement results from the formation of a fine and homogeneous microstructure because the grain coarsening was suppressed by the elimination of $B_2O_3$ phase. Particularly, mechanical properties of the specimen experienced the $B_2O_3$ removing process improved over 30% compared with the specimen without that process.