• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.492-492
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• 2013

반도체 공정을 위한 원격 유도 결합 플라즈마(remote ICP)에서 플라즈마 균일도를 향상하는 연구를 진행하였다. 본 연구에서는고 균일도 플라즈마 발생을 위해 단면적이 다른 2개의 반응 용기를 상부와 하부에 설치하였으며, 각각의 반응 용기 외곽에 방전 코일이 위치하도록 구성하였다. 상부의 반응 용기는 외곽에 유도 코일을 권선하였고, 하부의 반응 용기는 고밀도의 플라즈마 생성을 위해 강자성체를 이용하여 권선하였으며, 강자성체는 쿼츠관을 둘러 싼 구조로 되어 있다. 0.5-1 Torr 공정 압력 범위의 아르곤 기체에서 전체 2500 W의 전력을 인가하였고, 임피던스 정합회로로부터 각각 병렬로 연결된 방전 코일에 전력이 분배되어 인가되는 구조로 설계하였다. 반도체 공정을 위한 플라즈마 균일도를 분석하기 위해 wafer의 위치에서 부유 탐침법을 적용하여 wafer 중심부로부터 반경 방향으로 위치를 변화시키며 플라즈마 밀도와 전자온도를 측정하였다. 동일한 공정 조건에서 하부에 강자성체를 사용하여 권선한 이중 구조의 경우 하나의 방전 코일을 이용한 구조 대비 플라즈마 밀도가 증가하였고, 플라즈마 균일도가 크게 향상됨을 보였다. 강자성체를 이용한 하부 코일에 의해 wafer 외곽 부분의 밀도가 높은 분포를 갖는 플라즈마가 형성되고, 상부의 유도코일에 의해 wafer 중심부에 밀도가 높은 플라즈마가 형성되어 wafer의 플라즈마 균일도가 개선된다. 또한, 강자성체를 이용한 하부 코일에 의해 고밀도의 플라즈마가 형성되므로 반도체 공정을 위한 장비에서 플라즈마 균일도의 개선과 밀도의 향상으로 대면적 Dry Strip 공정 (450mm)에 적용 가능하다.

• The Transactions of the Korean Institute of Power Electronics
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• v.6 no.5
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• pp.460-466
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• 2001

The oxidizing power of ozone is the greatest of all commercially available oxidizers and thus ozone is taking the place of chlorine for water treatment. For energy-effective treatment of water, ozone should be generated in high concentration. A silent glow discharge ozonizer is high effective in industrial aspect and thus is the most widely used. We found that the key parameters associated with the ozone generation rate are the driving voltage of the discharger, the discharge rate and the temperature of the ozone generation tube. For an easy control of these parameters, we build a monitoring system with graphical user interface. This system is based on Windows-98 PC, programmed with C++ and LabView.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.05a
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• pp.75-78
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• 2007

Recently, the need for micro mold or micro mechanical parts has been rapidly increased. As feature size decreases, conventional machining processes show their limitation. Micro electrical discharging machining (EDM) and electrochemical machining (ECM) have many advantages in micro machining. They can be used to make structures of micro scale, or even nano scale size. In this paper, the application of micro EDM and ECM has been investigated.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 1996.11a
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• pp.53-56
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• 1996

In this paper, the pulsed mode operated gas discharge tube is composed with mixed gas of Hg-Ne (10 Torr), in the tube of 15.0 mm outer diameter and has variable color from red to blue with changing frequency high voltage. As increasing frequency in the gas discharge tube, the phenomena, that the electron temperature in the positive column increases and the radiation from atoms of higher upper state energy levels increases, exist The color have the locus from red (0.4972, 0.3128) to blue (0.2736, 0.2619) in CIE chromacity diagram with increasing frequency. The method of changing frequency has been shown to be suitable for the luminous color control.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1724-1726
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• 2002

A novel ozonizer has been developed using a high-frequency surface discharge and a high purity alumina ceramic as its dielectric component. A thin ceramic layer, cylindrical in form, is adhered by a film-like induction electrode. An ac exciting voltage of frequency to 0.6 kHz from 1.0 kHz and $6{\sim}9kV$ peak-to-peak is applied between the electrodes to produce a stable high-frequency silent discharge for generation of ozone. A substantial reduction of the exciting voltage is also enabled by using a thin alumina ceramic layer. As a result, the ozonizer can easily produce ozone concentration($128g/m^2$ for oxygen) and power efficiency(360g/kWh for oxygen) without using a special enrichment means.

• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.1063-1065
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• 1999

Recently the ozone generation system is well used for cleaning the contaminated water by using the strong oxidization effects. Accordingly, with the purpose of improving ozone yield at the peak of ozone concentration, this paper describes the stracture and characteristics of ozonizer, and focused on the development of a 3E-3G discharge tube.

• Proceedings of the KIPE Conference
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• 2007.07a
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• pp.190-192
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• 2007

LCD TV의 대형화에 따라 하나의 백라이트용 냉음극 방전램프(Cold Cathode Fluorescent Lamp ; CCFL)를 이용한 백라이트는 휘도의 한계가 있어 대형 디스플레이에서는 여러 개의 램프를 사용하여 필요한 휘도를 만들고 있다. 본 논문에서는 냉음극 방전램프 16개를 사용하는 42인치 LCD TV용 대형 백라이트 구동을 위한 인버터의 트랜스포머를 각기 다른 램프의 특성에 대해 동일한 관 전류 출력을 갖도록 설계하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.7
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• pp.634-640
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• 2003

This paper is to be researched into ozone generation character of Bi-Ti-Si type high dielectric yield ceramic catalyst discharge tube. And conditions of basic experiment are the outside diameter of discharge tube : 52 mm, the length of discharge tube : 350 mm, the frequence : 900 Hz, the temperature of cooling water : 25 $^{\circ}C$, quantity of flow : 5, 10, 20 l/min, pressure : 1.2, 1.4, 1.6 atm, and distance of discharge gap : 0.4, 0.6, 0.8 mm. Ozone generation characteristics were measured to consumption power. At quantity of flow : 20 l/min, discharge gap : 0.6 mm, pressure : 1.6, and consumption power : 150 W, Maximum ozone generation efficiency of 175 g/kWh was obtained. Maximum ozone generation efficiency was measured below the flow quantity of 20 l/min at below pressure of 1.6 atm. However, Maximum ozone generation efficiency was measured over the flow quantity of 20 l/min at over pressure of 1.6 atm.

• Proceedings of the KIEE Conference
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• 2002.11a
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• pp.206-208
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• 2002

A novel ozonizer has been developed using a high frequence surface discharge and a high purity ceramic as its dielectric component. And A cylindrical thin compound ceramic catalyst in reactor is adhered to inside of the film-like outside electrode. An ac exciting voltage with frequency to 0.6 kHz from 1.0 kHz and $4{\sim}6$ kV of peak-to-peak is applied between the electrodes to produce a stable high-frequency silent discharge for generation of ozone. A substantial reduction of the exciting voltage is also enabled by using a thin ceramic. As a result, the ozonizer can easily produce ozone concentration(50 $g/m^3$ for oxygen) and power efficiency(240 g/kWh for oxygen) without using a special enrichment means.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.529-532
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• 2003

In this paper, the discharge characteristics of silent discharge chamber with 2mm and 3mm gap spacings were investigated. Dielectric of $Al_2O_3$ was embedded in the cylindrical type of discharge chamber. It was known that V-I and P-V characteristics depend strongly on the charge transportation characteristics, and in the low frequency silent discharge mode of operation, discharge voltage was always sustained to Vd, irrespective of applied voltage.