• Title/Summary/Keyword: 반응 깊이 측정

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Studies on the Ta-Si-n Barrier Used for Cu Interconnection (Cu배선을 위한 Ta-Si-N Barrier에 관한 연구)

  • Sin, Yeong-Hun;Kim, Jong-Cheol;Lee, Jong-Mu
    • Korean Journal of Materials Research
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    • v.7 no.6
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    • pp.498-504
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    • 1997
  • Cu는 AI보다 비저항이 더 낮고, 일렉트로마이그레이션 내성이 더 강하기 때문에 AI을 대체하여 사용될 새로운 상부배선 재료로 널리 연구되고 있다. 그러나 Cu는 SiO$_{2}$층을 통해 Si기판 속으로 확산하는 것과 같은 열적불안정성을 갖고 있으므로 Cu 배선을 위해서는 barrier금속을 함께 사용해야 한다. 지금까지 알려진 가장 우수한 재료는 TaSi$_{x}$N$_{y}$이다. Tasi$_{x}$N$_{y}$는 90$0^{\circ}C$에서 불량이 발생하는 것으로 보고된 바 있으나, 그것의 barrier특성과 관련하여 확인하고 또 새로 조사되어야 할 내용들이 많이 있다. 본 연구에서는 반응성 스퍼터링 테크닉을 사용하여 (100)Si 웨이퍼상에 TaSi$_{x}$N$_{y}$막을 증착하고, Cu에 대한 barrier재료로서 반드시 갖추어야 할 열적 안정성을 면저항의측정, X선 회절 및 AES 깊이분석 등에 의하여 조사하였다. 스퍼터링 공정에서 N$_{2}$/Ar기체의 유량비가 15%일때 열적 안정성이 가장 우수한 TaSi$_{x}$N$_{y}$막이 얻어졌다. Ta와 TaN은 각각 $600^{\circ}C$$650^{\circ}C$에서 불량이 발생하는 반면, TaSi$_{x}$N$_{y}$는 90$0^{\circ}C$에서 불량이 발생하였다. TaSi$_{x}$N$_{y}$의 불량기구는 다음과 같다:Cu는 TaSi$_{x}$N$_{y}$막을 통과하여 TaSi$_{x}$N$_{y}$/Si계면으로 이동한 다음 Si기판내의 Si원자들과 반응한다. 그 결과 TaSi$_{x}$N$_{y}$Si가 생성된다.

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Contribution of Nociceptin to Alterations in Cerebral Blood Flow Regulation Following Postnatal Exposure to Ethanol in Rats (출생 초기 에탄올 투여 흰쥐의 뇌혈류 조절 변동에 대한 Nociceptin의 관여)

  • Cho, Dong Hwan;Lee, Won Suk
    • Journal of Life Science
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    • v.23 no.2
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    • pp.157-166
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    • 2013
  • This study aimed to investigate whether nociceptin contributes to the alterations in cerebral blood flow (CBF) regulation following postnatal exposure to ethanol in Sprague-Dawley rats. Animals received ethanol twice a day, 2 hr apart, on postnatal 6, 7 and 8 days. The changes in regional CBF (rCBF) in response to the changes in mean arterial blood pressure were determined at 4-, 8-, and 12-week of age by laser-Doppler flowmetry. Hypotension was induced by the gradual withdrawal of blood from arterial catheter, and the reversal of blood pressure was produced by the reinfusion of blood. Expression of nociceptin-like immunoreactivity was determined in dura mater and cerebral cortex using immunohistochemistry. Postnatal exposure to ethanol almost abolished the autoregulation of rCBF in all age groups. Pretreatment with nociceptin but not with [$Nphe^1$]nociceptin(1-13)$NH_2$, a selective competitive nociceptin receptor antagonist, 5 min prior to ethanol administration preserved the autoregulation of rCBF in all age groups. Postnatal exposure to ethanol markedly increased the expressions of nociceptin-like immunoreactivity in the dura mater and cerebral cortex, both of which were significantly inhibited by pretreatment with 7-nitroindazole monosodium salt as well as aminoguanidine 5 min prior to ethanol administration in all age groups. The values of arterial blood gas analysis were not significantly different from the basal levels in all groups. These results suggest that nociceptin deeply contributes to the compensatory mechanisms for the nitric oxide-dependent alterations in CBF autoregulation following postnatal exposure to ethanol.

Application of a Numerical Model for the Prediction of Vertical Profiles of Electron Acceptors Based on Degradation of Organic Matter in Benthic Sediments (퇴적 유기물 분해과정에 따른 물질 거동 변화 예측을 위한 수치모델 적용)

  • Choi, Jung-Hyun;Park, Seok-Soon
    • Journal of Korean Society of Environmental Engineers
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    • v.27 no.2
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    • pp.151-157
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    • 2005
  • A one-dimensional numerical model was developed to simulate vertical profiles of electron acceptors and their reduced species in benthic sediments. The model accounted for microbial degradation of organic matter and subsequent chemical reactions of interest using stoichiometric relationships. Depending on the dominant electron acceptors utilized by microorganisms, the benthic sediments were assumed to be vertically subdivided into six zones: (1) aerobic respiration, (2) denitrification, (3) manganese reduction, (4) iron reduction, (5) sulfate reduction, and (6) methanogenesis. The utilizations of electron acceptors in the biologically mediated oxidation of organic matter were represented by Monod-type expression. The mass balance equations formulated for the reactive transport of organic matter, electron acceptors, and their corresponding reduced species in the sediments were solved utilizing an iterative multistep numerical method. The ability of model to simulate a freshwater sediments system was tested by comparing simulation results against published data obtained from lake sediments. The simulation results reasonably agreed with field measurements for most species, except for ammonia. This result showed that the C/N ratio (106/16) in the sediments is lower than what the Redfield formula prescribes. Since accurate estimates of vertical profiles of electron acceptors and their reduced species are important to determine the mobility and bioavailability of trace metals in the sediments, the model has potential application to assess the stability of selected trace metals in the sediments.

Effects of Self-disclosing Agents (자기노출 에이전트의 효과)

  • Park, Joo-Yeon
    • Journal of the HCI Society of Korea
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    • v.1 no.2
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    • pp.35-42
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    • 2006
  • The importance of interface agent as user interface increases in the ubiquitous computing environment. It is essential that an interface agent can develop social relationship with users. We propose that self-disclosure, a major factor to form and maintain human relationship, can be useful to achieve this goal. This study examined the effects of the degree of a computer agent's self-disclosure on the users' social responses. The experiment was conducted in a 2(intimacy of agent's disclosure: high vs. low) by 2(amount of agent's disclosure: high vs. low) between-group design. The results show that: 1) reciprocity of self-disclosure was found in both sub-dimensions (intimacy and amount) of self-disclosure; 2) in case that participants received highly intimate self-disclosure from the agent, social attraction, trustworthiness and expectation of mutual influence toward agent were lower than when the agent's disclosure was less intimate. These findings suggest that the intimacy of agent's self-disclosure can affect on gathering user information and human-agent relationship formation separately. While agent's highly intimate disclosure can be useful to gather user information, agent's appropriate disclosure can be useful to form positive user-agent relationship.

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Fabrication and Measurement of Optical Waveguide using Multi Quantum Well Intermixing (다중양자우물구조의 상호섞임을 이용한 광도파로의 제작 및 측정)

  • Yeo, Deok-Ho;Yoon, Kyung-Hun;Kim, Sung-June
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.36D no.7
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    • pp.50-55
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    • 1999
  • We have fabricated optical waveguide which utilizes intermixing of InGaAs/InGaAsP multi quantum well separate confinement heterostructure. The waveguide was fabricated by reactive ion etching technique using $CH_4/H_2$ gas mixture, and the width and depth of the waveguide ware $5{\mu}m$ and $1.2{\mu}m$, respectively. The propagation loss of the waveguide was measured by Fabry-Perot interference phenomena using tunable laser. For the waveguide after $800^{\circ}C$, 30s heat treatment, the measured loss was 3.76dB/cm and 3.95dB/cm for TE and TM mode, respectively. This value is very small compared to other waveguide made by IFVD technique. Hence, this technique can applied to integration of waveguide and electronic devices.

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Experimental Study on the Effect of Flow around Solid Combustibles and Thermal Thickness on Heat Release Rate Characteristics (고체 가연물 주위의 유동과 열적 두께의 변화가 열방출률 특성에 미치는 영향에 관한 실험적 연구)

  • Hong, Ter-Ki;Seo, Dong-Pyo;Park, Seul-Hyun
    • Fire Science and Engineering
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    • v.34 no.3
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    • pp.28-34
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    • 2020
  • In this study, an ISO 5660-1 cone calorimeter experiment was conducted to examine the effects of changes in flow and thermal thickness around solid combustibles on heat release rate characteristics. Polymethyl methacrylate (PMMA) is a solid combustible material that does not generate char during the combustion reaction. Hence, it was selected for the experiment, and the thermal penetration depth was calculated to distinguish the thermal thickness of PMMA. Furthermore, the thermal decomposition characteristics were analyzed by measuring the heat release rate measured during the combustion of PMMA. This was performed after generating the forced flow around the combustibles by setting the duct flow of the cone calorimeter to 12, 24, and 40 L/s. The results confirmed that the thermal release rate of the thermally thin combustible material was not significantly affected by the change in the surrounding flow. Hence, the thermally thick combustible material was significantly affected by the change in the flow rate.

Development of Accident-prevention Smart Monitoring System for Woman Diver using Zigbee Module and GPS Sensor (Zigbee와 GPS를 이용한 해녀 사고예방 스마트 모니터링 시스템 개발)

  • Choi, Min Ho;Kim, Young Sang
    • Smart Media Journal
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    • v.5 no.3
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    • pp.74-80
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    • 2016
  • In this paper, we propose an accident-prevention smart monitoring system for Haenyeo(Woman diver) using Zigbee module and GPS sensor. This system can collect such information as the diving location, the body temperature, the depth of diving, and the diving time of a Woman diver working under the water and then respond immediately to an accident occurring. The research developed a smart Teawak and smart swimming goggles which can measure the state of a Woman diver and her diving activities. Smart Teawak, the buoy tool while a Woman diver is collecting seafoods under water, is able to receive GPS and transmit the data from smart swimming goggles and Zigbee Module to IHSS(IoT based Haenyeo Safety service Software) server. In addition, IHSS, a responsive web, provides the diving location and the state of a Woman diver on the smart phone. As a result, the system will be useful in the aspects of Woman diver' health care and the safety, furthermore, which will significantly contribute to global marketing of Woman diver with its being designated as a UNESCO intangible cultural asset.

Characterization of Physical Factor of Unsaturated Ground Deformation induced by Rainfall (강우를 고려한 불포화 지반변형의 영향인자 평가)

  • Kim, Man-Il;Jeon, Gyo-Cheol
    • The Journal of Engineering Geology
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    • v.18 no.2
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    • pp.127-136
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    • 2008
  • Geophysical survey for establishing a wide site for the distribution of water content, wetting front infiltration due to the rainfall, and distribution of groundwater level has been performed by using 8round penetration radar (GPR) method, electrical resistivity method, and so on. On the other hand, a narrow area survey was performed to use a permittivity method such as time domain reflectometry, frequency domain reflectometry, and amplitude domain reflectometry methods for estimating volumetric water content, soil density, and concentration of contaminant in surface and subsurface. The permittivity methods establish more corrective physical parameters than different found survey technologies mentioned above. In this study for establishment of infiltration behaviors for wetting front in the unsaturated soil caused by an artificial rainfall, soil physical parameters for volumetric water content, pore water pressure, and pore air pressure were measured by FDR measurement device and pore water pressure meter which are installed in the unsaturated weathered granite soil with different depths. Consequently, the authors were proposed to a new establishment method for analyzing the variations of volumetric water content and wetting front infiltration from the responses of infiltrating pore water in the unsaturated soil.

Evaluation of the Sealing Capacity of the Supercritical CO2 by the Measurement of Its Injection Pressure into the Tuff and the Mudstone in the Janggi Basin (초임계이산화탄소(scCO2) 주입압력 측정에 의한 장기분지 응회암과 이암의 scCO2 차폐능 평가)

  • An, Jeongpil;Lee, Minhee;Wang, Sookyun
    • Economic and Environmental Geology
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    • v.50 no.4
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    • pp.303-311
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    • 2017
  • The laboratory scale experiment was performed to evaluate the sealing capacity of the capping rock such as tuff and mudstone, measuring the intial supercritical $CO_2$ ($scCO_2$) injection pressure and the $scCO_2$-water-rock reaction for 90 days. The drilling cores sampled from 800 m in depth around the Janggi basin, Korea were used for the experiment. The mineralogical changes of mudstone and tuff were measured to evaluate the geochemical stability during the $scCO_2$-water-rock reaction at $CO_2$ storage condition (100 bar and $50^{\circ}C$). The rock core was fixed in the high pressurized stainless steel cell and was saturated with distilled water at 100 bar of pore water pressure. The effluent of the cell was connected to the large tank filled with 3 L of water and 2 L of $scCO_2$ at 100 bar, simulating the subsurface injection condition. The $scCO_2$ injection pressure, which was higher than 100 bar, was controlled at the influent port of the cell until the $scCO_2$ begin to penetrate into the rock and the initial injection pressure (> 100 bar) of $scCO_2$ into the rock was measured for each rock. The mineralogical compositions of mudstones after 90 days reaction were similar to those before the reaction, suggesting that the mudstone in the Janggi basin has remained relatively stable for the $scCO_2$ involved geochemical reaction. The initial $scCO_2$ injection pressure (${\Delta}P$) of a tuff in the Janggi basin was 15 bar and the continuous $scCO_2$ injection into the tuff core occurred at higher than 20 bar of injection pressure. For the mudstone in the Janggi basin, the initial $scCO_2$ injection pressure was higher than 150 bar (10 times higher than that of the tuff). From the results, the mudstone in Janggi basin was more suitable than the tuff to shield the $scCO_2$ leakage from the reservoir rock at subsurface.

A Study on the Applicability of Levee Leakage Monitoring System Using Movable TDR Sensor (제방 누수 모니터링을 위한 이동식 TDR 센서의 적용성 평가)

  • Cho, Jinwoo;Choi, Bong-Hyuck;Cho, Won-Beom;Kim, Jin-Man
    • Journal of the Korean Geosynthetics Society
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    • v.13 no.3
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    • pp.1-10
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    • 2014
  • Several types of methods such as resistivity survey, ground penetration radar, etc are used for detection of levee leakage and according to the river design guidelines detection of levee leakage is performed by measuring the hydraulic conductivity of levee soil. But, the former can not verify the leakage point and degree of saturation, the latter is an after treatment method. Movable sensor, which is a high-tech TDR system developed since 2000, can obtain directly the dielectric constant profile covering the whole depth of levee. In this study, laboratory and field model experiments were carried out using movable TDR sensor in order to evaluate the applicability as detection system of levee leakage, As the result, movable TDR system has proven to be 3 times more sensitive to water contents than dry unit weight, and the results conclude that the dielectric constant, water contents and density of the ground proved to have a correlation among them, and the dielectric constant is expected to be a basic data on detection of levee leakage.