• Title/Summary/Keyword: 반도체 레이저

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반도체 노광공정에 이용되는 엑시머 레이저의 기술 현황 및 시장 동향

  • 이형권
    • The Optical Journal
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    • v.14 no.3 s.79
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    • pp.51-53
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    • 2002
  • 2002년 초에 Dataquest에 의해 발표된 시장전망에 의하면, 2003년 이후 3$~$4년간 엑시머 레이저를 이용한 DUV 노광장비 시장은 큰 폭으로 확대될 것으로 전망하고 있으며, DRAM 수요의 증가와 12인치(300mm) 공정의 가속화가 그 예상을 뒷받침 하고 있다. 특히, KrF엑시머 레이저 공정 이후에 도입될 ArF엑시머 레이저 시장의 확대가 주목된다.

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Thermal Lens Compensation in a Fiber-Coupled Laser-Diode Pumped Ceramic Nd:YAG Laser (광섬유 연결 반도체레이저 여기 세라믹 Nd:YAG 레이저에서 열렌즈 효과의 보상)

  • Kim, Duck-Lae;Kim, Yeong-Sik;Kim, Byung-Tai
    • Korean Journal of Optics and Photonics
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    • v.18 no.3
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    • pp.208-215
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    • 2007
  • A fiber-coupled laser-diode pumped ceramic Nd:YAG laser for compensating the thermal tensing effect was developed. The thermal tensing effect was compensated using a convex lens, which was 25 mm away from the laser rod, with a focal length of 30 mm and an effective clear aperture of 22 mm. Without a compensator, the laser output power decreased suddenly above a pump power of 6 W. Using a compensator, the laser output power increased linearly according to the pump power. The beam propagation factor $M^{2}$ was 2.4 under a pump power of 12 W.

레이저를 이용한 미세가공

  • 김호성
    • 전기의세계
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    • v.42 no.10
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    • pp.50-54
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    • 1993
  • 레이저를 이용한 미세 정밀 가공을 하려면 레이저를 포함한 광학기기의 특성을 잘 알고 있어야 하며 가공재료에 대한 물리화학적 특성에 대한 지식이 필수적이다. 이러한 기술적 문제 외에도 초기투자 비용 및 운전비용, 그리고 양산성까지 포함된 경제적 문제를 고려해야 한다. 그러나 이미 설치된 레이저의 활용도를 높여 시작품의 제작과 양산에 사용한다거나 기존의 방법에 비해 제품의 질과 가격이 우수한 경우 그리고 레이저이외의 방법으로는 제작이 불가능한 경우 레이저이외의 방법으로는 제작이 불가능한 경우 레이저에 의한 가공이 가능하다. 본 특집의 경우와 같이 가공의 제규격이 반도체공정으로는 너무 크고 기계가공으로는 너무 작은 초소형기기의 가공에는 많은 응용이 가능하리라 믿어진다.

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Thermal Effect on Laser-Diode Side-Pumped Nd:YAG Laser (반도체 레이저 측면 여기 Nd:YAG 매질에서의 열영향)

  • 양동옥;김병태
    • Proceedings of the Optical Society of Korea Conference
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    • 2000.08a
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    • pp.110-111
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    • 2000
  • 여기 파워는 고체 레이저 매질 내부에 열을 발생시킨다. 매질 내부에서 발생한 열은 매질 표면을 따라 냉각이 진행되어 매질 내부에서는 불균일한 온도분포가 발생하게 된다. 레이저 매질의 굴절율은 온도에 따라 변하기 때문에 열복굴절 현상과 열렌즈 현상이 일어나 레이저 출력의 손실, 빔질의 저하를 유발하고 열적 스트레스는 매질의 손상 및 모드 동기된 극초단 펄스가 넓어지는 등의 문제를 초래한다. 선형 편광 광선을 이용하는 고체 레이저에서 열복굴절에 의해 레이저 출력이 약 30 %까지 감소하므로 레이저 공진기를 구성하는데 있어서 정량적인 열영향의 해석이 필요하다. 열복굴절에 의해 발생한 손실량은 다음과 같이 표현할 수 있다. (중략)

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Numerical analysis on the effects of external light injection seeding in a gain-switched DFB semiconductor laser (이득 스위칭 DFB 반도체 레이저에서 외부 광 주입 효과의 수치적 분석)

  • 이명우
    • Korean Journal of Optics and Photonics
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    • v.11 no.4
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    • pp.265-270
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    • 2000
  • We investigate the effects of the power and wavelength of externally injection seeded light on timing jitter and pulse width in a gain-switched $1.55\mu\textrm{m}$ DFB semiconductor laser by numerical simulation based on the transmission line laser model. As external seeding power increases, the timing jitter decreases and the pulse width increases. The lowest timing jitter is observed when the seed wavelength is aligned with the chirped spectrum center. By external seeding, we can decrease the timing jitter up to 1/2.7 without noticeable increase in pulse width. Our simulation results reasonably well agree with our sampled experiment and the other published papers. This proves the validity of our model to analyze a system based on a semiconductor laser. laser.

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Thermal effect at Nd:YAG using a laser-diode side-pumping (반도체 레이저 측면 여기 Nd:YAG 매질에서의 열영향)

  • 양동옥;김병태
    • Korean Journal of Optics and Photonics
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    • v.14 no.1
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    • pp.44-50
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    • 2003
  • This paper describes the thermal effect at Nd:YAG using a laser-diode side-pumping. To detect the depolarization loss and the retardation caused by the thermal effect, a λ/4 plate is inserted between the polarizer and the Nd:YAG laser material. Using a CCD has allowed detection of the variation of the beam pattern that could analyze the change of the refractive index of the Nd:YAG laser material by the thermal effect. Through the change of the probe beam power, we know that 21% of the pumping power was converted into heat in the material. The depolarization loss was 24.7% under a temperature of $25^{\circ}C$ of the laser material and a pumping power of 15 W. The inhomogeneous distribution showed that the retardation angle was 7$^{\circ}$ in the center of the material and 19$^{\circ}$ on the edge of it. It is confirmed that the thermal effect is analyzed at the each point of the laser material and it suggests an effective method to reduce the thermal effect on the LD side-pumped laser material.

Optical Technology of Mechanical Industries in the 21st Century (21세기 기계산업의 변화 - 광기술의 발전 동향)

  • Joo, Ki-Nam
    • Transactions of the KSME C: Technology and Education
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    • v.5 no.1
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    • pp.53-61
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    • 2017
  • In this review paper, the trend for optical technology is described as the development of mechanical industries in the $21^{st}$ century. Optical technology has been essential in various industries such as mechanical, electronic industries as the convergence technology. Based on the roadmap of optical science and technology, 12 working groups are categorized as the technical point of view and most of them are closely related to mechanical industries. Especially, solid-state lighting, optical metrology and industrial laser processing are important technologies in precision engineering and manufacturing. This paper introduces these optical technologies and their technological issues to look into the development trends and expectation.

Guided-mode Resonances in Periodic Surface Structures Induced on Si Thin Film by a Laser (레이저에 의해 생성된 Si 박막의 주기적 표면 구조에서의 도파모드 공진 연구)

  • Ji Hyuk Lee;Yoon Joo Lee;Hyun Hong;Eun Sol Cho;Ji Young Park;Ju Hyeon Kim;Min Jin Kang;Eui Sun Hwang;Byoung-Ho Cheong
    • Korean Journal of Optics and Photonics
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    • v.34 no.6
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    • pp.241-247
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    • 2023
  • We examine the spectral characteristics of laser-induced periodic surface structures (LIPSSs) formed on an amorphous silicon film irradiated by a 355-nm nanosecond laser. A Gaussian beam with a diameter of 196 ㎛ is used to perform a two-dimensional raster scan. The laser's pulse number is varied from 190 to 280, and its intensity is adjusted within 100-130 mJ/cm2. LIPSSs with a periodicity of approximately 330 nm form on the surface of the Si film, aligned perpendicular to the laser's polarization. Transmission spectra of the samples show dips around 700 nm for transverse electric polarization and around 500 nm for transverse magnetic polarization. The features are investigated with a one-dimensional-grating model using a rigorous coupled-wave analysis. Simulations confirm that the observed dips are due to the resonant modes, depending on the polarization.

Spectral Mode Analysis of an Injection-Locked Semiconductor Laser (광 주입-잠금된 반도체 레이저의 모드 분석)

  • Bae, I.H.;Moon, H.S.;Kim, J.N.
    • Korean Journal of Optics and Photonics
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    • v.18 no.5
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    • pp.317-322
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    • 2007
  • We performed injection-locking by two independent semiconductor lasers and investigated the spectral modes of the injection-locked laser From the observation of the saturated absorption spectrum in the $^{85}Rb$ D1 transition line, we have confirmed that the frequency of the injection-locked slave laser is synchronized by the frequency of the master laser, and the slave laser has a narrow linewidth after injection-locking. According to the intensity injected into the slave laser, we measured the variation of the injection-locking range and the mode of the injection-locked slave laser by using the confocal Fabry-Ferret interferometer. In the case of the incomplete injection-locking, we observed the competition between the free running mode of the slave laser and the mode of the master laser and analyzed the modes of the injection-locked slave laser.

Dependence of CW Mode Locking on Resonator Mode Size in a Yb:YAG Laser Mode-Locked by a Semiconductor Saturable Absorber Mirror (반도체 포화 흡수체 반사경에 의해 모드 잠금된 Yb:YAG 레이저 출력의 공진기 모드 크기에 대한 의존성 연구)

  • Kim, Hyun Chul;Lim, Han Bum;Chae, Dong Won;Kim, Hyun Su
    • Korean Journal of Optics and Photonics
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    • v.26 no.6
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    • pp.312-317
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    • 2015
  • We investigate the effect of laser-resonator mode size on the output of a Yb:YAG laser that is mode-locked by a semiconductor saturable absorber mirror (SESAM). We demonstrate that the smaller the product of the mode sizes at a SESAM and at a Yb:YAG crystal, the more stable the mode-locked output is. Also, we found numerically that there is a resonator length at which the mode-locked output occurs, regardless of the thermal lens effect of a Yb:YAG.