• Journal of Korean Electronics
• /
• v.5 no.9
• /
• pp.76-78
• /
• 1985

• Journal of Korean Electronics
• /
• v.7 no.2
• /
• pp.85-88
• /
• 1987

• Journal of Korean Electronics
• /
• v.9 no.8
• /
• pp.60-64
• /
• 1989

• Journal of Korean Electronics
• /
• v.25 no.8
• /
• pp.42-43
• /
• 2005

• Science & Technology Policy
• /
• v.5 no.11 s.80
• /
• pp.13-16
• /
• 1995

• Journal of Korean Electronics
• /
• v.9 no.4
• /
• pp.34-39
• /
• 1989

• Journal of Korean Electronics
• /
• v.9 no.4
• /
• pp.88-92
• /
• 1989

• Journal of Korean Electronics
• /
• v.8 no.8
• /
• pp.89-92
• /
• 1988

• Journal of Korean Electronics
• /
• v.8 no.9
• /
• pp.104-107
• /
• 1988

• Clean Technology
• /
• v.5 no.1
• /
• pp.62-77
• /
• 1999

Semiconductor industry has rapidly grown because of the need from electronic and computer industries. However the global environmental regulations for various hazardous chemical compounds, which are indispensably used in semiconductor manufacturing process, are getting stronger. The semiconductor industries should develop the cleaner technologies in order to both lead the future world market and avoid the regulations form environmentally developed countries. In this paper, cleaner technologies for semiconductor cleaning processes are surveyed, such as gas phase process, UV process, and plasma process. Advantages and disadvantages of these processes are discussed.