• Journal of Advanced Marine Engineering and Technology
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• v.39 no.1
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• pp.45-51
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• 2015

In this paper, we study the RF characteristics of the short wavelength thin-film transmission line employing microstrip line (ML)/coplanar waveguide (CPW) composite structure on silicon substrate for application to RFIC (radio frequency integrated circuit). The thin-film transmission line employing ML/CPW composite structure showed a wavelength shorter than conventional transmission lines. Concretely, at 10 GHz, the wavelength of the transmission line employing ML/CPW composite structure was 6.26 mm, which was 60.5 % of the conventional coplanar waveguide. We also extracted the bandwidth characteristic of the transmission line employing ML/CPW composite structure using equivalent circuit analysis. The S parameter of the equivalent circuit showed a good agreement with measured result. According to the bandwidth extraction result, the cut-off frequency of thin-film transmission line employing ML/CPW composite structure was 377 GHz. Above results indicate that the transmission line employing ML/CPW composite structure can be effectively used for application to broadband and compact RFIC.