• Title/Summary/Keyword: 박막근사방정식

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The Flow of a Liquid Film on Spin Coating (스핀 코팅에서의 액막의 흐름)

  • Kim, Tae-sung
    • Journal of ILASS-Korea
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    • v.18 no.3
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    • pp.146-154
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    • 2013
  • The flow of a liquid film on spin coating is investigated in the case that the fixed volume of a liquid is placed on the center of a stationary disk. Thin film equations that are well approximated when the characteristic length in the vertical direction is much smaller than that in the radial direction (${\varepsilon}{\ll}1$) and have already been proposed in the work of T.-S. Kim & M.-U. Kim (2009), are used. The differential equation that governs the free surface of a liquid when ${\varepsilon}{\ll}1$ and ${\varepsilon}Re{\ll}1$ is also derived. The basic flow is analyzed using the thin film equations and their results are compared to the results of Navier-Stokes equations.