• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1997.10a
• /
• pp.10-10
• /
• 1997

• Journal of the Korean Society for Precision Engineering
• /
• v.17 no.4
• /
• pp.129-134
• /
• 2000

This paper presents the development of ultra-precision machining process of large aspheric aluminum mirrors with a maximum diameter of 620 mm. An ultra-precision machine, "Nanoturn60", developed by Daewoo Heavy Industries Ltd. is used for machining and motion errors of the machine are compensated by using the FTS developed by IAE(Institue for Advanced Engineering) during the machining process. To check the form accuracy of machined aspheric surfaces, on-machine form measurement system is developed. This measurement system consists of air bearing touch probe, straight edge, and laser sensor. With in-process error compensation by FTS(Fast Tool Servo), aspheric mirrors with the from accuracy of submicron order are obtained. obtained.