• 한국정밀공학회지
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• 제15권1호
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• pp.94-100
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• 1998

Microstep characteristics largely depends on the variation of friction force induced by the geometric accuracy of ballscrew, guide rail and the control characteristics of servo unit. In this paper, for improving the microstep characteristics of hydrostatic table with ballscrew, microstep resolution according to the control mode of servo amplifier and response characteristic by the variation of integral gain are tested and compared. Relationship between micro motion behavior of hydrostatic table and the output torque is also tested for acquiring the effective variables on control characteristics. From the results. it is confirmed that the torque control mode has a advantage in microstep resolution, and more stable than velocity control mode in low feed rate, and by the increase of integral gain in the elastic motion realm, response characteristics can be improved.