• 전기의세계
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• v.43 no.9
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• pp.9-16
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• 1994

본 고에서는 미세 가공기술의 실제적인 응용 예로써 일본 동북대학의 연구 내용을 간략히 소개하고자 한다. 동북대학은 미세 가공기술을 이용하여 미세 구조물의 제작 뿐 아니라 센서 및 주변회로의 집적에 의한 미세 시스템의 연구에 많은 힘을 기울이고 있으며 특히 모든 연구의 최대 목표가 철저하게 실제 응용이 가능한 시스템의 개발에 있으므로 이곳에서의 연구 내용을 전반적으로 살펴보는 것은 국내 연구에서의 방향설정 및 참고 자료로서 도움이 될 수 있으리라 판단된다. 동북대학에서의 미세 가공기술 관련 연구는 매우 방대하고 다소 산만한 느낌도 있으나 전체적으로 1. 가속도 센서를 중심으로 한 집적화 용량형 센서의 개발, 2. 고감도 센서의 개발, 3. 마이크로 액튜에이터의 제작, 4. 입체적 미세 가공기술의 개발 등으로 분류할 수 있다. 이중에서 비교적 연구 성과가 나타나고 있는 대표적인 몇가지 예에 대해서 개략적으로 살펴보도록 하겠다.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.3
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• pp.7-12
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• 2002

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.1029-1032
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• 2002

This paper describes a design of a tactile sensor, which can measure three components force and temperature due to thermal conductive. The bio-mimetic tactile sensor, alternative to human's finger, is comprised of four micro force sensors and four thermal sensors, and its size being 10mm$\times$10mm. Each micro force sensor has a square membrane, and its force range is 0.1N - 5N in the three-axis directions. On the other hand, the thermal sensor for temperature measurement has a heater and four temperature sensor elements. The thermal sensor is designed to keep the temperature. $36.5^{\circ}C$, constant, like human skin, and measure the temperature $0^{\circ}C$ to $50^{\circ}C$. The MEMS technology is applied to fabricate the sensing element of the tactile sensor.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.497-502
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• 2002

This paper describes a design methodology of a tri-axial silicon-based farce sensor with square membrane by using micromachining technology (MEMS). The sensor has a maximum farce range of 5 N and a minimum force range of 0.1N in the three-axis directions. A simple beam theory was adopted to design the shape of the micro-force sensor. Also the optimal positions of piezoresistors were determined by the strain distribution obtained from the commercial finite element analysis program, ANSYS. The Wheatstone bridge circuits were designed to consider the sensitivity of the force sensor and its temperature compensation. Finally the process for microfabrication was designed using micromachining technology.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.38-38
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• 2004

본 연구에서는 미세 물체를 조작하기 위해 젓가락 구조론 가진 3 텅스텐 젓가락형 그립퍼(이후 텅스텐 그립퍼로 명명)와 2 하이브리드 젓가락형 그립퍼(이후 하이브리드형 그립퍼로 명명)를 설계하고 제작하여 장단점을 비교 분석한다. 두 가지 그립퍼의 미세 핑거(Micro fingers)들은 모두 압전 다중 벤더(Piezoelectric Multilayer bender)와 스택(Stack) 구동기로 구동되었다. 그 중 압전 다중벤더는 물체를 잡을 때 굽힘(Bending) 운동을 만들고 스택은 팁간의 끝점이 일치하지 않을 매 일치되도록 잡는 방향과 수직한 방향으로 구동된다.(중략)

• Journal of the Korean Institute of Intelligent Systems
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• v.15 no.7
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• pp.870-874
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• 2005

This paper presents capacitive tactile sensor that can detect normal and shear forces. This tactile sensor consists of index plate, sensing plate, and elastic dielectric layer. The calculated sensing character is based on the changes of space between two horizontal plate. Larger overlap areas and narrow space between top and bottom plate guarantees higher sensitivity. Tactile sense information can be calculated from the changes of phase of output signal. The symmetric arrangement of sensing plates makes the manufacturing process easier and guarantees the stability of the structure. In this paper, the sensor structure is designed, the mechanism of the Proposed sensor is theoretically explained, and the simulated result is presented.

• Korean Chemical Engineering Research
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• v.57 no.2
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• pp.149-163
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• 2019

Under non-uniform electric field, a directional force along the electric field gradient is applied to matter having permanent or induced dipoles. The transport of particles by the directional force is called dielectrophoresis (DEP). Since the strength and direction of the DEP force depend on parameters, such as permittivity and conductivity of particles and surrounding media, and frequency of the applied AC electric field, particle can be precisely manipulated by controlling the parameters. Moreover, unlike electrophoresis, DEP can be applied to any particles where dipole is effectively induced by electric field. Such a DEP technique has been used in various fields, ranging from microfluidic engineering to biosensor and microchip research. This paper first describes the fundamentals of DEP, and discusses representative microelectrode designs used for DEP study. Then, exemplary applications of DEP, such as separation, capture and self-assembly of particles, are introduced.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.246-250
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• 2003

In this study, two new types of micro-grippers in which micro-fingers are actuated by piezoelectric multi-layer benders and stacks are introduced for the manipulation of micrometer-sized objects. First, we constructed a 3-chopstick-mechanism tungsten gripper, which is composed of three chopsticks: two are designed to grip micro-objects, and tile third is used to help grasp and release the objects through overcoming especially electrostatic force among some surface effects including electrostatic, van der Waals forces and surface tension. Second, a 2-chopstick-mechanism silicon micro-gripper that uses an integrated force sensor to control the gripping force was developed. The micro-gripper is composed of a piezoelectric multilayer bender for actuating the gripper fingers, silicon fingertips fabricated by use of silicon-based micromachining, and supplementary supports. The micro-gripper is referred to as a hybrid-type micro-gripper because it is composed of two main components; micro-fingertips fabricated using micromachining technology to integrate a very sensitive force sensor for measuring the gripping force, and piezoelectric gripper finger actuators that are capable of large gripping forces and moving strokes. The gripping force signal was found to have a sensitivity of 667 N/V. To the design of each of components of both of the grippers. a systematic design approach was applied, which made it possible to establish the functional requirements and design parameters of the micro-grippers. The micro-grippers were installed on a manual manipulator to assess its performance in tasks such as moving micro-objects from one position to a desired position. The experiment showed that the micro-grippers function effectively.

• Science of Emotion and Sensibility
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• v.7 no.4
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• pp.19-24
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• 2004

The purpose of this study is to evaluate the possibility of identifying joint damping property through commercially available isokinetic ergometer (BIODEX). The proposed method is to estimate the damping torque of the knee joint from the difference between the external joint torque for maintaining isokinetic movement and the gravity torque of the lower leg. The damping torque was estimated at various joint angular velocities, from which the damping property would be derived. Measurement setup was composed of the BIODEX system with an external force sensor and Labview system. Matlab was used in the analysis of the damping property. The experimental result showed that the small variation in angular velocity due to acceleration and deceleration of the crank arm resulted in greater change of inertial torque than the damping torque. Therefore, the estimation of damping property from the isokinetic movement is difficult.