• Title/Summary/Keyword: 미세 그루브

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Micro Machining Characteristics of V-shaped Single Crystal Diamond Tool with Ductile Workpiece (V형 다이아몬드공구에 의한 연질소재의 미세절삭특성 연구)

  • Hong, Sung-Min;Je, Tae-Jin;Lee, Dong-Ju;Lee, Jong-Chan
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.4 no.4
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    • pp.28-33
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    • 2005
  • Recently, trends of TFT-LCD toward larger scale and thinner thickness continue. so, demands of Light Guide Panel (LGP) which is to substitute for prism sheet are appeared. Functions of LGP obtaining polarization of light of the prism sheet as well as the incidence and reflection of light are demanded. This prism type LGP to complete functions of the existing LGP and polarization at once must be supported by micro machining technology of LGP surface. In this research, the machining characteristics of the various materials were analysed by shaping using V-shaped single crystal diamond tool. The characteristics are machined surface, machining force due to the variation of cutting depth. Used specimens are engineering materials, which are 6:4 brass, oxygen-free copper, Al6061, PC, PMMA. The FFT analysis of the measured cutting force was conducted. The cutting characteristics were analyzed and the optimum cutting conditions with materials were established.

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Effect of Ti Contents on characteristics of 700Mpa Weld Metal (Ti 함량에 따른 700MPa급 용착금속의 특성 변화)

  • Park, H.K.;Kim, H.J.;Seo, J.S.;Ryoo, H.S.;Ko, J.H.
    • Proceedings of the KWS Conference
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    • 2009.11a
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    • pp.47-47
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    • 2009
  • 용착금속의 미세조직은 크게 Acicular ferrite(AF), Ferrite with aligned second phase(FS), Primary ferrite(=Grain boundary Ferrite) 등으로 나눌 수 있다. 이 중 침상형 페라이트(AF)는 인성과 강도를 동시에 증가시킬 수 있으므로 이를 다량 확보하는 것이 용접산업의 관건이다. 본 연구에서는 침상형 페라이트 발생에 기여한다고 알려진 Ti 함량을 용착금속에서 단계적으로 조절하여 나타나는 미세조직과 특성변화를 관찰하였다. 모재는 HSB-600을 사용하였으며 용접재료는 ER100S-G급의 Ti가 함유되어 있는 것(A)과 미함유된 것(B)을 사용하였다. 모재 성분의 희석을 방지하기 위해 V-Groove 가공 후 Buttering 용접을 실시하였다. 중앙에 가공된 V-그루브에 이들 재료를 적절히 조합하고 용접(입열량 20kJ/cm)하여 Ti함유량을 총 4가지(0.002~0.025% Ti)로 제어하였다. 용접 후 각각의 시편에 대해 미세조직, 충격시험, O/N분석, 성분분석 등의 시험을 진행하였다. 미세조직 관찰결과 Ti함량이 증가할수록 AF는 증가하고 FS는 감소함을 확인할 수 있었으며 충격시험결과 Ti가 많이 함유된 시편일수록 더 낮은 연성취성 천이온도(DBTT)를 나타내었다. EDS와 SEM으로 관찰한 결과 Ti함량 증가에 따라 비금속개재물의 크기는 작아지고 밀도는 높아지는 것을 확인할 수 있었으며 개재물 내에서의 Ti함량도 더 많아지는 것을 확인 할 수 있었다.

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Lubrication Analysis of Infinite Width Slider Bearing with a Micro-Groove: Part 3 - Effect of Groove Shape (미세 그루브가 있는 무한폭 Slider 베어링의 윤활해석: 제3보 - 그루브 형상의 영향)

  • Park, TaeJo;Jang, InGyu
    • Tribology and Lubricants
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    • v.36 no.4
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    • pp.193-198
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    • 2020
  • Fluid film bearings are among the best devices used for overcoming friction and reducing wear. Surface texturing is a new surface treatment technique used for processing grooves and dimples on the lubricated surface, and it helps to minimize friction further and improve the wear resistance. In several studies, parallel surfaces, such as thrust bearings and mechanical face seals, have been investigated, but most sliding bearings have a convergent film shape. This paper presents the third part of a recent study and focuses on the effect of the groove shape on the lubrication performance of inclined slider bearings, following the two previous papers on the effects of the groove position and depth. We adopted the continuity and Navier - Stokes equations to conduct numerical analyses using FLUENT, which is a commercial computational fluid dynamics code. The groove shape adopted in the numerical analysis is rectangular and triangular, and its depth is varied. The results show that the streamlines, pressure distributions, and groove shape significantly influence the lubrication performance of the inclined slider bearing. For both shapes, the load-carrying capacity (LCC) is maximum near the groove depth, where vortices occur. In the shallow grooves, the LCC of the rectangular shape is higher, but in deeper grooves, that of the triangular shape is higher. The deeper the rectangular groove, the higher the decrease in the frictional force. The results of this study can be used as design data for various sliding bearings.

Lubrication Analysis of Infinite Width Slider Bearing with a Micro-Groove: Part 1 - Effect of Groove Position (미세 그루브가 있는 무한폭 Slider 베어링의 윤활해석: 제1보 - 그루브 위치의 영향)

  • Park, TaeJo;Jang, InGyu
    • Tribology and Lubricants
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    • v.35 no.6
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    • pp.376-381
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    • 2019
  • Surface texturing is widely applied to reduce friction and improve the reliability of machine elements. Despite extensive theoretical studies to date, most research has been limited to parallel thrust bearings, mechanical face seals, piston rings, etc. However, most sliding bearings have a convergent film shape in the sliding direction and the hydrodynamic pressure is mainly generated by the wedge action. The results of surface texturing on inclined slider bearings are largely insufficient. This paper is the first part of a recent study focusing on the effect of the groove position on the lubrication performances of inclined slider bearings. We model a slider bearing with one rectangular groove on a fixed pad and analyze the continuity and Navier-Stokes equations using a commercial computational fluid dynamics (CFD) code, FLUENT. The results show that the film convergence ratio and the groove position have a significant influence on the pressure and velocity distributions. There are groove positions to maximize the supporting load with the film convergence ratio and the groove reduces the frictional force acting on the slider. Therefore, the proper groove position not only improves the load-carrying capacity of the slider bearings but also reduces its frictional loss. The present results apply to various surface-textured sliding bearings and can lead to further studies.

Lubrication Analysis of Infinite Width Slider Bearing with a Micro-Groove: Part 2 - Effect of Groove Depth (미세 그루브가 있는 무한폭 Slider 베어링의 윤활해석: 제2보 - 그루브 깊이의 영향)

  • Park, TaeJo;Jang, InGyu
    • Tribology and Lubricants
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    • v.35 no.6
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    • pp.382-388
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    • 2019
  • It is currently well known that surface textures act as lubricant reservoirs, entrap wear debris, and hydrodynamic bearings, which can lead to certain increases in load-carrying capacities. Until recently, the vast majority of research has focused on parallel sliding machine components such as thrust bearings, mechanical face seals, piston rings, etc. However, most sliding bearings have a convergent film shape in the sliding direction and their hydrodynamic pressure is mainly generated by the wedge action. Following the first part of the present study that investigates the effect of groove position on the lubrication performances of inclined slider bearings, this paper focuses on the effects of groove depths and film thicknesses. Using a commercial computational fluid dynamics (CFD) code, FLUENT, the continuity and Navier-Stokes equations are numerically analyzed. The results show that the film thickness and groove depth have a significant influence on the pressure distribution. The maximum pressure occurs at the groove depth where the vortex is found and, as the depth increases, the pressure decreases. There is also a groove depth to maximize the supporting load with the film thickness. The friction force acting on the slider decreases with deeper grooves. Therefore, properly designed groove depths, depending on the operating conditions, can improve the load-carrying capacity of inclined slider bearings as compared to the bearings without a groove.

CMP 컨디셔닝 공정에서의 부식방지를 위한 자기조립 단분자막의 적용과 표면특성 평가

  • Jo, Byeong-Jun;Gwon, Tae-Yeong;Venkatesh, R. Prasanna;Kim, Hyeok-Min;Park, Jin-Gu
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.05a
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    • pp.33.2-33.2
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    • 2011
  • CMP (Chemical-Mechanical Planarization) 공정이란 화학적 반응과 기계적 힘을 동시에 이용하여 표면을 평탄화하는 공정으로, 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위해 CMP 공정이 도입되었으며 반도체 패턴의 미세화와 다층화에 따라 CMP 공정의 중요성은 더욱 강조되고 있다. CMP 공정은 압력, 속도 등의 공정조건과, 화학적 반응을 유도하는 슬러리, 기계적 힘을 위한 패드 등에 의해 복합적으로 영향을 받는다. CMP 공정에서, 폴리우레탄 패드는 많은 기공들을 포함한 그루브(groove)를 형성하고 있어 웨이퍼와 직접적으로 접촉을 하며 공정 중 유입된 슬러리가 효과적으로 연마를 할 수 있도록 도와주는 역할을 한다. 하지만, 공정이 진행 될수록 그루브는 손상이 되어 제 역할을 하지 못하게 된다. 패드 컨디셔닝이란 컨디셔너가 CMP 공정 중에 지속적으로 패드 표면을 연마하여 패드의 손상된 부분을 제거하고 새로운 표면을 노출시켜 패드의 상태를 일정하게 유지시키는 것을 말한다. 한편, 금속박막의 CMP 공정에 사용되는 슬러리는 금속박막과 산화반응을 하기 위하여 산화제를 포함하는데, 산화제는 금속 컨디셔너 표면을 산화시켜 부식을 야기한다. 컨디셔너의 표면부식은 반도체 수율에 직접적인 영향을 줄 수 있는 scratch 등을 발생시킬 뿐만 아니라, 컨디셔너의 수명도 저하시키게 되므로 이를 방지하기 위한 노력이 매우 중요하다. 본 연구에서는 컨디셔너 표면에 연마 잔여물 흡착을 억제하고, 슬러리와 컨디셔너 표면 간에 일어나는 표면부식을 방지하기 위하여 소수성 자기조립 단분자막(SAM: Self-assembled monolayer)을 증착하여 특성을 평가하였다. SAM은 2가지 전구체(FOTS, Dodecanethiol를 사용하여 Vapor SAM 방법으로 증착하였고, 접촉각 측정을 통하여 단분자막의 증착 여부를 평가하였다. 또한 표면부식 특성은 Potentiodynamic polarization와 Electrochemical Impedance Spectroscopy (EIS) 등의 전기화학 분석법을 사용하여 평가되었다. SAM 표면은 정접촉각 측정기(Phoenix 300, SEO)를 사용하여 $90^{\circ}$ 이상의 소수성 접촉각으로써 증착여부를 확인하였다. 또한, 표면에너지 감소로 인하여 슬러리 내의 연마입자 및 연마잔여물 흡착이 감소하는 것을 확인 하였다. Potentiodynamic polarization과 EIS의 결과 분석으로부터 SAM이 증착된 표면의 부식전위와 부식전류밀도가 감소하며, 임피던스 값이 증가하는 것을 확인하였다. 본 연구에서는 컨디셔너 표면에 SAM을 증착 하였고, CMP 공정 중 발생하는 오염물의 흡착을 감소시킴으로써 CMP 연마 효율을 증가하는 동시에 컨디셔너 금속표면의 부식을 방지함으로써 내구성이 증가될 수 있음을 확인 하였다.

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Effect of Fatigue Strength in Fillet Weldments with Different Groove Angle and Porosity (필렛 용접 시 그루브 각도와 미세기공에 따른 피로강도의 영향)

  • Koo, Bon-Cheol
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.6 no.2
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    • pp.9-16
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    • 2007
  • The fatigue test of the fillet weldments were executed with different groove angles and porosity. The groove angles of $90^{\circ}$, $45^{\circ}$ and $55^{\circ}$ were compared with fatigue lives. After the fillet weldment failure, the porosity which found at the fractured surface were observed to account the effect on fatigue life. Finite element analysis were performed to correlate the fatigue strength and the size & the location of porosity. The stress-strain field were severely affected by the length of notch and the size & location of porosity. Based on the quantitative analysis of porosity effect, the total volume of porosity was key factor for fatigue strength of the fillet weldment.

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A Study on Forming of Micro Rib Barriers by Roll Forming Technique (롤 포밍에 의한 미세 격벽 성형에 대한 연구)

  • Park, Jong-Jin;Hwang, Han-Sub
    • Proceedings of the KSME Conference
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    • 2003.04a
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    • pp.1136-1141
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    • 2003
  • Among various methods to manufacture the PDP barrier ribs, the pressing and the roll forming methods are simple and economical because they form the ribs by utilizing the plastic flow of the green tape in a relatively short time without generating air-polluting dusts. In the present study, the roll forming method was investigated by experiments as well as numerical analyses and in result the groove roll and the preform were designed. The effect of draft angle, comer radius, and initial thickness of the green tape on the plastic flow was examined by a series of parametric studies. The preform was recommended to ease the plastic flow into the grooves and to avoid the occurrence of crack during rolling and sintering processes.

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Machining of Micro Grooves using Hybrid Electrochemical Processes with Voltage Pulses (펄스 전기화학 복합가공기술을 적용한 미세 그루브 가공)

  • 이은상;박정우;문영훈
    • Journal of the Korean Society for Precision Engineering
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    • v.20 no.9
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    • pp.32-39
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    • 2003
  • Pulse electrochemical machining process with high or low current density may produce a non-lustrous surface on workpiece surface. The usual polishing process to remove a black layer from the surface has been hand polish the part. But the milli-to-micro meter scale structure formed by the electrochemical machining process may be destroyed while polishing process. The application of ultra short voltage pulses based on the analysis of electrical double layer charging process allows high resolution electrochemical machining and polishing. This technique was based on the specific polarization resistance from the comparison of ideal and experimental potential variation during short voltage pulses.

Study on the Pressure Drop Characteristics of Liquid Flow in Open Microchannels with the Countercurrent Vapor Flow (기체 대향류가 존재하는 미소 액체 개수로 유동의 압력강하 특성에 관한 이론 및 실험적 연구)

  • Kim Sung Jin;Nam Myeong Ryong;Seo Joung Ki
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.29 no.6 s.237
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    • pp.747-754
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    • 2005
  • Because the liquid-vapor interfacial shear stress affects seriously the liquid flow and the maximum heat transport rate of the grooved wick heat pipe, an accurate modeling for the pressure drop characteristics of the liquid flow is required. A novel method for calculating the liquid pressure drop and the velocity profile of an open channel flow in a microchannel with an arbitrary cross-section is suggested and validated by experiments. An experimental apparatus for the Poiseuille number of the liquid flow in open rectangular microchannels with the hydraulic diameters of 0.40mm, 0.43mm, 0.48mm is used in order to reproduce real situations in the grooved wick heat pipe. Analytic results from the suggested method are compared with the experimental data and they are in a close agreement with each other.