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자화된 $SF_6$ 유도결합형 플라즈마를 이용한 SiC 식각 특성에 관한 연구

  • 이효영;김동우;박병재;염근영
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2003.05a
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    • pp.14-14
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    • 2003
  • Silicon carbide (SiC)는 높은 power 영역과 높은 온도영역에서도 작동 가능한 우수한 반도체 물질이다. 또한 우수한 열적 화학적, 안정성을 가지고 있어 가흑한 조건에서의 소자로써도 사용 가능하다. 현재 SiC 적용분야로는 우수한 전기적, 기계적 성질을 이용한 미세소자(MEMS)와 GaN 와 거의 유사한 격자상수를 가지는 것을 이용한 GaN epitaxial 성장의 기판으로도 사용되어진다. 그러나 SiC 는 기존의 습식식각 용매에 대해 화학적 안정성을 가지고 있기 때문에 전자소자의 제작에 있어서 플라즈마를 이용한 건식식각의 중요성이 대두되어지고 있다. 소자제작에 있어 이러한 건식식각시 식각 단면의 제어, 이온에 의한 낮은 손상 정도, 매끄러운 식각 표면, 그리고 고속의 식각 속도둥이 요구되어진다. 본 실험에서는 식각 속도의 증가와 수직한 식각 단면둥을 획득하기 위하여 SF6 플라즈마에서 Source power, dc bias voltage, 그리고 외부에서 인가되는 자속의 세기를 변화시쳐가며 식각 속도, 식각 마스크와의 식각 션택비, 식각 단면둥과 같은 SiC 의 식각 특성을 관찰하였다. 식각 후 식각 단면은 주사전자 현미경(SEM)을 통해 관찰하였다. 본 실험에서의 가장 높은 식각 속도는 분당 1850n 로써 이때의 공정조건은 1400W 의 inductive power, -600V 의 dc bias voltage, 20G 의 외부자속 세기이었다. 또한, 높은 inductive power 조건과 낮은 dc bias voltage 조건에서 Cu는 $SF_6$ 플라즈마 내에서 식각부산물의 증착으로 인해 SiC 와 무한대의 식각선택비를 보였다. 이러한 Cu 마스크를 사용한 SiC 의 식각에서는 식각 후 수직한 식각 단변을 관찰할 수 있었다. 것올 알 수 있다. 따라서, 기존의 pve 보다 세라믹 기판의 경우가 수분 흡수율이 높아 더 오랫동안 전류를 흐르게 하여 방식성이 개선된 것으로 판단된다.을 통해 경도가 증가한 시편의 경우 석출상의 크기가 5nm 이하로 매우 작고 대체로 기지와 연속적인 계면을 형성하나, 열처리가 진행될수록 석 출상의 크기가 커지고 임계크기 이상에 이르면 연속적인 계면은 거의 발견되지 않고, 대부 분 불연속적이고 확연한 계면을 형성함을 관찰 할 수 있었다. 알루미나(${\alpha}-Al_2O_3$) 기판 위에 증착한 $(Ti_{1-x}AI_{x})N$ 피막은 마찬가지로 (200) 우선 방위를 나타내었으나, 그 입자의 크기가 수십 nm로 고속도강위에 증착한 피막에 비해 상당히 크게 형성되었다. 또한 열처리 후에 AIN의 석출이 진행됨에도 불구하고 경도 증가는 나타나지 않고, 열처리가 진행됨에 따라 경도가 감소하는 양상만을 나타내었다. 결국 $(Ti_{1-x}AI_{x})N$ 피막이 열처리 전후에 보아는 기계적 특성의 변화 양상은 열역학적으로 안정한 Wurzite-AlN의 석출에 따른 것으로 AlN 석출상의 크기에 의존하며, 또한 이러한 영향은 $(Ti_{1-x}AI_{x})N$ 피막에 존재하는 AI의 함량이 높고, 초기에 증착된 막의 업자 크기가 작을 수록 클 것으로 여겨진다. 그리고 환경의 의미의 차이에 따라 경관의 미학적 평가가 달라진 것으로 나타났다.corner$적 의도에 의한 경관구성의 일면을 확인할수 있지만 엄밀히 생각하여 보면 이러한 예의 경우도 최락의 총체적인 외형은 마찬가지로 $\ulcorner$순응$\lrcorner$의 범위를 벗어나지 않는다. 그렇기 때문에

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Penetration behavior by carbon potential in laser-carburized TiZrN coatings (TiZrN 코팅의 레이저 침탄에서 탄소 포텐셜에 따른 침입 거동)

  • Lee, Byunghyun;Kim, Taewoo;Hong, Eunpyo;Kim, Seonghoon;Lee, Heesoo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.31 no.6
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    • pp.282-286
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    • 2021
  • Penetration depth and compressive residual stress of laser-carburized TiZrN coating by thickness of carbon paste were investigated in terms of carbon potential. The carbon paste was covered with a thickness of 1.1 mm using screen printing, and applied to a thickness of 0.4 mm using spin coating, and laser carburization was performed under the same conditions. As the thickness of carbon paste increased, the diffraction pattern of the laser-carburized TiZrN coating shifted to a lower angle, indicating solid solution strengthening and lattice distortion. For microstructure analysis using TEM, the defects and carbon concentration of the laser-carburized TiZrN coating increased as the carbon paste was thicker. It indicated that the variation of the carbon potential corresponds to the change in the paste thickness. In XPS depth profile analysis, high concentration of carbon and formation of carbide were observed in laser-carburized TiZrN coating with thick carbon paste. It revealed that the carbon concentration on the surface and carbon potential were changed by the thickness control of carbon paste. The compressive residual stress increased from 3.67 GPa to 4.58 GPa by the variation of carbon concentration.

Spatial Gap-filling of GK-2A/AMI Hourly AOD Products Using Meteorological Data and Machine Learning (기상모델자료와 기계학습을 이용한 GK-2A/AMI Hourly AOD 산출물의 결측화소 복원)

  • Youn, Youjeong;Kang, Jonggu;Kim, Geunah;Park, Ganghyun;Choi, Soyeon;Lee, Yangwon
    • Korean Journal of Remote Sensing
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    • v.38 no.5_3
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    • pp.953-966
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    • 2022
  • Since aerosols adversely affect human health, such as deteriorating air quality, quantitative observation of the distribution and characteristics of aerosols is essential. Recently, satellite-based Aerosol Optical Depth (AOD) data is used in various studies as periodic and quantitative information acquisition means on the global scale, but optical sensor-based satellite AOD images are missing in some areas with cloud conditions. In this study, we produced gap-free GeoKompsat 2A (GK-2A) Advanced Meteorological Imager (AMI) AOD hourly images after generating a Random Forest based gap-filling model using grid meteorological and geographic elements as input variables. The accuracy of the model is Mean Bias Error (MBE) of -0.002 and Root Mean Square Error (RMSE) of 0.145, which is higher than the target accuracy of the original data and considering that the target object is an atmospheric variable with Correlation Coefficient (CC) of 0.714, it is a model with sufficient explanatory power. The high temporal resolution of geostationary satellites is suitable for diurnal variation observation and is an important model for other research such as input for atmospheric correction, estimation of ground PM, analysis of small fires or pollutants.

Synthesis, Characterization and Ammonia Decomposition Reaction Activity of Vanadium Oxynitride Obtained from the Reduction/Nitridation of Vanadium Oxide (바나디움 산화물의 환원 및 질화반응으로부터 얻어진 바나디움 산화질화물의 제조, 특성분석 및 암모니아 분해반응에서의 촉매 활성)

  • Yun, Kyung Hee;Shin, Chae-Ho
    • Korean Chemical Engineering Research
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    • v.60 no.4
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    • pp.620-629
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    • 2022
  • By varying various experimental conditions such as heating rate, molar hourly space velocity (MHSV), and nitridation reaction temperature, vanadium oxynitride was prepared through temperature programmed reduction/nitridation reaction (TPRN) of vanadium pentoxide and ammonia, and characterization were performed. In order to investigate the physico-chemical properties of the prepared catalyst, N2 adsorption-desorption analysis, X-ray diffraction analysis (XRD), hydrogen temperature programmed reduction (H2-TPR), temperature programmed oxidation (TPO), ammonia temperature programmed desorption (NH3-TPD), transmission electron microscopy (TEM) was performed. Transformation of V2O5 with 5 m2 g-1 low specific surface area by reduction at 340 ℃ to V2O3 showed a high specific surface area value of 115 m2 g-1 by micropore formation. As the nitridation temperature increased beyond that, the specific surface area continued to decrease due to sintering. The nitridation reaction variable that had the greatest influence on the specific surface area was the reaction temperature, and the x + y value of VNxOy of a single phase approached from 1.5 to 1.0 as the nitridation reaction temperature increased. At a high reaction temperature of 680 ℃, the cubic lattice constant a was VN. close to the value. At 680 ℃, the highest nitridation temperature among the experimental conditions, the ammonia conversion rate was 93%, and no deactivation was observed.

A SVR Based-Pseudo Modified Einstein Procedure Incorporating H-ADCP Model for Real-Time Total Sediment Discharge Monitoring (실시간 총유사량 모니터링을 위한 H-ADCP 연계 수정 아인슈타인 방법의 의사 SVR 모형)

  • Noh, Hyoseob;Son, Geunsoo;Kim, Dongsu;Park, Yong Sung
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.43 no.3
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    • pp.321-335
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    • 2023
  • Monitoring sediment loads in natural rivers is the key process in river engineering, but it is costly and dangerous. In practice, suspended loads are directly measured, and total loads, which is a summation of suspended loads and bed loads, are estimated. This study proposes a real-time sediment discharge monitoring system using the horizontal acoustic Doppler current profiler (H-ADCP) and support vector regression (SVR). The proposed system is comprised of the SVR model for suspended sediment concentration (SVR-SSC) and for total loads (SVR-QTL), respectively. SVR-SSC estimates SSC and SVR-QTL mimics the modified Einstein procedure. The grid search with K-fold cross validation (Grid-CV) and the recursive feature elimination (RFE) were employed to determine SVR's hyperparameters and input variables. The two SVR models showed reasonable cross-validation scores (R2) with 0.885 (SVR-SSC) and 0.860 (SVR-QTL). During the time-series sediment load monitoring period, we successfully detected various sediment transport phenomena in natural streams, such as hysteresis loops and sensitive sediment fluctuations. The newly proposed sediment monitoring system depends only on the gauged features by H-ADCP without additional assumptions in hydraulic variables (e.g., friction slope and suspended sediment size distribution). This method can be applied to any ADCP-installed discharge monitoring station economically and is expected to enhance temporal resolution in sediment monitoring.

Parameter Sensitivity Analysis of VfloTM Model In Jungnang basin (중랑천 유역에서의 VfloTM 모형의 매개변수 민감도 분석)

  • Kim, Byung Sik;Kim, Bo Kyung;Kim, Hung Soo
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.29 no.6B
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    • pp.503-512
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    • 2009
  • Watershed models, which are a tool for water cycle mechanism, are classified as the distributed model and the lumped model. Currently, the distributed models have been more widely used than lumped model for many researches and applications. The lumped model estimates the parameters in the conceptual and empirical sense, on the other hand, in the case of distributed model the first-guess value is estimated from the grid-based watershed characteristics and rainfall data. Therefore, the distributed model needs more detailed parameter adjustment in its calibration and also one should precisely understand the model parameters' characteristics and sensitivity. This study uses Jungnang basin as a study area and $Vflo^{TM}$ model, which is a physics-based distributed hydrologic model, is used to analyze its parameters' sensitivity. To begin with, 100 years frequency-design rainfall is derived from Huff's method for rainfall duration of 6 hours, then the discharge is simulated using the calibrated parameters of $Vflo^{TM}$ model. As a result, hydraulic conductivity and overland's roughness have an effect on runoff depth and peak discharge, respectively, while channel's roughness have influence on travel time and peak discharge.

Properties of Liquid Crystalline Polyester/Poly(ethylene 2,6-naphthalate) Blend Fibers (액정 폴리에스테르/PEN 블렌드 섬유의 성질)

  • Kim, Won;Kim, Young-Yong;Son, Jung-Sun;Yun, Doo-Soo;Han, Chul;Choi, Jae-Kon;Jo, Byung-Wook
    • Elastomers and Composites
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    • v.37 no.4
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    • pp.244-257
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    • 2002
  • A thermotropic liquid crystalline polymer(TLCP) which has flexible butylene/hexylene spacers in the main chain and a triad aromatic ester type mesogenic unit containing a naphthyl group was prepared by solution polycondensation. The in-situ composites based on poly(ethylene 2,6-naphthalate) (PEN) and a thermotropic liquid crystalline polymer(TLCP) were prepared and melt spun at different TLCP contents and different draw ratios to produce monofilaments. Blends of the TLCP with PEN were investigated in terms of thermal, mechanical properties and morphology. The TLCP synthesized showed nematic mesophasic behavior and its transition temperature to isotropic melt from mesophase was 249℃. The blends showed well dispersed TLCP phases in the PEN matrix without macroscopic phase separation. Inclusion of TLCP in the blends decreased the cold crystallization temperature of PEN in the blend, therefore, the TLCP acts as a nucleating agent in the blend and showed good interfacial adhesion between the dispersed LCP phases and PEN matrix with domain sizes 40~50 nm in diameter and well developed fibrillation in the monofilaments. The TLCP acted effectively as a reinforcing material in the PEN matrix at the 10wt% level, it led to an increase of initial modulus up to 270% and tensile strength by 235%, while the elongation rate increasing with higher draw ratios.

The Effect of Mg/W Addition on the Metal-insulator Transition of VO2 Using Spark Plasma Sintering (통전활성소결법으로 제조한 VO2의 금속-절연체 전이 특성에 W와 Mg 첨가가 미치는 영향)

  • Jin, Woochan;Kim, Youngjin;Park, Chan;Jang, Hyejin
    • Journal of the Microelectronics and Packaging Society
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    • v.29 no.4
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    • pp.63-69
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    • 2022
  • Vanadium dioxide shows a unique and interesting property of metal-insulator transition, which has attracted great attention from the viewpoints of fundamental materials science and industrial applications. In this study, the effect of Mg and W addition on the metal-insulator transition of VO2 were investigated for the bulk materials that are prepared by spark plasma sintering. The X-ray diffraction analysis of the sintered specimens revealed that the lattice parameters barely change, and the secondary phases are present. The transition temperature of MIT appears in the range of 64.2-64.6℃, regardless of the impurity element and content. On the other hand, the addition of Mg and W alters the electrical conductivity, i.e., the electrical conductivity increases by a factor of up to 2.4 or decrease by a factor of up to 57.4 depending on the impurity type and its content. The thermal conductivity showed the values of 1.8~2.5 W/m·K below the transition temperature, and the values of 1.9~2.8 W/m·K above the transition temperature. These changes in electrical and thermal conductivities can be attributed to the combination of the change in charge carrier density, the impurities as scattering centers, and the change in microstructures.

Magnetic Properties of $ThMn_{12}-type$$NdFe_{10.7}Ti_{1.2}Mo_{0.1}$>$Ti_{1.2}Mo_{0.1}$ ($ThMn_{12}$$NdFe_{10.7}Ti_{1.2}Mo_{0.1}$의 미세구조 및 자기적 성질 연구)

  • 안성용;이승화;김철성;김윤배;김창석
    • Journal of the Korean Magnetics Society
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    • v.7 no.2
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    • pp.90-96
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    • 1997
  • We have studied crystallographic and magnetic properties of $NdFe_{10.7}Ti_ {1.2}Mo_{0.1}$ by Mossbauer spectroscopy, X-ray diffraction and vibrating sample magnetometer (VSM). The alloys were prepared by arc-melting under an argon atmosphere. The $NdFe_{10.7}Ti_{1.2}Mo_{0.1}$ has pure a single phase, whereas $NdFe_{10.7}Ti_{1.3}$ contains some $\alpha$-Fe, conformed with X-ray diffractometry and Mossbauer measurements. The $NdFe_{10.7}Ti_ {1.2}Mo_{0.1}$ has a $ThMn_{12}-type$ tetragonal structure with $a_0=8.637{\AA}$ and $c_0=4.807{\AA}$. The Curie temperature ($T_c$) is 600 K from the result of Mossbauer measurement performed at various temperatures ranging from 13 to 800 K. Each spectrum of below $T_c$ is fitted with five subspectra of Fe sites in the structure ($8i_1, 8i_2, 8j_2, 8j_1, 8f$). The area fractions of the subspectra at room temperature are 12.3%, 14.0%, 21.0% 11.8%, 40.9%, respectively. Magnetic hyperfine fields for the Fe sites decrease in the order, $H_{hf}(8i)>H_{hf}(8j)>H_{hf}(8f)$. The abrupt changes in the magnetic hyperfine field, an magnetic moment observed at about 160 K in $NdFe_ {10.7} Ti_{1.2}Mo_{0.1}$ are attributed to spin reorientations. The average hyperfine field of the $NdFe_{10.7}Ti_{1.2}Mo_{0.1}$ shows a temperature dependence of $[H_{hf}(T)-H_{hf}(0)]/H_{hf}(0)=-0.34(T/T_C)^{3/2}-0.14(T/T_C)^{5/2}$ for $T/T_c<0.7$, indicative of spin wave excitation. The Debye temperatures of $NdFe_{10.7}Ti_{1.2}Mo_{0.1}$ is found to be Θ=340$\pm$5 K.

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The Additional Effects of Various Materials on Microwave Heating Property of Frozen Dough (품질개량제 첨가가 냉동반죽의 Microwave 가열특성에 미치는 영향)

  • Kim, Eun-Mi;Han, Hye-Kyung;Kim, In-Ho
    • Korean Journal of Food Science and Technology
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    • v.37 no.6
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    • pp.873-881
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    • 2005
  • This study was conducted to improve the properties of frozen dough foods (buns and noodles etc.) on the quality deterioration with microwave oven cooking. Microwave is a useful cooking method, but it quickly takes moisture from food surface and makes lowering food quality abruptly. For improvement of these problems, mixing doughs with addition of various additives of 34 types manufactured respectively; starches, modified starches, gums and emulsifiers etc. Each mixing dough produced in sheet type $(30{\times}30{\times}1mm)$ and steamed them, was quickly froze at $-70^{\circ}C$ and packed with polyethylene. Packed samples kept at $-20^{\circ}C$ for 48 hours. After they were steam or microwave treatment packed or non-packed with polyethylene, studied for improvement effects of quality as sensory evaluation and selected 6 type additives; modified starches (TA, ST), gums (AR, GA) and emulsifiers (E, S1) as improvement agent. Because moisture loss from microwave oven cooking leads to quality deterioration of frozen dough foods, additive, such as including starches, modified starch, gums, and emusifiers were added to improve dough properties. Amylogram, scanning electron microscopy, textural analysis, and differential scanning calorimetry revealed addition of additives improved textural properties including surface-hardening of frozen dough foods compared to the control.